JPWO2021172588A1 - - Google Patents

Info

Publication number
JPWO2021172588A1
JPWO2021172588A1 JP2022503388A JP2022503388A JPWO2021172588A1 JP WO2021172588 A1 JPWO2021172588 A1 JP WO2021172588A1 JP 2022503388 A JP2022503388 A JP 2022503388A JP 2022503388 A JP2022503388 A JP 2022503388A JP WO2021172588 A1 JPWO2021172588 A1 JP WO2021172588A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2022503388A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2021172588A1 publication Critical patent/JPWO2021172588A1/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
JP2022503388A 2020-02-28 2021-03-01 Pending JPWO2021172588A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2020032569 2020-02-28
PCT/JP2021/007722 WO2021172588A1 (fr) 2020-02-28 2021-03-01 Dispositif de capteur et procédé de fabrication correspondant

Publications (1)

Publication Number Publication Date
JPWO2021172588A1 true JPWO2021172588A1 (fr) 2021-09-02

Family

ID=77491660

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022503388A Pending JPWO2021172588A1 (fr) 2020-02-28 2021-03-01

Country Status (2)

Country Link
JP (1) JPWO2021172588A1 (fr)
WO (1) WO2021172588A1 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023188760A1 (fr) * 2022-03-31 2023-10-05 太陽誘電株式会社 Dispositif de détection et son procédé de fabrication

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004361269A (ja) * 2003-06-05 2004-12-24 Canon Inc マルチチャンネルセンサとその製造方法及びバイオセンサシステムとその製造方法
DE102004005668B4 (de) * 2004-02-05 2021-09-16 Snaptrack, Inc. Elektrisches Bauelement und Herstellungsverfahren
JP4556637B2 (ja) * 2004-11-22 2010-10-06 ソニー株式会社 機能素子体
JP2007104458A (ja) * 2005-10-06 2007-04-19 Ube Ind Ltd 薄膜圧電共振子デバイスおよびその製造方法
JP2008160655A (ja) * 2006-12-26 2008-07-10 Matsushita Electric Ind Co Ltd 圧電薄膜共振器の製造方法
JP6368091B2 (ja) * 2014-01-07 2018-08-01 太陽誘電株式会社 モジュール
JP6494545B2 (ja) * 2016-02-23 2019-04-03 太陽誘電株式会社 デュプレクサ
EP3497439B1 (fr) * 2016-08-11 2023-12-20 Qorvo US, Inc. Dispositif résonateur acoustique à placement commandé de matériau de fonctionnalisation
JP6469736B2 (ja) * 2017-01-17 2019-02-13 太陽誘電株式会社 センサ回路およびセンシング方法

Also Published As

Publication number Publication date
WO2021172588A1 (fr) 2021-09-02

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Legal Events

Date Code Title Description
RD01 Notification of change of attorney

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Effective date: 20220707

A621 Written request for application examination

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Effective date: 20240221