JPWO2021200469A1 - - Google Patents

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Publication number
JPWO2021200469A1
JPWO2021200469A1 JP2022512023A JP2022512023A JPWO2021200469A1 JP WO2021200469 A1 JPWO2021200469 A1 JP WO2021200469A1 JP 2022512023 A JP2022512023 A JP 2022512023A JP 2022512023 A JP2022512023 A JP 2022512023A JP WO2021200469 A1 JPWO2021200469 A1 JP WO2021200469A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2022512023A
Other versions
JPWO2021200469A5 (ja
JP7518154B2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2021200469A1 publication Critical patent/JPWO2021200469A1/ja
Publication of JPWO2021200469A5 publication Critical patent/JPWO2021200469A5/ja
Application granted granted Critical
Publication of JP7518154B2 publication Critical patent/JP7518154B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02818—Means for compensation or elimination of undesirable effects
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02543—Characteristics of substrate, e.g. cutting angles
    • H03H9/02566—Characteristics of substrate, e.g. cutting angles of semiconductor substrates
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02637—Details concerning reflective or coupling arrays
    • H03H9/02685—Grating lines having particular arrangements
    • H03H9/02724—Comb like grating lines
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02992—Details of bus bars, contact pads or other electrical connections for finger electrodes
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H03H9/14544—Transducers of particular shape or position

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
JP2022512023A 2020-03-31 2021-03-24 弾性波装置 Active JP7518154B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2020062202 2020-03-31
JP2020062202 2020-03-31
PCT/JP2021/012228 WO2021200469A1 (ja) 2020-03-31 2021-03-24 弾性波装置

Publications (3)

Publication Number Publication Date
JPWO2021200469A1 true JPWO2021200469A1 (ja) 2021-10-07
JPWO2021200469A5 JPWO2021200469A5 (ja) 2022-10-24
JP7518154B2 JP7518154B2 (ja) 2024-07-17

Family

ID=

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002314366A (ja) * 2001-04-09 2002-10-25 Murata Mfg Co Ltd 弾性表面波フィルタ、弾性表面波装置および通信装置
JP2006319887A (ja) * 2005-05-16 2006-11-24 Murata Mfg Co Ltd 弾性境界波装置
WO2008038506A1 (fr) * 2006-09-27 2008-04-03 Murata Manufacturing Co., Ltd. Dispositif d'onde acoustique limite
WO2010137648A1 (ja) * 2009-05-29 2010-12-02 株式会社村田製作所 ラダー型フィルタ及び弾性波共振子
US20170264269A1 (en) * 2016-03-09 2017-09-14 Wisol Co., Ltd. Saw resonator having negative profile metal structure and manufacturing method thereof
JP2019062441A (ja) * 2017-09-27 2019-04-18 株式会社村田製作所 弾性波装置
WO2019111664A1 (ja) * 2017-12-08 2019-06-13 株式会社村田製作所 弾性波装置
JP2019114986A (ja) * 2017-12-25 2019-07-11 株式会社村田製作所 弾性波装置
WO2020036100A1 (ja) * 2018-08-13 2020-02-20 株式会社村田製作所 弾性波フィルタ

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002314366A (ja) * 2001-04-09 2002-10-25 Murata Mfg Co Ltd 弾性表面波フィルタ、弾性表面波装置および通信装置
JP2006319887A (ja) * 2005-05-16 2006-11-24 Murata Mfg Co Ltd 弾性境界波装置
WO2008038506A1 (fr) * 2006-09-27 2008-04-03 Murata Manufacturing Co., Ltd. Dispositif d'onde acoustique limite
WO2010137648A1 (ja) * 2009-05-29 2010-12-02 株式会社村田製作所 ラダー型フィルタ及び弾性波共振子
US20170264269A1 (en) * 2016-03-09 2017-09-14 Wisol Co., Ltd. Saw resonator having negative profile metal structure and manufacturing method thereof
JP2019062441A (ja) * 2017-09-27 2019-04-18 株式会社村田製作所 弾性波装置
WO2019111664A1 (ja) * 2017-12-08 2019-06-13 株式会社村田製作所 弾性波装置
JP2019114986A (ja) * 2017-12-25 2019-07-11 株式会社村田製作所 弾性波装置
WO2020036100A1 (ja) * 2018-08-13 2020-02-20 株式会社村田製作所 弾性波フィルタ

Also Published As

Publication number Publication date
US20230018882A1 (en) 2023-01-19
CN115362629A (zh) 2022-11-18
WO2021200469A1 (ja) 2021-10-07

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