JPWO2023209953A1 - - Google Patents

Info

Publication number
JPWO2023209953A1
JPWO2023209953A1 JP2024517765A JP2024517765A JPWO2023209953A1 JP WO2023209953 A1 JPWO2023209953 A1 JP WO2023209953A1 JP 2024517765 A JP2024517765 A JP 2024517765A JP 2024517765 A JP2024517765 A JP 2024517765A JP WO2023209953 A1 JPWO2023209953 A1 JP WO2023209953A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2024517765A
Other languages
Japanese (ja)
Other versions
JP7712481B2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2023209953A1 publication Critical patent/JPWO2023209953A1/ja
Application granted granted Critical
Publication of JP7712481B2 publication Critical patent/JP7712481B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/70Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
    • H10P72/76Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches
    • H10P72/7604Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches the wafers being placed on a susceptor, stage or support
    • H10P72/7612Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches the wafers being placed on a susceptor, stage or support characterised by lifting arrangements, e.g. lift pins
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04Apparatus for manufacture or treatment
    • H10P72/0402Apparatus for fluid treatment
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04Apparatus for manufacture or treatment
    • H10P72/0446Apparatus for mounting on conductive members, e.g. leadframes or conductors on insulating substrates
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/06Apparatus for monitoring, sorting, marking, testing or measuring
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/32Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations
    • H10P72/3212Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations the substrates to be conveyed not being semiconductor wafers or large planar substrates, e.g. chips or lead frames
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/071Connecting or disconnecting
JP2024517765A 2022-04-28 2022-04-28 部品突上げ装置及び部品実装装置 Active JP7712481B2 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2022/019285 WO2023209953A1 (ja) 2022-04-28 2022-04-28 部品突上げ装置及び部品実装装置

Publications (2)

Publication Number Publication Date
JPWO2023209953A1 true JPWO2023209953A1 (https=) 2023-11-02
JP7712481B2 JP7712481B2 (ja) 2025-07-23

Family

ID=88518099

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2024517765A Active JP7712481B2 (ja) 2022-04-28 2022-04-28 部品突上げ装置及び部品実装装置

Country Status (4)

Country Link
JP (1) JP7712481B2 (https=)
KR (1) KR102908723B1 (https=)
CN (1) CN118743006A (https=)
WO (1) WO2023209953A1 (https=)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5959388A (ja) * 1982-09-24 1984-04-05 富士通株式会社 支持装置
JP2013172122A (ja) * 2012-02-23 2013-09-02 Hitachi High-Tech Instruments Co Ltd ダイボンダ

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6049221B2 (ja) * 1979-01-05 1985-10-31 東洋紡績株式会社 熱硬化性射出成形材料
JP2004066364A (ja) * 2002-08-02 2004-03-04 Ricoh Co Ltd コンプライアンス機構
JP4687636B2 (ja) * 2006-11-27 2011-05-25 パナソニック株式会社 電子部品実装装置および電子部品実装装置におけるrfタグの情報の読取り・書込み方法
JP4333769B2 (ja) 2007-04-09 2009-09-16 パナソニック株式会社 チップ実装装置およびチップ実装装置における剥離促進ヘッドの交換方法
JP5686469B2 (ja) * 2011-01-28 2015-03-18 富士機械製造株式会社 ダイ供給装置
JP5777161B2 (ja) * 2011-11-10 2015-09-09 富士機械製造株式会社 ダイ突き上げ動作管理システム
WO2014083606A1 (ja) * 2012-11-27 2014-06-05 富士機械製造株式会社 ダイ供給装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5959388A (ja) * 1982-09-24 1984-04-05 富士通株式会社 支持装置
JP2013172122A (ja) * 2012-02-23 2013-09-02 Hitachi High-Tech Instruments Co Ltd ダイボンダ

Also Published As

Publication number Publication date
KR20240130816A (ko) 2024-08-29
KR102908723B1 (ko) 2026-01-07
JP7712481B2 (ja) 2025-07-23
WO2023209953A1 (ja) 2023-11-02
CN118743006A (zh) 2024-10-01

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