JPWO2023042372A1 - - Google Patents

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Publication number
JPWO2023042372A1
JPWO2023042372A1 JP2023548058A JP2023548058A JPWO2023042372A1 JP WO2023042372 A1 JPWO2023042372 A1 JP WO2023042372A1 JP 2023548058 A JP2023548058 A JP 2023548058A JP 2023548058 A JP2023548058 A JP 2023548058A JP WO2023042372 A1 JPWO2023042372 A1 JP WO2023042372A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2023548058A
Other languages
Japanese (ja)
Other versions
JPWO2023042372A5 (https=
JP7592180B2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2023042372A1 publication Critical patent/JPWO2023042372A1/ja
Publication of JPWO2023042372A5 publication Critical patent/JPWO2023042372A5/ja
Application granted granted Critical
Publication of JP7592180B2 publication Critical patent/JP7592180B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/60Insulating or insulated package substrates; Interposers; Redistribution layers
    • H10W70/62Insulating or insulated package substrates; Interposers; Redistribution layers characterised by their interconnections
    • H10W70/65Shapes or dispositions of interconnections
    • H10W70/658Shapes or dispositions of interconnections for devices provided for in groups H10D8/00 - H10D48/00
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W40/00Arrangements for thermal protection or thermal control
    • H10W40/20Arrangements for cooling
    • H10W40/25Arrangements for cooling characterised by their materials
    • H10W40/255Arrangements for cooling characterised by their materials having a laminate or multilayered structure, e.g. direct bond copper [DBC] ceramic substrates
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W40/00Arrangements for thermal protection or thermal control
    • H10W40/60Securing means for detachable heating or cooling arrangements, e.g. clamps
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W42/00Arrangements for protection of devices
    • H10W42/121Arrangements for protection of devices protecting against mechanical damage
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/60Insulating or insulated package substrates; Interposers; Redistribution layers
    • H10W70/67Insulating or insulated package substrates; Interposers; Redistribution layers characterised by their insulating layers or insulating parts
    • H10W70/68Shapes or dispositions thereof
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/60Insulating or insulated package substrates; Interposers; Redistribution layers
    • H10W70/67Insulating or insulated package substrates; Interposers; Redistribution layers characterised by their insulating layers or insulating parts
    • H10W70/68Shapes or dispositions thereof
    • H10W70/685Shapes or dispositions thereof comprising multiple insulating layers
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/60Strap connectors, e.g. thick copper clips for grounding of power devices
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W76/00Containers; Fillings or auxiliary members therefor; Seals
    • H10W76/10Containers or parts thereof
    • H10W76/12Containers or parts thereof characterised by their shape
    • H10W76/15Containers comprising an insulating or insulated base
    • H10W76/157Containers comprising an insulating or insulated base having interconnections parallel to the insulating or insulated base
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W76/00Containers; Fillings or auxiliary members therefor; Seals
    • H10W76/40Fillings or auxiliary members in containers, e.g. centering rings
    • H10W76/42Fillings
    • H10W76/47Solid or gel fillings
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00Package configurations
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00Package configurations
    • H10W90/701Package configurations characterised by the relative positions of pads or connectors relative to package parts
    • H10W90/731Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors
    • H10W90/734Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors between a chip and a stacked insulating package substrate, interposer or RDL
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00Package configurations
    • H10W90/701Package configurations characterised by the relative positions of pads or connectors relative to package parts
    • H10W90/731Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors
    • H10W90/736Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors between a chip and a stacked lead frame, conducting package substrate or heat sink
JP2023548058A 2021-09-17 2021-09-17 半導体装置、及び半導体装置の製造方法 Active JP7592180B2 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2021/034308 WO2023042372A1 (ja) 2021-09-17 2021-09-17 半導体装置、及び半導体装置の製造方法

Publications (3)

Publication Number Publication Date
JPWO2023042372A1 true JPWO2023042372A1 (https=) 2023-03-23
JPWO2023042372A5 JPWO2023042372A5 (https=) 2023-11-28
JP7592180B2 JP7592180B2 (ja) 2024-11-29

Family

ID=85602596

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023548058A Active JP7592180B2 (ja) 2021-09-17 2021-09-17 半導体装置、及び半導体装置の製造方法

Country Status (5)

Country Link
US (1) US20240321720A1 (https=)
JP (1) JP7592180B2 (https=)
CN (1) CN117957649A (https=)
DE (1) DE112021008238T5 (https=)
WO (1) WO2023042372A1 (https=)

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003197861A (ja) * 2001-12-06 2003-07-11 Abb Res Ltd 電力用半導体サブモジュール及び電力用半導体モジュール
JP2008235651A (ja) * 2007-03-22 2008-10-02 Fuji Electric Device Technology Co Ltd 半導体装置およびその製造方法
JP2012059876A (ja) * 2010-09-08 2012-03-22 Sanken Electric Co Ltd 半導体モジュール及びその製造方法
JP2014082275A (ja) * 2012-10-15 2014-05-08 Toyota Industries Corp 半導体装置
WO2015079600A1 (ja) * 2013-11-26 2015-06-04 三菱電機株式会社 パワーモジュール、及びパワーモジュールの製造方法
WO2018185974A1 (ja) * 2017-04-06 2018-10-11 三菱電機株式会社 半導体装置およびその製造方法、ならびに電力変換装置
WO2021075016A1 (ja) * 2019-10-17 2021-04-22 三菱電機株式会社 半導体装置および半導体装置の製造方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7190985B2 (ja) * 2019-08-05 2022-12-16 三菱電機株式会社 半導体装置

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003197861A (ja) * 2001-12-06 2003-07-11 Abb Res Ltd 電力用半導体サブモジュール及び電力用半導体モジュール
JP2008235651A (ja) * 2007-03-22 2008-10-02 Fuji Electric Device Technology Co Ltd 半導体装置およびその製造方法
JP2012059876A (ja) * 2010-09-08 2012-03-22 Sanken Electric Co Ltd 半導体モジュール及びその製造方法
JP2014082275A (ja) * 2012-10-15 2014-05-08 Toyota Industries Corp 半導体装置
WO2015079600A1 (ja) * 2013-11-26 2015-06-04 三菱電機株式会社 パワーモジュール、及びパワーモジュールの製造方法
WO2018185974A1 (ja) * 2017-04-06 2018-10-11 三菱電機株式会社 半導体装置およびその製造方法、ならびに電力変換装置
WO2021075016A1 (ja) * 2019-10-17 2021-04-22 三菱電機株式会社 半導体装置および半導体装置の製造方法

Also Published As

Publication number Publication date
DE112021008238T5 (de) 2024-07-11
CN117957649A (zh) 2024-04-30
JP7592180B2 (ja) 2024-11-29
US20240321720A1 (en) 2024-09-26
WO2023042372A1 (ja) 2023-03-23

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