JPWO2022114013A1 - - Google Patents

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Publication number
JPWO2022114013A1
JPWO2022114013A1 JP2022565380A JP2022565380A JPWO2022114013A1 JP WO2022114013 A1 JPWO2022114013 A1 JP WO2022114013A1 JP 2022565380 A JP2022565380 A JP 2022565380A JP 2022565380 A JP2022565380 A JP 2022565380A JP WO2022114013 A1 JPWO2022114013 A1 JP WO2022114013A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2022565380A
Other languages
Japanese (ja)
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JP7581375B2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
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Publication of JPWO2022114013A1 publication Critical patent/JPWO2022114013A1/ja
Application granted granted Critical
Publication of JP7581375B2 publication Critical patent/JP7581375B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/08Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05HPLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00Generating plasma; Handling plasma
    • H05H1/24Generating plasma

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Plasma Technology (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
JP2022565380A 2020-11-30 2021-11-24 気体処理装置 Active JP7581375B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2020198601 2020-11-30
JP2020198601 2020-11-30
PCT/JP2021/043025 WO2022114013A1 (ja) 2020-11-30 2021-11-24 気体処理装置

Publications (2)

Publication Number Publication Date
JPWO2022114013A1 true JPWO2022114013A1 (https=) 2022-06-02
JP7581375B2 JP7581375B2 (ja) 2024-11-12

Family

ID=81755571

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022565380A Active JP7581375B2 (ja) 2020-11-30 2021-11-24 気体処理装置

Country Status (2)

Country Link
JP (1) JP7581375B2 (https=)
WO (1) WO2022114013A1 (https=)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11343105A (ja) * 1994-04-28 1999-12-14 Mitsubishi Electric Corp オゾン発生装置
JP2005108482A (ja) * 2003-09-29 2005-04-21 E Square:Kk プラズマ表面処理装置
JP2006509331A (ja) * 2002-12-02 2006-03-16 セム テクノロジー コーポレーション リミテッド 大気圧プラズマを利用した表面処理装置
JP2009170267A (ja) * 2008-01-16 2009-07-30 Ngk Insulators Ltd セラミックプラズマ反応器、及びプラズマ反応装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11343105A (ja) * 1994-04-28 1999-12-14 Mitsubishi Electric Corp オゾン発生装置
JP2006509331A (ja) * 2002-12-02 2006-03-16 セム テクノロジー コーポレーション リミテッド 大気圧プラズマを利用した表面処理装置
JP2005108482A (ja) * 2003-09-29 2005-04-21 E Square:Kk プラズマ表面処理装置
JP2009170267A (ja) * 2008-01-16 2009-07-30 Ngk Insulators Ltd セラミックプラズマ反応器、及びプラズマ反応装置

Also Published As

Publication number Publication date
WO2022114013A1 (ja) 2022-06-02
JP7581375B2 (ja) 2024-11-12

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