JPWO2023013053A1 - - Google Patents

Info

Publication number
JPWO2023013053A1
JPWO2023013053A1 JP2023539563A JP2023539563A JPWO2023013053A1 JP WO2023013053 A1 JPWO2023013053 A1 JP WO2023013053A1 JP 2023539563 A JP2023539563 A JP 2023539563A JP 2023539563 A JP2023539563 A JP 2023539563A JP WO2023013053 A1 JPWO2023013053 A1 JP WO2023013053A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2023539563A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2023013053A1 publication Critical patent/JPWO2023013053A1/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09—Processes or apparatus for excitation, e.g. pumping
    • H01S3/097—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser
    • H01S3/09702—Details of the driver electronics and electric discharge circuits
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S1/00—Masers, i.e. devices using stimulated emission of electromagnetic radiation in the microwave range
    • H01S1/06—Gaseous, i.e. beam masers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/038—Electrodes, e.g. special shape, configuration or composition
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/04—Arrangements for thermal management
    • H01S3/041—Arrangements for thermal management for gas lasers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/14—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
    • H01S3/22—Gases
    • H01S3/2207—Noble gas ions, e.g. Ar+>, Kr+>

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Lasers (AREA)
JP2023539563A 2021-08-06 2021-08-06 Pending JPWO2023013053A1 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2021/029388 WO2023013053A1 (ja) 2021-08-06 2021-08-06 ガスレーザ装置、ガスレーザ装置のメンテナンス方法、及び電子デバイスの製造方法

Publications (1)

Publication Number Publication Date
JPWO2023013053A1 true JPWO2023013053A1 (ja) 2023-02-09

Family

ID=85154083

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023539563A Pending JPWO2023013053A1 (ja) 2021-08-06 2021-08-06

Country Status (4)

Country Link
US (1) US20240154381A1 (ja)
JP (1) JPWO2023013053A1 (ja)
CN (1) CN117642943A (ja)
WO (1) WO2023013053A1 (ja)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2847648B2 (ja) * 1987-11-26 1999-01-20 株式会社小松製作所 レーザ発振装置
JPH05167132A (ja) * 1991-12-16 1993-07-02 Komatsu Ltd ガスレーザ装置
JP2000223757A (ja) * 1999-02-04 2000-08-11 Komatsu Ltd ガスレーザ
JPWO2014046186A1 (ja) * 2012-09-21 2016-08-18 ギガフォトン株式会社 レーザ装置
JP6871995B2 (ja) * 2019-11-18 2021-05-19 ギガフォトン株式会社 レーザ装置及び非一過性のコンピュータ読み取り可能な記録媒体

Also Published As

Publication number Publication date
US20240154381A1 (en) 2024-05-09
CN117642943A (zh) 2024-03-01
WO2023013053A1 (ja) 2023-02-09

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