JP7853431B2 - プローブカード用プローブ - Google Patents

プローブカード用プローブ

Info

Publication number
JP7853431B2
JP7853431B2 JP2024547998A JP2024547998A JP7853431B2 JP 7853431 B2 JP7853431 B2 JP 7853431B2 JP 2024547998 A JP2024547998 A JP 2024547998A JP 2024547998 A JP2024547998 A JP 2024547998A JP 7853431 B2 JP7853431 B2 JP 7853431B2
Authority
JP
Japan
Prior art keywords
probe
deformation
metal layer
region
probe card
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2024547998A
Other languages
English (en)
Japanese (ja)
Other versions
JPWO2024062561A5 (https=
JPWO2024062561A1 (https=
Inventor
則之 福嶋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Japan Electronic Materials Corp
Original Assignee
Japan Electronic Materials Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Japan Electronic Materials Corp filed Critical Japan Electronic Materials Corp
Publication of JPWO2024062561A1 publication Critical patent/JPWO2024062561A1/ja
Publication of JPWO2024062561A5 publication Critical patent/JPWO2024062561A5/ja
Application granted granted Critical
Publication of JP7853431B2 publication Critical patent/JP7853431B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06733—Geometry aspects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07342—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being at an angle other than perpendicular to test object, e.g. probe card
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06716—Elastic
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06755—Material aspects
    • G01R1/06761—Material aspects related to layers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07314—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being perpendicular to test object, e.g. bed of nails or probe with bump contacts on a rigid support

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Geometry (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP2024547998A 2022-09-21 2022-09-21 プローブカード用プローブ Active JP7853431B2 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2022/035190 WO2024062561A1 (ja) 2022-09-21 2022-09-21 プローブカード用プローブ

Publications (3)

Publication Number Publication Date
JPWO2024062561A1 JPWO2024062561A1 (https=) 2024-03-28
JPWO2024062561A5 JPWO2024062561A5 (https=) 2025-05-27
JP7853431B2 true JP7853431B2 (ja) 2026-04-28

Family

ID=90454047

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2024547998A Active JP7853431B2 (ja) 2022-09-21 2022-09-21 プローブカード用プローブ

Country Status (6)

Country Link
US (1) US20260104437A1 (https=)
JP (1) JP7853431B2 (https=)
KR (1) KR102874365B1 (https=)
CN (1) CN119895273A (https=)
TW (1) TWI880346B (https=)
WO (1) WO2024062561A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2026007066A1 (zh) * 2024-07-04 2026-01-08 普乐贝斯半导体(无锡)有限公司 探针及探针卡

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006511804A (ja) 2002-12-23 2006-04-06 フォームファクター，インコーポレイテッド 微小電子接触構造体
WO2014087906A1 (ja) 2012-12-04 2014-06-12 日本電子材料株式会社 電気的接触子
WO2016156002A1 (en) 2015-03-31 2016-10-06 Technoprobe S.P.A. Contact probe and corresponding testing head with vertical probes, particularly for high frequency applications
WO2024062558A1 (ja) 2022-09-21 2024-03-28 日本電子材料株式会社 プローブカード用プローブ
JP7470860B2 (ja) 2021-03-16 2024-04-18 日本電子材料株式会社 プローブカード用プローブおよびその製造方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3316103C2 (de) * 1983-05-03 1991-12-12 Nixdorf Computer Ag, 4790 Paderborn Prüfnadel für ein Prüfgerät zum Prüfen von Leiterplatten
JP2012042330A (ja) 2010-08-19 2012-03-01 Micronics Japan Co Ltd プローブカードの製造方法
EP4501108A1 (fr) * 2023-08-01 2025-02-05 Berkem Developpement Systeme de detection d'insectes nuisibles et procede associe

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006511804A (ja) 2002-12-23 2006-04-06 フォームファクター，インコーポレイテッド 微小電子接触構造体
WO2014087906A1 (ja) 2012-12-04 2014-06-12 日本電子材料株式会社 電気的接触子
WO2016156002A1 (en) 2015-03-31 2016-10-06 Technoprobe S.P.A. Contact probe and corresponding testing head with vertical probes, particularly for high frequency applications
JP7470860B2 (ja) 2021-03-16 2024-04-18 日本電子材料株式会社 プローブカード用プローブおよびその製造方法
WO2024062558A1 (ja) 2022-09-21 2024-03-28 日本電子材料株式会社 プローブカード用プローブ

Also Published As

Publication number Publication date
TWI880346B (zh) 2025-04-11
KR20250050103A (ko) 2025-04-14
CN119895273A (zh) 2025-04-25
US20260104437A1 (en) 2026-04-16
JPWO2024062561A1 (https=) 2024-03-28
TW202429091A (zh) 2024-07-16
WO2024062561A1 (ja) 2024-03-28
KR102874365B1 (ko) 2025-10-21

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