JPWO2022209263A1 - - Google Patents
Info
- Publication number
- JPWO2022209263A1 JPWO2022209263A1 JP2023510560A JP2023510560A JPWO2022209263A1 JP WO2022209263 A1 JPWO2022209263 A1 JP WO2022209263A1 JP 2023510560 A JP2023510560 A JP 2023510560A JP 2023510560 A JP2023510560 A JP 2023510560A JP WO2022209263 A1 JPWO2022209263 A1 JP WO2022209263A1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/01—Manufacture or treatment
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
- G01N21/64—Fluorescence; Phosphorescence
- G01N21/6489—Photoluminescence of semiconductors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/9501—Semiconductor wafers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/956—Inspecting patterns on the surface of objects
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/26—Testing of individual semiconductor devices
- G01R31/2607—Circuits therefor
- G01R31/2632—Circuits therefor for testing diodes
- G01R31/2635—Testing light-emitting diodes, laser diodes or photodiodes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
- G01J2001/4247—Photometry, e.g. photographic exposure meter using electric radiation detectors for testing lamps or other light sources
- G01J2001/4252—Photometry, e.g. photographic exposure meter using electric radiation detectors for testing lamps or other light sources for testing LED's
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
- G01N21/64—Fluorescence; Phosphorescence
- G01N21/645—Specially adapted constructive features of fluorimeters
- G01N21/6456—Spatial resolved fluorescence measurements; Imaging
- G01N2021/646—Detecting fluorescent inhomogeneities at a position, e.g. for detecting defects
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
- G01N21/64—Fluorescence; Phosphorescence
- G01N21/645—Specially adapted constructive features of fluorimeters
- G01N2021/6484—Optical fibres
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Optics & Photonics (AREA)
- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
- Electroluminescent Light Sources (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2021062950 | 2021-04-01 | ||
| PCT/JP2022/004057 WO2022209263A1 (ja) | 2021-04-01 | 2022-02-02 | 検査方法、導電性部材、及び検査装置 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPWO2022209263A1 true JPWO2022209263A1 (https=) | 2022-10-06 |
Family
ID=83458707
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023510560A Pending JPWO2022209263A1 (https=) | 2021-04-01 | 2022-02-02 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US20240168080A1 (https=) |
| EP (1) | EP4318556A4 (https=) |
| JP (1) | JPWO2022209263A1 (https=) |
| KR (1) | KR20230164649A (https=) |
| CN (1) | CN117063062A (https=) |
| TW (1) | TWI890937B (https=) |
| WO (1) | WO2022209263A1 (https=) |
Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10135291A (ja) * | 1996-10-30 | 1998-05-22 | Sharp Corp | 半導体装置の評価方法及びその評価装置 |
| US20070170933A1 (en) * | 2006-01-23 | 2007-07-26 | Maxmile Technologies, Llc | Method and Apparatus for Nondestructively Evaluating Light-Emitting Materials |
| JP2008002858A (ja) * | 2006-06-21 | 2008-01-10 | Sumitomo Electric Ind Ltd | 光半導体検査装置 |
| JP2012202866A (ja) * | 2011-03-25 | 2012-10-22 | Toshiba Corp | パターン検査装置およびパターン検査方法 |
| JP2012208121A (ja) * | 2011-03-29 | 2012-10-25 | Samsung Led Co Ltd | 発光素子の検査装置及び方法 |
