JPWO2021152416A1 - - Google Patents

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Publication number
JPWO2021152416A1
JPWO2021152416A1 JP2021573621A JP2021573621A JPWO2021152416A1 JP WO2021152416 A1 JPWO2021152416 A1 JP WO2021152416A1 JP 2021573621 A JP2021573621 A JP 2021573621A JP 2021573621 A JP2021573621 A JP 2021573621A JP WO2021152416 A1 JPWO2021152416 A1 JP WO2021152416A1
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JP
Japan
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JP2021573621A
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JPWO2021152416A5 (https=
JP7520056B2 (ja
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Classifications

    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06V—IMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
    • G06V10/00—Arrangements for image or video recognition or understanding
    • G06V10/70—Arrangements for image or video recognition or understanding using pattern recognition or machine learning
    • G06V10/82—Arrangements for image or video recognition or understanding using pattern recognition or machine learning using neural networks
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/0002—Inspection of images, e.g. flaw detection
    • G06T7/0004—Industrial image inspection
    • G06T7/0008—Industrial image inspection checking presence/absence
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06N—COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
    • G06N20/00—Machine learning
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T1/00—General purpose image data processing
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T5/00—Image enhancement or restoration
    • G06T5/50—Image enhancement or restoration using two or more images, e.g. averaging or subtraction
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/0002—Inspection of images, e.g. flaw detection
    • G06T7/0004—Industrial image inspection
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/60—Analysis of geometric attributes
    • G06T7/62—Analysis of geometric attributes of area, perimeter, diameter or volume
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06V—IMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
    • G06V10/00—Arrangements for image or video recognition or understanding
    • G06V10/20—Image preprocessing
    • G06V10/25—Determination of region of interest [ROI] or a volume of interest [VOI]
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06V—IMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
    • G06V10/00—Arrangements for image or video recognition or understanding
    • G06V10/40—Extraction of image or video features
    • G06V10/56—Extraction of image or video features relating to colour
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06V—IMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
    • G06V10/00—Arrangements for image or video recognition or understanding
    • G06V10/40—Extraction of image or video features
    • G06V10/60—Extraction of image or video features relating to illumination properties, e.g. using a reflectance or lighting model
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06V—IMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
    • G06V10/00—Arrangements for image or video recognition or understanding
    • G06V10/70—Arrangements for image or video recognition or understanding using pattern recognition or machine learning
    • G06V10/77—Processing image or video features in feature spaces; using data integration or data reduction, e.g. principal component analysis [PCA] or independent component analysis [ICA] or self-organising maps [SOM]; Blind source separation
    • G06V10/772—Determining representative reference patterns, e.g. averaging or distorting patterns; Generating dictionaries
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06V—IMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
    • G06V10/00—Arrangements for image or video recognition or understanding
    • G06V10/70—Arrangements for image or video recognition or understanding using pattern recognition or machine learning
    • G06V10/77—Processing image or video features in feature spaces; using data integration or data reduction, e.g. principal component analysis [PCA] or independent component analysis [ICA] or self-organising maps [SOM]; Blind source separation
    • G06V10/774—Generating sets of training patterns; Bootstrap methods, e.g. bagging or boosting
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06V—IMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
    • G06V10/00—Arrangements for image or video recognition or understanding
    • G06V10/70—Arrangements for image or video recognition or understanding using pattern recognition or machine learning
    • G06V10/77—Processing image or video features in feature spaces; using data integration or data reduction, e.g. principal component analysis [PCA] or independent component analysis [ICA] or self-organising maps [SOM]; Blind source separation
    • G06V10/774—Generating sets of training patterns; Bootstrap methods, e.g. bagging or boosting
    • G06V10/7747—Organisation of the process, e.g. bagging or boosting
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06V—IMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
    • G06V20/00—Scenes; Scene-specific elements
    • G06V20/70—Labelling scene content, e.g. deriving syntactic or semantic representations
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G01N2021/8883—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges involving the calculation of gauges, generating models
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/10—Image acquisition modality
    • G06T2207/10024—Color image
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/20—Special algorithmic details
    • G06T2207/20081—Training; Learning
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/20—Special algorithmic details
    • G06T2207/20084—Artificial neural networks [ANN]
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/20—Special algorithmic details
    • G06T2207/20212—Image combination
    • G06T2207/20221—Image fusion; Image merging
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/30—Subject of image; Context of image processing
    • G06T2207/30108—Industrial image inspection
    • G06T2207/30148—Semiconductor; IC; Wafer

