JPWO2022114013A1 - - Google Patents
Info
- Publication number
- JPWO2022114013A1 JPWO2022114013A1 JP2022565380A JP2022565380A JPWO2022114013A1 JP WO2022114013 A1 JPWO2022114013 A1 JP WO2022114013A1 JP 2022565380 A JP2022565380 A JP 2022565380A JP 2022565380 A JP2022565380 A JP 2022565380A JP WO2022114013 A1 JPWO2022114013 A1 JP WO2022114013A1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
Landscapes
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Plasma Technology (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2020198601 | 2020-11-30 | ||
| JP2020198601 | 2020-11-30 | ||
| PCT/JP2021/043025 WO2022114013A1 (ja) | 2020-11-30 | 2021-11-24 | 気体処理装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPWO2022114013A1 true JPWO2022114013A1 (https=) | 2022-06-02 |
| JP7581375B2 JP7581375B2 (ja) | 2024-11-12 |
Family
ID=81755571
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022565380A Active JP7581375B2 (ja) | 2020-11-30 | 2021-11-24 | 気体処理装置 |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP7581375B2 (https=) |
| WO (1) | WO2022114013A1 (https=) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11343105A (ja) * | 1994-04-28 | 1999-12-14 | Mitsubishi Electric Corp | オゾン発生装置 |
| JP2005108482A (ja) * | 2003-09-29 | 2005-04-21 | E Square:Kk | プラズマ表面処理装置 |
| JP2006509331A (ja) * | 2002-12-02 | 2006-03-16 | セム テクノロジー コーポレーション リミテッド | 大気圧プラズマを利用した表面処理装置 |
| JP2009170267A (ja) * | 2008-01-16 | 2009-07-30 | Ngk Insulators Ltd | セラミックプラズマ反応器、及びプラズマ反応装置 |
-
2021
- 2021-11-24 WO PCT/JP2021/043025 patent/WO2022114013A1/ja not_active Ceased
- 2021-11-24 JP JP2022565380A patent/JP7581375B2/ja active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11343105A (ja) * | 1994-04-28 | 1999-12-14 | Mitsubishi Electric Corp | オゾン発生装置 |
| JP2006509331A (ja) * | 2002-12-02 | 2006-03-16 | セム テクノロジー コーポレーション リミテッド | 大気圧プラズマを利用した表面処理装置 |
| JP2005108482A (ja) * | 2003-09-29 | 2005-04-21 | E Square:Kk | プラズマ表面処理装置 |
| JP2009170267A (ja) * | 2008-01-16 | 2009-07-30 | Ngk Insulators Ltd | セラミックプラズマ反応器、及びプラズマ反応装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2022114013A1 (ja) | 2022-06-02 |
| JP7581375B2 (ja) | 2024-11-12 |
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