| JP2013173852A (ja) * | 2012-02-24 | 2013-09-05 | Denki Kagaku Kogyo Kk | 導電性粘着シート及び電子部品の製造方法 |
| JP2015021805A (ja) * | 2013-07-18 | 2015-02-02 | 株式会社日立ハイテクノロジーズ | レプリカ採取装置およびそれを備えた検査システム |
| JP2015059781A (ja) * | 2013-09-18 | 2015-03-30 | 株式会社アイテス | 太陽電池検査装置、及び太陽電池検査方法 |
| KR20170027933A (ko) * | 2015-09-02 | 2017-03-13 | 한양대학교 에리카산학협력단 | 발광다이오드의 상태 밀도 분석 장치 및 방법 |
| US20200371152A1 (en) * | 2018-12-21 | 2020-11-26 | Industrial Technology Research Institute | Method for inspecting light-emitting diodes and inspection apparatus |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP3267258A1 (en) * | 2006-02-21 | 2018-01-10 | Nikon Corporation | Exposure apparatus, exposure method and device manufacturing method |
| WO2008029730A1 (en) * | 2006-09-08 | 2008-03-13 | Konica Minolta Medical & Graphic, Inc. | Semiconductor fluorescent microparticle, biosubstance fluorescent labeling agent and method of bioassay |
| JP6076133B2 (ja) | 2013-02-27 | 2017-02-08 | 東レエンジニアリング株式会社 | 蛍光発光体の検査装置 |
| DE102015213460A1 (de) * | 2015-07-17 | 2017-01-19 | Osram Gmbh | Wellenlängenumwandlung von Primärlicht mittels eines Konversionskörpers |
| EP3951845B1 (en) * | 2019-03-28 | 2025-06-25 | Hamamatsu Photonics K.K. | Inspection device and inspection method |
-
2022
- 2022-02-02 JP JP2023510560A patent/JPWO2022209263A1/ja active Pending
- 2022-02-02 WO PCT/JP2022/004057 patent/WO2022209263A1/ja not_active Ceased
- 2022-02-02 KR KR1020237026993A patent/KR20230164649A/ko active Pending
- 2022-02-02 EP EP22779492.2A patent/EP4318556A4/en not_active Withdrawn
- 2022-02-02 US US18/282,812 patent/US20240168080A1/en not_active Abandoned
- 2022-02-02 CN CN202280022735.7A patent/CN117063062A/zh active Pending
- 2022-03-28 TW TW111111561A patent/TWI890937B/zh active
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10135291A (ja) * | 1996-10-30 | 1998-05-22 | Sharp Corp | 半導体装置の評価方法及びその評価装置 |
| US20070170933A1 (en) * | 2006-01-23 | 2007-07-26 | Maxmile Technologies, Llc | Method and Apparatus for Nondestructively Evaluating Light-Emitting Materials |
| JP2008002858A (ja) * | 2006-06-21 | 2008-01-10 | Sumitomo Electric Ind Ltd | 光半導体検査装置 |
| JP2012202866A (ja) * | 2011-03-25 | 2012-10-22 | Toshiba Corp | パターン検査装置およびパターン検査方法 |
| JP2012208121A (ja) * | 2011-03-29 | 2012-10-25 | Samsung Led Co Ltd | 発光素子の検査装置及び方法 |
| JP2013173852A (ja) * | 2012-02-24 | 2013-09-05 | Denki Kagaku Kogyo Kk | 導電性粘着シート及び電子部品の製造方法 |
| JP2015021805A (ja) * | 2013-07-18 | 2015-02-02 | 株式会社日立ハイテクノロジーズ | レプリカ採取装置およびそれを備えた検査システム |
| JP2015059781A (ja) * | 2013-09-18 | 2015-03-30 | 株式会社アイテス | 太陽電池検査装置、及び太陽電池検査方法 |
| KR20170027933A (ko) * | 2015-09-02 | 2017-03-13 | 한양대학교 에리카산학협력단 | 발광다이오드의 상태 밀도 분석 장치 및 방법 |
| US20200371152A1 (en) * | 2018-12-21 | 2020-11-26 | Industrial Technology Research Institute | Method for inspecting light-emitting diodes and inspection apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| US20240168080A1 (en) | 2024-05-23 |
| CN117063062A (zh) | 2023-11-14 |
| EP4318556A1 (en) | 2024-02-07 |
| TWI890937B (zh) | 2025-07-21 |
| KR20230164649A (ko) | 2023-12-04 |
| EP4318556A4 (en) | 2025-04-16 |
| TW202247313A (zh) | 2022-12-01 |
| WO2022209263A1 (ja) | 2022-10-06 |
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| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20240807 |
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