JPWO2022270541A1 - - Google Patents

Info

Publication number
JPWO2022270541A1
JPWO2022270541A1 JP2023530092A JP2023530092A JPWO2022270541A1 JP WO2022270541 A1 JPWO2022270541 A1 JP WO2022270541A1 JP 2023530092 A JP2023530092 A JP 2023530092A JP 2023530092 A JP2023530092 A JP 2023530092A JP WO2022270541 A1 JPWO2022270541 A1 JP WO2022270541A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2023530092A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2022270541A1 publication Critical patent/JPWO2022270541A1/ja
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F290/00—Macromolecular compounds obtained by polymerising monomers on to polymers modified by introduction of aliphatic unsaturated end or side groups
    • C08F290/08—Macromolecular compounds obtained by polymerising monomers on to polymers modified by introduction of aliphatic unsaturated end or side groups on to polymers modified by introduction of unsaturated side groups
    • C08F290/14—Polymers provided for in subclass C08G
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G73/00—Macromolecular compounds obtained by reactions forming a linkage containing nitrogen with or without oxygen or carbon in the main chain of the macromolecule, not provided for in groups C08G12/00 - C08G71/00
    • C08G73/06—Polycondensates having nitrogen-containing heterocyclic rings in the main chain of the macromolecule
    • C08G73/10—Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
    • C08G73/16—Polyester-imides
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Organic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Materials For Photolithography (AREA)
  • Polymerisation Methods In General (AREA)
  • Macromonomer-Based Addition Polymer (AREA)
  • Macromolecular Compounds Obtained By Forming Nitrogen-Containing Linkages In General (AREA)
JP2023530092A 2021-06-25 2022-06-22 Pending JPWO2022270541A1 (https=)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2021105682 2021-06-25
PCT/JP2022/024894 WO2022270541A1 (ja) 2021-06-25 2022-06-22 ネガ型感光性樹脂組成物、ネガ型感光性ポリマー、硬化膜および半導体装置

Publications (1)

Publication Number Publication Date
JPWO2022270541A1 true JPWO2022270541A1 (https=) 2022-12-29

Family

ID=84545757

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023530092A Pending JPWO2022270541A1 (https=) 2021-06-25 2022-06-22

Country Status (3)

Country Link
JP (1) JPWO2022270541A1 (https=)
TW (1) TW202311306A (https=)
WO (1) WO2022270541A1 (https=)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN121175622A (zh) * 2023-03-15 2025-12-19 富士胶片株式会社 感光性树脂组合物、固化物、层叠体、固化物的制造方法、层叠体的制造方法、半导体器件的制造方法及半导体器件
WO2025142645A1 (ja) * 2023-12-26 2025-07-03 住友ベークライト株式会社 感光性樹脂組成物、硬化物および半導体装置
WO2025142647A1 (ja) * 2023-12-26 2025-07-03 住友ベークライト株式会社 感光性樹脂組成物、硬化物および半導体装置
WO2025220442A1 (ja) * 2024-04-18 2025-10-23 日産化学株式会社 絶縁膜形成用感光性樹脂組成物
WO2026070763A1 (ja) * 2024-09-30 2026-04-02 富士フイルム株式会社 樹脂組成物、硬化物、積層体、硬化物の製造方法、積層体の製造方法、半導体デバイスの製造方法、及び、半導体デバイス

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10301281A (ja) * 1997-02-25 1998-11-13 Toray Ind Inc 感光性ポリイミド前駆体組成物
JP2001011176A (ja) * 1999-06-25 2001-01-16 Matsushita Electric Works Ltd ポリイミド皮膜の形成方法及びポリイミド皮膜
JP2012021133A (ja) * 2010-07-14 2012-02-02 Lg Chem Ltd 低温硬化が可能なポリイミド樹脂及びその製造方法
WO2014194630A1 (zh) * 2013-06-06 2014-12-11 北京京东方光电科技有限公司 绿色光阻剂、彩色滤光片及它们的制备方法、彩色显示器件
WO2014194660A1 (zh) * 2013-06-06 2014-12-11 京东方科技集团股份有限公司 可固化树脂、蓝色光阻剂、彩色滤光片及其制备方法、彩色显示器件
JP2021088636A (ja) * 2019-12-03 2021-06-10 住友ベークライト株式会社 架橋剤、感光性樹脂組成物、硬化膜、および電子装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0321398B1 (de) * 1987-12-15 1994-08-17 Ciba-Geigy Ag Autophotovernetzbare Copolyimide und Polyimidzusammensetzungen
JP2557331B2 (ja) * 1992-06-24 1996-11-27 東芝ケミカル株式会社 感光性ポリイミド組成物
WO2020017920A1 (ko) * 2018-07-20 2020-01-23 주식회사 엘지화학 폴리이미드 수지 및 이를 포함하는 네거티브형 감광성 수지 조성물
TW202112907A (zh) * 2019-08-26 2021-04-01 日商富士軟片股份有限公司 硬化性樹脂組成物、硬化膜、積層體、硬化膜的製造方法、半導體器件、樹脂及樹脂的製造方法
JP7556263B2 (ja) * 2020-03-19 2024-09-26 住友ベークライト株式会社 ネガ型感光性樹脂組成物、ネガ型感光性ポリマー及びその用途

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10301281A (ja) * 1997-02-25 1998-11-13 Toray Ind Inc 感光性ポリイミド前駆体組成物
JP2001011176A (ja) * 1999-06-25 2001-01-16 Matsushita Electric Works Ltd ポリイミド皮膜の形成方法及びポリイミド皮膜
JP2012021133A (ja) * 2010-07-14 2012-02-02 Lg Chem Ltd 低温硬化が可能なポリイミド樹脂及びその製造方法
WO2014194630A1 (zh) * 2013-06-06 2014-12-11 北京京东方光电科技有限公司 绿色光阻剂、彩色滤光片及它们的制备方法、彩色显示器件
WO2014194660A1 (zh) * 2013-06-06 2014-12-11 京东方科技集团股份有限公司 可固化树脂、蓝色光阻剂、彩色滤光片及其制备方法、彩色显示器件
US20160244564A1 (en) * 2013-06-06 2016-08-25 Boe Technology Group Co., Ltd. Curable resin, blue photoresist, color filter, and methods of preparing the same, and color display device
JP2021088636A (ja) * 2019-12-03 2021-06-10 住友ベークライト株式会社 架橋剤、感光性樹脂組成物、硬化膜、および電子装置

Also Published As

Publication number Publication date
WO2022270541A1 (ja) 2022-12-29
TW202311306A (zh) 2023-03-16

Similar Documents

Publication Publication Date Title
BR112023005462A2 (https=)
BR112023012656A2 (https=)
BR112023009656A2 (https=)
JPWO2022202098A1 (https=)
BR112022009896A2 (https=)
BR112021017747A2 (https=)
JPWO2023032821A1 (https=)
BR112022024743A2 (https=)
BR112022026905A2 (https=)
BR112023011738A2 (https=)
BR112023004146A2 (https=)
BR112023006729A2 (https=)
BR102021007058A2 (https=)
BR102020022030A2 (https=)
BR112023016292A2 (https=)
BR112023011539A2 (https=)
BR112023011610A2 (https=)
BR112023008976A2 (https=)
BR102021015566A2 (https=)
BR102021015450A8 (https=)
BR102021015220A2 (https=)
BR102021015247A2 (https=)
BR102021014056A2 (https=)
BR102021013929A2 (https=)
BR102021012571A2 (https=)

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20250513

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20260203