JPWO2023119828A5 - - Google Patents

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Publication number
JPWO2023119828A5
JPWO2023119828A5 JP2023569098A JP2023569098A JPWO2023119828A5 JP WO2023119828 A5 JPWO2023119828 A5 JP WO2023119828A5 JP 2023569098 A JP2023569098 A JP 2023569098A JP 2023569098 A JP2023569098 A JP 2023569098A JP WO2023119828 A5 JPWO2023119828 A5 JP WO2023119828A5
Authority
JP
Japan
Prior art keywords
valve seat
valve body
diaphragm portion
valve
seating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2023569098A
Other languages
English (en)
Japanese (ja)
Other versions
JPWO2023119828A1 (https=
Filing date
Publication date
Application filed filed Critical
Priority claimed from PCT/JP2022/039109 external-priority patent/WO2023119828A1/ja
Publication of JPWO2023119828A1 publication Critical patent/JPWO2023119828A1/ja
Publication of JPWO2023119828A5 publication Critical patent/JPWO2023119828A5/ja
Pending legal-status Critical Current

Links

JP2023569098A 2021-12-24 2022-10-20 Pending JPWO2023119828A1 (https=)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2021210178 2021-12-24
PCT/JP2022/039109 WO2023119828A1 (ja) 2021-12-24 2022-10-20 流量制御弁、流量制御弁の製造方法および流量制御装置

Publications (2)

Publication Number Publication Date
JPWO2023119828A1 JPWO2023119828A1 (https=) 2023-06-29
JPWO2023119828A5 true JPWO2023119828A5 (https=) 2024-09-04

Family

ID=86901940

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023569098A Pending JPWO2023119828A1 (https=) 2021-12-24 2022-10-20

Country Status (5)

Country Link
US (1) US12578021B2 (https=)
JP (1) JPWO2023119828A1 (https=)
KR (1) KR20240122779A (https=)
CN (1) CN118414509A (https=)
WO (1) WO2023119828A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20250102074A1 (en) * 2023-09-25 2025-03-27 Applied Materials, Inc. Proportional fluid flow valve and methods of operating thereof

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH067240Y2 (ja) 1986-08-12 1994-02-23 エスエムシ−株式会社 方向切換弁
JPH0434275A (ja) * 1990-05-26 1992-02-05 Stec Kk 常閉型流体制御バルブ
EP0973080B1 (en) 1998-07-17 2004-06-09 Horiba, Ltd. Gas flow rate control apparatus
JP3604059B2 (ja) 1998-07-17 2004-12-22 株式会社堀場製作所 部分希釈方式のガス希釈システム
US8844901B2 (en) * 2009-03-27 2014-09-30 Horiba Stec, Co., Ltd. Flow control valve
JP5214660B2 (ja) 2010-04-02 2013-06-19 Ｃｋｄ株式会社 流体制御弁
CN102797870A (zh) * 2011-05-26 2012-11-28 南京金口机械制造有限公司 卫生级无菌隔膜阀
CN203282329U (zh) 2013-03-22 2013-11-13 武汉钢铁(集团)公司 一种压缩机阀片研磨装置
WO2015191960A1 (en) * 2014-06-13 2015-12-17 Vistadeltek, Llc High conductance valve for fluids and vapors
MY183458A (en) * 2015-06-17 2021-02-18 Vistadeltek Llc Low hysteresis diaphragm for a valve
DE102016112115B4 (de) * 2016-07-01 2025-10-23 Bürkert Werke GmbH Ventillinearantrieb sowie Ventil
DE102020115057A1 (de) * 2020-06-05 2021-12-09 Bürkert Werke GmbH & Co. KG Ventillinearantrieb sowie Ventil

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