JPWO2023032962A1 - - Google Patents
Info
- Publication number
- JPWO2023032962A1 JPWO2023032962A1 JP2023545591A JP2023545591A JPWO2023032962A1 JP WO2023032962 A1 JPWO2023032962 A1 JP WO2023032962A1 JP 2023545591 A JP2023545591 A JP 2023545591A JP 2023545591 A JP2023545591 A JP 2023545591A JP WO2023032962 A1 JPWO2023032962 A1 JP WO2023032962A1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
- G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
- G03F9/7003—Alignment type or strategy, e.g. leveling, global alignment
- G03F9/7019—Calibration
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70383—Direct write, i.e. pattern is written directly without the use of a mask by one or multiple beams
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
- G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
- G03F9/7003—Alignment type or strategy, e.g. leveling, global alignment
- G03F9/7046—Strategy, e.g. mark, sensor or wavelength selection
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2021143710 | 2021-09-03 | ||
| JP2021143710 | 2021-09-03 | ||
| PCT/JP2022/032547 WO2023032962A1 (ja) | 2021-09-03 | 2022-08-30 | 直接描画装置及びその制御方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPWO2023032962A1 true JPWO2023032962A1 (https=) | 2023-03-09 |
| JP7837024B2 JP7837024B2 (ja) | 2026-03-30 |
Family
ID=85411249
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023545591A Active JP7837024B2 (ja) | 2021-09-03 | 2022-08-30 | 直接描画装置及びその制御方法 |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JP7837024B2 (https=) |
| KR (1) | KR20240055034A (https=) |
| CN (1) | CN117882014A (https=) |
| TW (1) | TW202319841A (https=) |
| WO (1) | WO2023032962A1 (https=) |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005311145A (ja) * | 2004-04-23 | 2005-11-04 | Canon Inc | 露光装置、露光方法、デバイス製造方法、パターン形成装置および位置合わせ方法 |
| JP2007220937A (ja) * | 2006-02-17 | 2007-08-30 | Toppan Printing Co Ltd | 基板の重ね描画方法 |
| JP2011158718A (ja) * | 2010-02-01 | 2011-08-18 | Hitachi High-Technologies Corp | 露光装置、露光方法、及び表示用パネル基板の製造方法 |
| JP2011237781A (ja) * | 2010-05-06 | 2011-11-24 | Samsung Electronics Co Ltd | マスクレス露光装置とマスクレス露光でのオーバーレイのための整列方法 |
| JP2014066870A (ja) * | 2012-09-26 | 2014-04-17 | Hitachi High-Technologies Corp | パターン形成方法及び装置、露光装置並びに表示用パネル製造方法 |
| JP2019061089A (ja) * | 2017-09-27 | 2019-04-18 | 株式会社Ｓｃｒｅｅｎホールディングス | 描画装置および描画方法 |
-
2022
- 2022-08-30 KR KR1020247010318A patent/KR20240055034A/ko active Pending
- 2022-08-30 WO PCT/JP2022/032547 patent/WO2023032962A1/ja not_active Ceased
- 2022-08-30 CN CN202280058943.2A patent/CN117882014A/zh active Pending
- 2022-08-30 JP JP2023545591A patent/JP7837024B2/ja active Active
- 2022-09-02 TW TW111133310A patent/TW202319841A/zh unknown
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005311145A (ja) * | 2004-04-23 | 2005-11-04 | Canon Inc | 露光装置、露光方法、デバイス製造方法、パターン形成装置および位置合わせ方法 |
| JP2007220937A (ja) * | 2006-02-17 | 2007-08-30 | Toppan Printing Co Ltd | 基板の重ね描画方法 |
| JP2011158718A (ja) * | 2010-02-01 | 2011-08-18 | Hitachi High-Technologies Corp | 露光装置、露光方法、及び表示用パネル基板の製造方法 |
| JP2011237781A (ja) * | 2010-05-06 | 2011-11-24 | Samsung Electronics Co Ltd | マスクレス露光装置とマスクレス露光でのオーバーレイのための整列方法 |
| JP2014066870A (ja) * | 2012-09-26 | 2014-04-17 | Hitachi High-Technologies Corp | パターン形成方法及び装置、露光装置並びに表示用パネル製造方法 |
| JP2019061089A (ja) * | 2017-09-27 | 2019-04-18 | 株式会社Ｓｃｒｅｅｎホールディングス | 描画装置および描画方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP7837024B2 (ja) | 2026-03-30 |
| CN117882014A (zh) | 2024-04-12 |
| WO2023032962A1 (ja) | 2023-03-09 |
| TW202319841A (zh) | 2023-05-16 |
| KR20240055034A (ko) | 2024-04-26 |
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