JPWO2024062561A1 - - Google Patents

Info

Publication number
JPWO2024062561A1
JPWO2024062561A1 JP2024547998A JP2024547998A JPWO2024062561A1 JP WO2024062561 A1 JPWO2024062561 A1 JP WO2024062561A1 JP 2024547998 A JP2024547998 A JP 2024547998A JP 2024547998 A JP2024547998 A JP 2024547998A JP WO2024062561 A1 JPWO2024062561 A1 JP WO2024062561A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2024547998A
Other languages
Japanese (ja)
Other versions
JPWO2024062561A5 (https=
JP7853431B2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2024062561A1 publication Critical patent/JPWO2024062561A1/ja
Publication of JPWO2024062561A5 publication Critical patent/JPWO2024062561A5/ja
Application granted granted Critical
Publication of JP7853431B2 publication Critical patent/JP7853431B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07342—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being at an angle other than perpendicular to test object, e.g. probe card
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06733—Geometry aspects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06716—Elastic
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06755—Material aspects
    • G01R1/06761—Material aspects related to layers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07314—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being perpendicular to test object, e.g. bed of nails or probe with bump contacts on a rigid support

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Geometry (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP2024547998A 2022-09-21 プローブカード用プローブ Active JP7853431B2 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2022/035190 WO2024062561A1 (ja) 2022-09-21 2022-09-21 プローブカード用プローブ

Publications (3)

Publication Number Publication Date
JPWO2024062561A1 true JPWO2024062561A1 (https=) 2024-03-28
JPWO2024062561A5 JPWO2024062561A5 (https=) 2025-05-27
JP7853431B2 JP7853431B2 (ja) 2026-04-28

Family

ID=

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6022668A (ja) * 1983-05-03 1985-02-05 ニツクスドルフ・コンプ−タ−・アクチエンゲゼルシヤフト 導体盤試験のための試験装置用試験針
JP2006511804A (ja) * 2002-12-23 2006-04-06 フォームファクター，インコーポレイテッド 微小電子接触構造体
WO2014087906A1 (ja) * 2012-12-04 2014-06-12 日本電子材料株式会社 電気的接触子
WO2016156002A1 (en) * 2015-03-31 2016-10-06 Technoprobe S.P.A. Contact probe and corresponding testing head with vertical probes, particularly for high frequency applications
WO2024062558A1 (ja) * 2022-09-21 2024-03-28 日本電子材料株式会社 プローブカード用プローブ
JP7470860B2 (ja) * 2021-03-16 2024-04-18 日本電子材料株式会社 プローブカード用プローブおよびその製造方法

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6022668A (ja) * 1983-05-03 1985-02-05 ニツクスドルフ・コンプ−タ−・アクチエンゲゼルシヤフト 導体盤試験のための試験装置用試験針
JP2006511804A (ja) * 2002-12-23 2006-04-06 フォームファクター，インコーポレイテッド 微小電子接触構造体
WO2014087906A1 (ja) * 2012-12-04 2014-06-12 日本電子材料株式会社 電気的接触子
WO2016156002A1 (en) * 2015-03-31 2016-10-06 Technoprobe S.P.A. Contact probe and corresponding testing head with vertical probes, particularly for high frequency applications
JP7470860B2 (ja) * 2021-03-16 2024-04-18 日本電子材料株式会社 プローブカード用プローブおよびその製造方法
WO2024062558A1 (ja) * 2022-09-21 2024-03-28 日本電子材料株式会社 プローブカード用プローブ

Also Published As

Publication number Publication date
US20260104437A1 (en) 2026-04-16
KR102874365B1 (ko) 2025-10-21
CN119895273A (zh) 2025-04-25
TW202429091A (zh) 2024-07-16
KR20250050103A (ko) 2025-04-14
TWI880346B (zh) 2025-04-11
WO2024062561A1 (ja) 2024-03-28

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