Landscapes

  • Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Multimedia (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Software Systems (AREA)
  • Evolutionary Computation (AREA)
  • Medical Informatics (AREA)
  • Artificial Intelligence (AREA)
  • Computing Systems (AREA)
  • General Health & Medical Sciences (AREA)
  • Databases & Information Systems (AREA)
  • Health & Medical Sciences (AREA)
  • Quality & Reliability (AREA)
  • Computational Linguistics (AREA)
  • Geometry (AREA)
  • Data Mining & Analysis (AREA)
  • General Engineering & Computer Science (AREA)
  • Mathematical Physics (AREA)
  • Image Analysis (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Image Processing (AREA)
JP2021573621A 2020-01-31 2021-01-18 学習データ生成装置、不良識別システム Active JP7520056B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2024110156A JP7781972B2 (ja) 2020-01-31 2024-07-09 学習データ生成装置及び不良識別システム

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2020015382 2020-01-31
JP2020015382 2020-01-31
PCT/IB2021/050330 WO2021152416A1 (ja) 2020-01-31 2021-01-18 学習データ生成装置、不良識別システム

Related Child Applications (1)

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JP2024110156A Division JP7781972B2 (ja) 2020-01-31 2024-07-09 学習データ生成装置及び不良識別システム

Publications (3)

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JPWO2021152416A1 true JPWO2021152416A1 (https=) 2021-08-05
JPWO2021152416A5 JPWO2021152416A5 (https=) 2024-01-16
JP7520056B2 JP7520056B2 (ja) 2024-07-22

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Country Status (3)

Country Link
US (1) US12322084B2 (https=)
JP (2) JP7520056B2 (https=)
WO (1) WO2021152416A1 (https=)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2021209867A1 (ja) * 2020-04-17 2021-10-21 株式会社半導体エネルギー研究所 分類装置、画像分類方法、およびパターン検査装置
WO2023113773A1 (en) * 2021-12-14 2023-06-22 Hewlett-Packard Development Company, L.P. Manufacturing defect detection augmented training sets
JP2024080093A (ja) * 2022-12-01 2024-06-13 東レエンジニアリング株式会社 欠陥画像処理装置
JP2024080089A (ja) * 2022-12-01 2024-06-13 東レエンジニアリング株式会社 欠陥画像処理装置
JP2024116664A (ja) * 2023-02-16 2024-08-28 日立Astemo株式会社 外観検査装置および外観検査方法
KR102692224B1 (ko) * 2023-08-29 2024-08-06 (주)바질컴퍼니 위치 제어가 가능한 인공 결함 데이터 생성 방법
CN117152687B (zh) * 2023-10-31 2024-01-26 中国通信建设第三工程局有限公司 一种通信线路状态监测系统
WO2025196881A1 (ja) * 2024-03-18 2025-09-25 株式会社日立ハイテク 欠陥分類装置および欠陥分類方法

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004354251A (ja) * 2003-05-29 2004-12-16 Nidek Co Ltd 欠陥検査装置
JP2005156334A (ja) * 2003-11-25 2005-06-16 Nec Tohoku Sangyo System Kk 疑似不良画像自動作成装置及び画像検査装置
JP2011214903A (ja) * 2010-03-31 2011-10-27 Denso It Laboratory Inc 外観検査装置、外観検査用識別器の生成装置及び外観検査用識別器生成方法ならびに外観検査用識別器生成用コンピュータプログラム
JP2018205123A (ja) * 2017-06-05 2018-12-27 学校法人梅村学園 画像検査システムの性能調整のための検査用画像を生成する画像生成装置及び画像生成方法
US20190257767A1 (en) * 2018-02-21 2019-08-22 Applied Materials Israel Ltd. Generating a training set usable for examination of a semiconductor specimen
US20200034956A1 (en) * 2018-07-25 2020-01-30 Fei Company Training an artificial neural network using simulated specimen images

