JPWO2023047948A1 - - Google Patents

Info

Publication number
JPWO2023047948A1
JPWO2023047948A1 JP2022554259A JP2022554259A JPWO2023047948A1 JP WO2023047948 A1 JPWO2023047948 A1 JP WO2023047948A1 JP 2022554259 A JP2022554259 A JP 2022554259A JP 2022554259 A JP2022554259 A JP 2022554259A JP WO2023047948 A1 JPWO2023047948 A1 JP WO2023047948A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2022554259A
Other languages
Japanese (ja)
Other versions
JPWO2023047948A5 (fr
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2022179820A priority Critical patent/JP2023047351A/ja
Publication of JPWO2023047948A1 publication Critical patent/JPWO2023047948A1/ja
Publication of JPWO2023047948A5 publication Critical patent/JPWO2023047948A5/ja
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/10—Glass or silica
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11—Anti-reflection coatings
    • G02B1/118—Anti-reflection coatings having sub-optical wavelength surface structures designed to provide an enhanced transmittance, e.g. moth-eye structures

Landscapes

  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Laminated Bodies (AREA)
  • Surface Treatment Of Glass (AREA)
  • Surface Treatment Of Optical Elements (AREA)
  • Physical Vapour Deposition (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)
JP2022554259A 2021-09-24 2022-09-06 Pending JPWO2023047948A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2022179820A JP2023047351A (ja) 2021-09-24 2022-11-09 光学製品及び光学製品の製造方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2021155902 2021-09-24
PCT/JP2022/033453 WO2023047948A1 (fr) 2021-09-24 2022-09-06 Produit optique et procédé de fabrication de produit optique

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2022179820A Division JP2023047351A (ja) 2021-09-24 2022-11-09 光学製品及び光学製品の製造方法

Publications (2)

Publication Number Publication Date
JPWO2023047948A1 true JPWO2023047948A1 (fr) 2023-03-30
JPWO2023047948A5 JPWO2023047948A5 (fr) 2023-08-29

Family

ID=85720606

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2022554259A Pending JPWO2023047948A1 (fr) 2021-09-24 2022-09-06
JP2022179820A Pending JP2023047351A (ja) 2021-09-24 2022-11-09 光学製品及び光学製品の製造方法

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2022179820A Pending JP2023047351A (ja) 2021-09-24 2022-11-09 光学製品及び光学製品の製造方法

Country Status (3)

Country Link
JP (2) JPWO2023047948A1 (fr)
TW (1) TW202323019A (fr)
WO (1) WO2023047948A1 (fr)

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009186670A (ja) * 2008-02-05 2009-08-20 Olympus Corp 反射防止膜
JP5027347B2 (ja) * 2010-04-28 2012-09-19 シャープ株式会社 型および型の製造方法
US20120207973A1 (en) * 2011-02-15 2012-08-16 Canon Kabushiki Kaisha Optical member, method of manufacturing the same, and optical system using the same
JP5647924B2 (ja) * 2011-03-18 2015-01-07 富士フイルム株式会社 光学部材の製造方法
JP6386700B2 (ja) * 2012-07-04 2018-09-05 キヤノン株式会社 構造体、光学部材、反射防止膜、撥水性膜、質量分析用基板、位相板、構造体の製造方法、及び反射防止膜の製造方法
JP6071318B2 (ja) * 2012-08-09 2017-02-01 キヤノン株式会社 光学部材および光学部材の製造方法
WO2015011786A1 (fr) * 2013-07-23 2015-01-29 日立マクセル株式会社 Composant optique ayant un film mince nanoparticulaire et dispositif d'application optique l'utilisant
JP6234753B2 (ja) * 2013-09-17 2017-11-22 富士フイルム株式会社 透明微細凹凸構造体の製造方法
JP6255531B2 (ja) * 2015-03-31 2017-12-27 富士フイルム株式会社 反射防止膜及びその製造方法
JP7046544B2 (ja) * 2017-09-27 2022-04-04 キヤノン株式会社 光学素子、光学機器、光学素子の製造方法および塗料
JP7074849B2 (ja) * 2018-05-22 2022-05-24 富士フイルム株式会社 凹凸構造付き基体の製造方法
JP2020166225A (ja) * 2018-09-28 2020-10-08 浜松ホトニクス株式会社 テラヘルツ波用光学素子及びその製造方法

Also Published As

Publication number Publication date
WO2023047948A1 (fr) 2023-03-30
TW202323019A (zh) 2023-06-16
JP2023047351A (ja) 2023-04-05

Similar Documents

Publication Publication Date Title
BR112023005462A2 (fr)
BR112023012656A2 (fr)
BR112021014123A2 (fr)
BR112022024743A2 (fr)
BR102021018859A2 (fr)
BR102021015500A2 (fr)
BR112022009896A2 (fr)
JPWO2023047948A1 (fr)
BR112023011738A2 (fr)
BR112023016292A2 (fr)
BR112023004146A2 (fr)
BR112023011610A2 (fr)
BR112023008976A2 (fr)
BR112023009656A2 (fr)
BR112023006729A2 (fr)
BR102021018167A2 (fr)
BR102021017576A2 (fr)
BR102021016837A2 (fr)
BR102021016551A2 (fr)
BR102021016375A2 (fr)
BR102021016176A2 (fr)
BR102021016200A2 (fr)
BR102021015566A2 (fr)
BR102021015450A8 (fr)
BR102021015247A2 (fr)

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20220909

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20220909

A871 Explanation of circumstances concerning accelerated examination

Free format text: JAPANESE INTERMEDIATE CODE: A871

Effective date: 20220909

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20221011

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20221109

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20221129