JPWO2023112374A5 - - Google Patents

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Publication number
JPWO2023112374A5
JPWO2023112374A5 JP2023567528A JP2023567528A JPWO2023112374A5 JP WO2023112374 A5 JPWO2023112374 A5 JP WO2023112374A5 JP 2023567528 A JP2023567528 A JP 2023567528A JP 2023567528 A JP2023567528 A JP 2023567528A JP WO2023112374 A5 JPWO2023112374 A5 JP WO2023112374A5
Authority
JP
Japan
Prior art keywords
semiconductor layer
layer
disposed above
semiconductor device
nitride
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2023567528A
Other languages
English (en)
Japanese (ja)
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JPWO2023112374A1 (https=
Filing date
Publication date
Application filed filed Critical
Priority claimed from PCT/JP2022/029063 external-priority patent/WO2023112374A1/ja
Publication of JPWO2023112374A1 publication Critical patent/JPWO2023112374A1/ja
Publication of JPWO2023112374A5 publication Critical patent/JPWO2023112374A5/ja
Pending legal-status Critical Current

Links

JP2023567528A 2021-12-16 2022-07-28 Pending JPWO2023112374A1 (https=)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2021204400 2021-12-16
PCT/JP2022/029063 WO2023112374A1 (ja) 2021-12-16 2022-07-28 窒化物半導体デバイス

Publications (2)

Publication Number Publication Date
JPWO2023112374A1 JPWO2023112374A1 (https=) 2023-06-22
JPWO2023112374A5 true JPWO2023112374A5 (https=) 2025-06-26

Family

ID=86774202

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023567528A Pending JPWO2023112374A1 (https=) 2021-12-16 2022-07-28

Country Status (3)

Country Link
US (1) US20240313061A1 (https=)
JP (1) JPWO2023112374A1 (https=)
WO (1) WO2023112374A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20240114185A (ko) * 2023-01-16 2024-07-23 삼성전자주식회사 반도체 소자 및 그 제조방법

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5742072B2 (ja) * 2010-10-06 2015-07-01 住友電気工業株式会社 半導体装置およびその製造方法
WO2015004853A1 (ja) * 2013-07-12 2015-01-15 パナソニックＩｐマネジメント株式会社 半導体装置
WO2019187789A1 (ja) * 2018-03-27 2019-10-03 パナソニック株式会社 窒化物半導体装置
JP7303807B2 (ja) * 2018-07-17 2023-07-05 パナソニックホールディングス株式会社 窒化物半導体装置
JP7633938B2 (ja) * 2019-10-09 2025-02-20 パナソニックホールディングス株式会社 窒化物半導体デバイス

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