JPWO2023058660A5 - - Google Patents

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Publication number
JPWO2023058660A5
JPWO2023058660A5 JP2023552904A JP2023552904A JPWO2023058660A5 JP WO2023058660 A5 JPWO2023058660 A5 JP WO2023058660A5 JP 2023552904 A JP2023552904 A JP 2023552904A JP 2023552904 A JP2023552904 A JP 2023552904A JP WO2023058660 A5 JPWO2023058660 A5 JP WO2023058660A5
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JP
Japan
Prior art keywords
electrode
layer
diaphragm plate
base
capacitance
Prior art date
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JP2023552904A
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English (en)
Japanese (ja)
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JPWO2023058660A1 (https=
JP7718498B2 (ja
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Priority claimed from PCT/JP2022/037173 external-priority patent/WO2023058660A1/ja
Publication of JPWO2023058660A1 publication Critical patent/JPWO2023058660A1/ja
Publication of JPWO2023058660A5 publication Critical patent/JPWO2023058660A5/ja
Application granted granted Critical
Publication of JP7718498B2 publication Critical patent/JP7718498B2/ja
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JP2023552904A 2021-10-05 2022-10-04 圧力センサ構造および圧力センサ装置 Active JP7718498B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2021164256 2021-10-05
JP2021164256 2021-10-05
PCT/JP2022/037173 WO2023058660A1 (ja) 2021-10-05 2022-10-04 圧力センサ構造および圧力センサ装置

Publications (3)

Publication Number Publication Date
JPWO2023058660A1 JPWO2023058660A1 (https=) 2023-04-13
JPWO2023058660A5 true JPWO2023058660A5 (https=) 2024-06-19
JP7718498B2 JP7718498B2 (ja) 2025-08-05

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ID=85803489

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023552904A Active JP7718498B2 (ja) 2021-10-05 2022-10-04 圧力センサ構造および圧力センサ装置

Country Status (4)

Country Link
US (1) US20240246811A1 (https=)
JP (1) JP7718498B2 (https=)
CN (1) CN118056117A (https=)
WO (1) WO2023058660A1 (https=)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4124867B2 (ja) * 1998-07-14 2008-07-23 松下電器産業株式会社 変換装置
FI126999B (en) * 2014-01-17 2017-09-15 Murata Manufacturing Co Improved pressure sensor
WO2022019167A1 (ja) * 2020-07-21 2022-01-27 株式会社村田製作所 圧力センサ構造、圧力センサ装置および圧力センサ構造の製造方法

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