JPWO2022239692A1 - - Google Patents

Info

Publication number
JPWO2022239692A1
JPWO2022239692A1 JP2023520987A JP2023520987A JPWO2022239692A1 JP WO2022239692 A1 JPWO2022239692 A1 JP WO2022239692A1 JP 2023520987 A JP2023520987 A JP 2023520987A JP 2023520987 A JP2023520987 A JP 2023520987A JP WO2022239692 A1 JPWO2022239692 A1 JP WO2022239692A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2023520987A
Other languages
Japanese (ja)
Other versions
JPWO2022239692A5 (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2022239692A1 publication Critical patent/JPWO2022239692A1/ja
Publication of JPWO2022239692A5 publication Critical patent/JPWO2022239692A5/ja
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802Details
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/18Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P21/00Testing or calibrating of apparatus or devices covered by the preceding groups

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
JP2023520987A 2021-05-13 2022-05-02 Pending JPWO2022239692A1 (enExample)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2021081427 2021-05-13
PCT/JP2022/019490 WO2022239692A1 (ja) 2021-05-13 2022-05-02 加速度センサ

Publications (2)

Publication Number Publication Date
JPWO2022239692A1 true JPWO2022239692A1 (enExample) 2022-11-17
JPWO2022239692A5 JPWO2022239692A5 (enExample) 2024-02-16

Family

ID=84028308

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023520987A Pending JPWO2022239692A1 (enExample) 2021-05-13 2022-05-02

Country Status (3)

Country Link
US (1) US20240061011A1 (enExample)
JP (1) JPWO2022239692A1 (enExample)
WO (1) WO2022239692A1 (enExample)

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4032681B2 (ja) * 2001-08-27 2008-01-16 株式会社デンソー 同期検波方法及び装置並びにセンサ信号検出装置
US7287429B2 (en) * 2004-03-25 2007-10-30 Denso Corporation Capacitive acceleration sensor system
JP4534741B2 (ja) * 2004-12-10 2010-09-01 株式会社デンソー ジャイロセンサ
JP4765708B2 (ja) * 2006-03-23 2011-09-07 株式会社デンソー 容量式物理量センサ
JP4899781B2 (ja) * 2006-10-23 2012-03-21 株式会社デンソー 容量式力学量検出装置
US20090241634A1 (en) * 2008-03-28 2009-10-01 Cenk Acar Micromachined accelerometer and method with continuous self-testing
JP6531279B2 (ja) * 2013-10-09 2019-06-19 パナソニックIpマネジメント株式会社 加速度センサ
JP6311871B2 (ja) * 2014-04-17 2018-04-18 セイコーエプソン株式会社 物理量検出用回路、物理量検出装置、物理量計測システム、電子機器、移動体及び物理量計測データ生成方法
GB2527595A (en) * 2014-06-27 2015-12-30 Atlantic Inertial Systems Ltd Accelerometers
US9784644B2 (en) * 2014-10-16 2017-10-10 Tula Technology, Inc. Engine error detection system
WO2016132447A1 (ja) * 2015-02-17 2016-08-25 株式会社日立製作所 加速度センサ
WO2017009885A1 (ja) * 2015-07-10 2017-01-19 株式会社日立製作所 慣性センサ
US10725068B2 (en) * 2015-12-15 2020-07-28 Invensense, Inc. Identification and compensation of MEMS accelerometer errors
JP6828544B2 (ja) * 2017-03-23 2021-02-10 セイコーエプソン株式会社 センサー素子制御装置、物理量センサー、電子機器、移動体及び物理量センサーの故障診断方法
JP7075849B2 (ja) * 2018-08-29 2022-05-26 株式会社日立製作所 Mems静電容量型加速度センサ
EP3862757B1 (en) * 2020-02-07 2024-03-27 Atlantic Inertial Systems Limited Methods for closed loop operation of capacitive accelerometers and such capacitive accelerometers
US11307218B2 (en) * 2020-05-22 2022-04-19 Invensense, Inc. Real-time isolation of self-test and linear acceleration signals
US20230194564A1 (en) * 2020-06-04 2023-06-22 Panasonic Intellectual Property Management Co., Ltd. Inertial detection circuit, inertial sensor, and inertial detection method

Also Published As

Publication number Publication date
WO2022239692A1 (ja) 2022-11-17
US20240061011A1 (en) 2024-02-22

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Legal Events

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Effective date: 20231023

A621 Written request for application examination

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Effective date: 20250303