JPWO2022215471A1 - - Google Patents
Info
- Publication number
- JPWO2022215471A1 JPWO2022215471A1 JP2023512896A JP2023512896A JPWO2022215471A1 JP WO2022215471 A1 JPWO2022215471 A1 JP WO2022215471A1 JP 2023512896 A JP2023512896 A JP 2023512896A JP 2023512896 A JP2023512896 A JP 2023512896A JP WO2022215471 A1 JPWO2022215471 A1 JP WO2022215471A1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
- H10D62/10—Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
- H10D62/102—Constructional design considerations for preventing surface leakage or controlling electric field concentration
- H10D62/103—Constructional design considerations for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse-biased devices
- H10D62/105—Constructional design considerations for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse-biased devices by having particular doping profiles, shapes or arrangements of PN junctions; by having supplementary regions, e.g. junction termination extension [JTE]
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
- H10D62/10—Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
- H10D62/102—Constructional design considerations for preventing surface leakage or controlling electric field concentration
- H10D62/103—Constructional design considerations for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse-biased devices
- H10D62/105—Constructional design considerations for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse-biased devices by having particular doping profiles, shapes or arrangements of PN junctions; by having supplementary regions, e.g. junction termination extension [JTE]
- H10D62/106—Constructional design considerations for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse-biased devices by having particular doping profiles, shapes or arrangements of PN junctions; by having supplementary regions, e.g. junction termination extension [JTE] having supplementary regions doped oppositely to or in rectifying contact with regions of the semiconductor bodies, e.g. guard rings with PN or Schottky junctions
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
- H10D62/10—Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
- H10D62/124—Shapes, relative sizes or dispositions of the regions of semiconductor bodies or of junctions between the regions
- H10D62/126—Top-view geometrical layouts of the regions or the junctions
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
- H10D62/50—Physical imperfections
- H10D62/53—Physical imperfections the imperfections being within the semiconductor body
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
- H10D62/80—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials
- H10D62/83—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials being Group IV materials, e.g. B-doped Si or undoped Ge
- H10D62/832—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials being Group IV materials, e.g. B-doped Si or undoped Ge being Group IV materials comprising two or more elements, e.g. SiGe
- H10D62/8325—Silicon carbide
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D64/00—Electrodes of devices having potential barriers
- H10D64/111—Field plates
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D64/00—Electrodes of devices having potential barriers
- H10D64/60—Electrodes characterised by their materials
- H10D64/64—Electrodes comprising a Schottky barrier to a semiconductor
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D8/00—Diodes
- H10D8/01—Manufacture or treatment
- H10D8/051—Manufacture or treatment of Schottky diodes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D8/00—Diodes
- H10D8/60—Schottky-barrier diodes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
- H10P14/20—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials
- H10P14/34—Deposited materials, e.g. layers
- H10P14/3402—Deposited materials, e.g. layers characterised by the chemical composition
- H10P14/3404—Deposited materials, e.g. layers characterised by the chemical composition being Group IVA materials
- H10P14/3408—Silicon carbide
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D64/00—Electrodes of devices having potential barriers
- H10D64/01—Manufacture or treatment
- H10D64/012—Manufacture or treatment of electrodes comprising a Schottky barrier to a semiconductor
- H10D64/0121—Manufacture or treatment of electrodes comprising a Schottky barrier to a semiconductor to Group IV semiconductors
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2021064154 | 2021-04-05 | ||
| PCT/JP2022/012074 WO2022215471A1 (ja) | 2021-04-05 | 2022-03-16 | 半導体装置および半導体装置の製造方法 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPWO2022215471A1 true JPWO2022215471A1 (https=) | 2022-10-13 |
Family
ID=83546232
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023512896A Pending JPWO2022215471A1 (https=) | 2021-04-05 | 2022-03-16 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US20240079469A1 (https=) |
| JP (1) | JPWO2022215471A1 (https=) |
| CN (1) | CN117157769A (https=) |
| DE (1) | DE112022001382T5 (https=) |
| WO (1) | WO2022215471A1 (https=) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2022184315A (ja) * | 2021-06-01 | 2022-12-13 | 株式会社東芝 | 半導体装置 |
| EP4718988A1 (en) * | 2024-09-25 | 2026-04-01 | Hitachi Energy Ltd | Method for producing a first contact layer and a second contact layer on a power semiconductor body, and power semiconductor device |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011082392A (ja) * | 2009-10-08 | 2011-04-21 | Sumitomo Electric Ind Ltd | ショットキーバリアダイオード |
| JP2017055001A (ja) * | 2015-09-11 | 2017-03-16 | 株式会社東芝 | 半導体装置 |
| JP2017079315A (ja) * | 2015-10-22 | 2017-04-27 | トヨタ自動車株式会社 | 半導体装置とその製造方法 |
| JP2017168561A (ja) * | 2016-03-15 | 2017-09-21 | 富士電機株式会社 | 半導体装置及びその製造方法 |
| JP2019071340A (ja) * | 2017-10-06 | 2019-05-09 | トヨタ自動車株式会社 | 半導体装置の製造方法 |
| JP2020087954A (ja) * | 2018-11-15 | 2020-06-04 | ルネサスエレクトロニクス株式会社 | 半導体装置およびその製造方法 |
| US20200203513A1 (en) * | 2018-12-21 | 2020-06-25 | Infineon Technologies Ag | Semiconductor device including silicon carbide body and method of manufacturing |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7369302B2 (ja) * | 2020-08-27 | 2023-10-25 | 新電元工業株式会社 | ワイドギャップ半導体装置 |
-
2022
- 2022-03-16 CN CN202280026145.1A patent/CN117157769A/zh active Pending
- 2022-03-16 DE DE112022001382.6T patent/DE112022001382T5/de active Pending
- 2022-03-16 JP JP2023512896A patent/JPWO2022215471A1/ja active Pending
- 2022-03-16 WO PCT/JP2022/012074 patent/WO2022215471A1/ja not_active Ceased
-
2023
- 2023-10-05 US US18/481,258 patent/US20240079469A1/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011082392A (ja) * | 2009-10-08 | 2011-04-21 | Sumitomo Electric Ind Ltd | ショットキーバリアダイオード |
| JP2017055001A (ja) * | 2015-09-11 | 2017-03-16 | 株式会社東芝 | 半導体装置 |
| JP2017079315A (ja) * | 2015-10-22 | 2017-04-27 | トヨタ自動車株式会社 | 半導体装置とその製造方法 |
| JP2017168561A (ja) * | 2016-03-15 | 2017-09-21 | 富士電機株式会社 | 半導体装置及びその製造方法 |
| JP2019071340A (ja) * | 2017-10-06 | 2019-05-09 | トヨタ自動車株式会社 | 半導体装置の製造方法 |
| JP2020087954A (ja) * | 2018-11-15 | 2020-06-04 | ルネサスエレクトロニクス株式会社 | 半導体装置およびその製造方法 |
| US20200203513A1 (en) * | 2018-12-21 | 2020-06-25 | Infineon Technologies Ag | Semiconductor device including silicon carbide body and method of manufacturing |
Also Published As
| Publication number | Publication date |
|---|---|
| CN117157769A (zh) | 2023-12-01 |
| WO2022215471A1 (ja) | 2022-10-13 |
| DE112022001382T5 (de) | 2023-12-28 |
| US20240079469A1 (en) | 2024-03-07 |
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