JPWO2023080091A1 - - Google Patents

Info

Publication number
JPWO2023080091A1
JPWO2023080091A1 JP2023558016A JP2023558016A JPWO2023080091A1 JP WO2023080091 A1 JPWO2023080091 A1 JP WO2023080091A1 JP 2023558016 A JP2023558016 A JP 2023558016A JP 2023558016 A JP2023558016 A JP 2023558016A JP WO2023080091 A1 JPWO2023080091 A1 JP WO2023080091A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2023558016A
Other languages
Japanese (ja)
Other versions
JPWO2023080091A5 (https=
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2023080091A1 publication Critical patent/JPWO2023080091A1/ja
Publication of JPWO2023080091A5 publication Critical patent/JPWO2023080091A5/ja
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P54/00Cutting or separating of wafers, substrates or parts of devices
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00Field-effect transistors [FET]
    • H10D30/01Manufacture or treatment
    • H10D30/021Manufacture or treatment of FETs having insulated gates [IGFET]
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00Field-effect transistors [FET]
    • H10D30/60Insulated-gate field-effect transistors [IGFET]
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/10Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D8/00Diodes
    • H10D8/60Schottky-barrier diodes 
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/70Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
    • H10P72/74Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using temporarily an auxiliary support
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
    • H10P95/11Separation of active layers from substrates
    • H10P95/112Separation of active layers from substrates leaving a reusable substrate, e.g. epitaxial lift off
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W74/00Encapsulations, e.g. protective coatings
    • H10W74/01Manufacture or treatment
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/01Manufacture or treatment
    • H10W72/013Manufacture or treatment of die-attach connectors
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/01Manufacture or treatment
    • H10W72/013Manufacture or treatment of die-attach connectors
    • H10W72/01331Manufacture or treatment of die-attach connectors using blanket deposition
    • H10W72/01333Manufacture or treatment of die-attach connectors using blanket deposition in liquid form, e.g. spin coating, spray coating or immersion coating
    • H10W72/01335Manufacture or treatment of die-attach connectors using blanket deposition in liquid form, e.g. spin coating, spray coating or immersion coating by plating, e.g. electroless plating or electroplating
JP2023558016A 2021-11-05 2022-10-28 Pending JPWO2023080091A1 (https=)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2021181322 2021-11-05
PCT/JP2022/040503 WO2023080091A1 (ja) 2021-11-05 2022-10-28 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPWO2023080091A1 true JPWO2023080091A1 (https=) 2023-05-11
JPWO2023080091A5 JPWO2023080091A5 (https=) 2024-07-24

Family

ID=86241070

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023558016A Pending JPWO2023080091A1 (https=) 2021-11-05 2022-10-28

Country Status (5)

Country Link
US (1) US20240282634A1 (https=)
JP (1) JPWO2023080091A1 (https=)
CN (1) CN118202445A (https=)
DE (1) DE112022004775T5 (https=)
WO (1) WO2023080091A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2025224813A1 (ja) * 2024-04-23 2025-10-30 三菱電機株式会社 半導体装置及び半導体装置の製造方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001144123A (ja) * 1999-09-02 2001-05-25 Matsushita Electric Ind Co Ltd 半導体装置の製造方法および半導体装置
CN110785833A (zh) * 2017-06-19 2020-02-11 罗姆股份有限公司 半导体装置的制造方法及晶片粘合结构体
WO2021019697A1 (ja) * 2019-07-30 2021-02-04 昭和電工マテリアルズ株式会社 電子部品装置を製造する方法、及び電子部品装置
JP7259795B2 (ja) * 2020-03-31 2023-04-18 株式会社デンソー 炭化珪素ウェハの製造方法、半導体基板の製造方法および炭化珪素半導体装置の製造方法
JP7054252B2 (ja) 2020-05-18 2022-04-13 川上産業株式会社 包装用緩衝気泡シート、包装用緩衝気泡シートの製造装置、包装用緩衝気泡シートの製造方法

Also Published As

Publication number Publication date
US20240282634A1 (en) 2024-08-22
WO2023080091A1 (ja) 2023-05-11
DE112022004775T5 (de) 2024-09-05
CN118202445A (zh) 2024-06-14

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Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20240618

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20251020