JPWO2024034054A5 - - Google Patents

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Publication number
JPWO2024034054A5
JPWO2024034054A5 JP2023514948A JP2023514948A JPWO2024034054A5 JP WO2024034054 A5 JPWO2024034054 A5 JP WO2024034054A5 JP 2023514948 A JP2023514948 A JP 2023514948A JP 2023514948 A JP2023514948 A JP 2023514948A JP WO2024034054 A5 JPWO2024034054 A5 JP WO2024034054A5
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JP
Japan
Prior art keywords
jumper
power supply
high resistance
resistance region
internal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2023514948A
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English (en)
Japanese (ja)
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JP7478905B1 (ja
JPWO2024034054A1 (https=
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Publication date
Application filed filed Critical
Priority claimed from PCT/JP2022/030570 external-priority patent/WO2024034054A1/ja
Publication of JPWO2024034054A1 publication Critical patent/JPWO2024034054A1/ja
Application granted granted Critical
Publication of JP7478905B1 publication Critical patent/JP7478905B1/ja
Publication of JPWO2024034054A5 publication Critical patent/JPWO2024034054A5/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2023514948A 2022-08-10 2022-08-10 ウエハ載置台 Active JP7478905B1 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2022/030570 WO2024034054A1 (ja) 2022-08-10 2022-08-10 ウエハ載置台

Publications (3)

Publication Number Publication Date
JPWO2024034054A1 JPWO2024034054A1 (https=) 2024-02-15
JP7478905B1 JP7478905B1 (ja) 2024-05-07
JPWO2024034054A5 true JPWO2024034054A5 (https=) 2024-07-17

Family

ID=89845886

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023514948A Active JP7478905B1 (ja) 2022-08-10 2022-08-10 ウエハ載置台

Country Status (6)

Country Link
US (1) US20240057223A1 (https=)
JP (1) JP7478905B1 (https=)
KR (2) KR20250088665A (https=)
CN (1) CN119585859A (https=)
TW (1) TW202407869A (https=)
WO (1) WO2024034054A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7758122B1 (ja) 2024-09-19 2025-10-22 Toto株式会社 静電チャック

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5378677B2 (ja) * 2006-12-15 2013-12-25 日本碍子株式会社 セラミックヒータ
JP6084906B2 (ja) 2013-07-11 2017-02-22 日本碍子株式会社 セラミックヒータ
JP2018005998A (ja) * 2016-06-27 2018-01-11 日本特殊陶業株式会社 セラミックスヒータ
JP7164974B2 (ja) * 2018-06-22 2022-11-02 日本特殊陶業株式会社 保持装置
JP7126398B2 (ja) * 2018-07-27 2022-08-26 日本特殊陶業株式会社 保持装置
JP7252825B2 (ja) * 2019-05-20 2023-04-05 日本特殊陶業株式会社 保持装置
JP2023088622A (ja) * 2021-12-15 2023-06-27 日本碍子株式会社 ウエハ載置台

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