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7333650B2 (en) * 2003-05-29 2008-02-19 Nidek Co., Ltd. Defect inspection apparatus
JP5063551B2 (ja) 2008-10-03 2012-10-31 株式会社日立ハイテクノロジーズ パターンマッチング方法、及び画像処理装置
JP2012026982A (ja) 2010-07-27 2012-02-09 Panasonic Electric Works Sunx Co Ltd 検査装置
KR102115344B1 (ko) 2010-08-27 2020-05-26 가부시키가이샤 한도오따이 에네루기 켄큐쇼 기억 장치, 반도체 장치
JP6081171B2 (ja) 2011-12-09 2017-02-15 株式会社半導体エネルギー研究所 記憶装置
JP6674838B2 (ja) 2015-05-21 2020-04-01 株式会社半導体エネルギー研究所 電子装置
KR20170084020A (ko) 2015-10-23 2017-07-19 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치 및 전자 기기
CN108701480B (zh) 2016-03-10 2022-10-14 株式会社半导体能源研究所 半导体装置
US9589374B1 (en) 2016-08-01 2017-03-07 12 Sigma Technologies Computer-aided diagnosis system for medical images using deep convolutional neural networks
CN109643514B (zh) 2016-08-26 2023-04-04 株式会社半导体能源研究所 显示装置及电子设备
JP6241576B1 (ja) 2016-12-06 2017-12-06 三菱電機株式会社 検査装置及び検査方法
JP6780769B2 (ja) 2017-03-23 2020-11-04 日本電気株式会社 学習装置、学習方法および学習プログラム
JP2018180628A (ja) 2017-04-04 2018-11-15 学校法人同志社 感情分類装置および感情分類方法
US20180322623A1 (en) * 2017-05-08 2018-11-08 Aquifi, Inc. Systems and methods for inspection and defect detection using 3-d scanning
JP2018195119A (ja) 2017-05-18 2018-12-06 住友電装株式会社 異変検出装置及び異変検出方法
JP6766839B2 (ja) 2018-03-14 2020-10-14 オムロン株式会社 検査システム、画像識別システム、識別システム、識別器生成システム、及び学習データ生成装置
US11170255B2 (en) * 2018-03-21 2021-11-09 Kla-Tencor Corp. Training a machine learning model with synthetic images
CN111902827B (zh) 2018-03-26 2024-11-05 松下知识产权经营株式会社 一种处理方法及利用了它的处理装置
KR102631031B1 (ko) 2018-07-27 2024-01-29 삼성전자주식회사 반도체 장치의 불량 검출 방법
JP7144244B2 (ja) 2018-08-31 2022-09-29 株式会社日立ハイテク パターン検査システム
JP7395566B2 (ja) 2019-04-02 2023-12-11 株式会社半導体エネルギー研究所 検査方法
CN116669614A (zh) * 2020-12-25 2023-08-29 尼德克株式会社 眼科装置及眼科装置的控制程序

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004354251A (ja) * 2003-05-29 2004-12-16 Nidek Co Ltd 欠陥検査装置
JP2005156334A (ja) * 2003-11-25 2005-06-16 Nec Tohoku Sangyo System Kk 疑似不良画像自動作成装置及び画像検査装置
JP2011214903A (ja) * 2010-03-31 2011-10-27 Denso It Laboratory Inc 外観検査装置、外観検査用識別器の生成装置及び外観検査用識別器生成方法ならびに外観検査用識別器生成用コンピュータプログラム
JP2018205123A (ja) * 2017-06-05 2018-12-27 学校法人梅村学園 画像検査システムの性能調整のための検査用画像を生成する画像生成装置及び画像生成方法
US20190257767A1 (en) * 2018-02-21 2019-08-22 Applied Materials Israel Ltd. Generating a training set usable for examination of a semiconductor specimen
US20200034956A1 (en) * 2018-07-25 2020-01-30 Fei Company Training an artificial neural network using simulated specimen images

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
HASELMANN ET AL.: "Supervised machine learning based surface inspection by synthetizing artificial defects", 2017 16TH IEEE INTERNATIONAL CONFERENCE ON MACHINE LEARNING AND APPLICATIONS, JPN6024023108, 2017, ISSN: 0005349062 *

Also Published As

Publication number Publication date
WO2021152416A1 (ja) 2021-08-05
JP2024133117A (ja) 2024-10-01
US12322084B2 (en) 2025-06-03
JP7781972B2 (ja) 2025-12-08
US20230039064A1 (en) 2023-02-09
JP7520056B2 (ja) 2024-07-22

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