JPWO2022215471A1 - - Google Patents

Info

Publication number
JPWO2022215471A1
JPWO2022215471A1 JP2023512896A JP2023512896A JPWO2022215471A1 JP WO2022215471 A1 JPWO2022215471 A1 JP WO2022215471A1 JP 2023512896 A JP2023512896 A JP 2023512896A JP 2023512896 A JP2023512896 A JP 2023512896A JP WO2022215471 A1 JPWO2022215471 A1 JP WO2022215471A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2023512896A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2022215471A1 publication Critical patent/JPWO2022215471A1/ja
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/10Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
    • H10D62/102Constructional design considerations for preventing surface leakage or controlling electric field concentration
    • H10D62/103Constructional design considerations for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse-biased devices
    • H10D62/105Constructional design considerations for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse-biased devices by having particular doping profiles, shapes or arrangements of PN junctions; by having supplementary regions, e.g. junction termination extension [JTE] 
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/10Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
    • H10D62/102Constructional design considerations for preventing surface leakage or controlling electric field concentration
    • H10D62/103Constructional design considerations for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse-biased devices
    • H10D62/105Constructional design considerations for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse-biased devices by having particular doping profiles, shapes or arrangements of PN junctions; by having supplementary regions, e.g. junction termination extension [JTE] 
    • H10D62/106Constructional design considerations for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse-biased devices by having particular doping profiles, shapes or arrangements of PN junctions; by having supplementary regions, e.g. junction termination extension [JTE]  having supplementary regions doped oppositely to or in rectifying contact with regions of the semiconductor bodies, e.g. guard rings with PN or Schottky junctions
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/10Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
    • H10D62/124Shapes, relative sizes or dispositions of the regions of semiconductor bodies or of junctions between the regions
    • H10D62/126Top-view geometrical layouts of the regions or the junctions
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/50Physical imperfections
    • H10D62/53Physical imperfections the imperfections being within the semiconductor body 
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/80Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials
    • H10D62/83Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials being Group IV materials, e.g. B-doped Si or undoped Ge
    • H10D62/832Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials being Group IV materials, e.g. B-doped Si or undoped Ge being Group IV materials comprising two or more elements, e.g. SiGe
    • H10D62/8325Silicon carbide
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00Electrodes of devices having potential barriers
    • H10D64/111Field plates
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00Electrodes of devices having potential barriers
    • H10D64/60Electrodes characterised by their materials
    • H10D64/64Electrodes comprising a Schottky barrier to a semiconductor
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D8/00Diodes
    • H10D8/01Manufacture or treatment
    • H10D8/051Manufacture or treatment of Schottky diodes
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D8/00Diodes
    • H10D8/60Schottky-barrier diodes 
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/20Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials
    • H10P14/34Deposited materials, e.g. layers
    • H10P14/3402Deposited materials, e.g. layers characterised by the chemical composition
    • H10P14/3404Deposited materials, e.g. layers characterised by the chemical composition being Group IVA materials
    • H10P14/3408Silicon carbide
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00Electrodes of devices having potential barriers
    • H10D64/01Manufacture or treatment
    • H10D64/012Manufacture or treatment of electrodes comprising a Schottky barrier to a semiconductor
    • H10D64/0121Manufacture or treatment of electrodes comprising a Schottky barrier to a semiconductor to Group IV semiconductors
JP2023512896A 2021-04-05 2022-03-16 Pending JPWO2022215471A1 (https=)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2021064154 2021-04-05
PCT/JP2022/012074 WO2022215471A1 (ja) 2021-04-05 2022-03-16 半導体装置および半導体装置の製造方法

Publications (1)

Publication Number Publication Date
JPWO2022215471A1 true JPWO2022215471A1 (https=) 2022-10-13

Family

ID=83546232

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023512896A Pending JPWO2022215471A1 (https=) 2021-04-05 2022-03-16

Country Status (5)

Country Link
US (1) US20240079469A1 (https=)
JP (1) JPWO2022215471A1 (https=)
CN (1) CN117157769A (https=)
DE (1) DE112022001382T5 (https=)
WO (1) WO2022215471A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2022184315A (ja) * 2021-06-01 2022-12-13 株式会社東芝 半導体装置
EP4718988A1 (en) * 2024-09-25 2026-04-01 Hitachi Energy Ltd Method for producing a first contact layer and a second contact layer on a power semiconductor body, and power semiconductor device

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011082392A (ja) * 2009-10-08 2011-04-21 Sumitomo Electric Ind Ltd ショットキーバリアダイオード
JP2017055001A (ja) * 2015-09-11 2017-03-16 株式会社東芝 半導体装置
JP2017079315A (ja) * 2015-10-22 2017-04-27 トヨタ自動車株式会社 半導体装置とその製造方法
JP2017168561A (ja) * 2016-03-15 2017-09-21 富士電機株式会社 半導体装置及びその製造方法
JP2019071340A (ja) * 2017-10-06 2019-05-09 トヨタ自動車株式会社 半導体装置の製造方法
JP2020087954A (ja) * 2018-11-15 2020-06-04 ルネサスエレクトロニクス株式会社 半導体装置およびその製造方法
US20200203513A1 (en) * 2018-12-21 2020-06-25 Infineon Technologies Ag Semiconductor device including silicon carbide body and method of manufacturing

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7369302B2 (ja) * 2020-08-27 2023-10-25 新電元工業株式会社 ワイドギャップ半導体装置

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011082392A (ja) * 2009-10-08 2011-04-21 Sumitomo Electric Ind Ltd ショットキーバリアダイオード
JP2017055001A (ja) * 2015-09-11 2017-03-16 株式会社東芝 半導体装置
JP2017079315A (ja) * 2015-10-22 2017-04-27 トヨタ自動車株式会社 半導体装置とその製造方法
JP2017168561A (ja) * 2016-03-15 2017-09-21 富士電機株式会社 半導体装置及びその製造方法
JP2019071340A (ja) * 2017-10-06 2019-05-09 トヨタ自動車株式会社 半導体装置の製造方法
JP2020087954A (ja) * 2018-11-15 2020-06-04 ルネサスエレクトロニクス株式会社 半導体装置およびその製造方法
US20200203513A1 (en) * 2018-12-21 2020-06-25 Infineon Technologies Ag Semiconductor device including silicon carbide body and method of manufacturing

Also Published As

Publication number Publication date
CN117157769A (zh) 2023-12-01
WO2022215471A1 (ja) 2022-10-13
DE112022001382T5 (de) 2023-12-28
US20240079469A1 (en) 2024-03-07

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