JPWO2021108424A5 - - Google Patents
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- Publication number
- JPWO2021108424A5 JPWO2021108424A5 JP2022530928A JP2022530928A JPWO2021108424A5 JP WO2021108424 A5 JPWO2021108424 A5 JP WO2021108424A5 JP 2022530928 A JP2022530928 A JP 2022530928A JP 2022530928 A JP2022530928 A JP 2022530928A JP WO2021108424 A5 JPWO2021108424 A5 JP WO2021108424A5
- Authority
- JP
- Japan
- Prior art keywords
- ion
- source
- ions
- deflector
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 150000002500 ions Chemical class 0.000 claims description 52
- 238000010884 ion-beam technique Methods 0.000 claims description 29
- 230000005684 electric field Effects 0.000 claims description 8
- 238000005259 measurement Methods 0.000 claims description 2
- 238000010894 electron beam technology Methods 0.000 description 3
- 238000001514 detection method Methods 0.000 description 1
- 238000001819 mass spectrum Methods 0.000 description 1
- 230000002123 temporal effect Effects 0.000 description 1
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US16/698,178 | 2019-11-27 | ||
US16/698,178 US10948456B1 (en) | 2019-11-27 | 2019-11-27 | Gas analyzer system with ion source |
PCT/US2020/062048 WO2021108424A1 (en) | 2019-11-27 | 2020-11-24 | Gas analyzer system with ion source |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2023505040A JP2023505040A (ja) | 2023-02-08 |
JPWO2021108424A5 true JPWO2021108424A5 (de) | 2023-11-29 |
Family
ID=73943337
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2022530928A Pending JP2023505040A (ja) | 2019-11-27 | 2020-11-24 | イオン源を有するガス分析器システム |
Country Status (8)
Country | Link |
---|---|
US (1) | US10948456B1 (de) |
EP (1) | EP4066273A1 (de) |
JP (1) | JP2023505040A (de) |
KR (1) | KR20220106161A (de) |
CN (1) | CN114730695A (de) |
IL (1) | IL292326A (de) |
TW (1) | TW202134618A (de) |
WO (1) | WO2021108424A1 (de) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR3121220B1 (fr) * | 2021-03-24 | 2023-05-19 | Ateq | Spectromètre de masse pour la détection de fuites par gaz traceur |
Family Cites Families (32)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2770772A (en) | 1952-07-29 | 1956-11-13 | Int Standard Electric Corp | Detection of leaks in vacuum apparatus |
GB895602A (en) | 1958-12-29 | 1962-05-02 | Ici Ltd | Improvements in and relating to gas discharge tubes |
GB1047204A (de) | 1964-05-26 | 1900-01-01 | ||
US3835319A (en) | 1969-03-27 | 1974-09-10 | Nat Res Corp | Cold cathode ion source mass spectrometer with straight line arrangement of ion source and analyzer |
AU534599B2 (en) | 1978-08-25 | 1984-02-09 | Commonwealth Scientific And Industrial Research Organisation | Cold cathode ion soirce |
US4542321A (en) | 1982-07-12 | 1985-09-17 | Denton Vacuum Inc | Inverted magnetron ion source |
US4761553A (en) * | 1983-10-06 | 1988-08-02 | The United States Of America As Represented By The United States Department Of Energy | Gaseous leak detector |
US4774437A (en) | 1986-02-28 | 1988-09-27 | Varian Associates, Inc. | Inverted re-entrant magnetron ion source |
US5089746A (en) | 1989-02-14 | 1992-02-18 | Varian Associates, Inc. | Production of ion beams by chemically enhanced sputtering of solids |
DE58908153D1 (de) | 1989-12-08 | 1994-09-08 | Balzer Dinoo Dr | Partialdruckmesszelle mit Kaltkathodenionenquelle für die Lecksuche in Vakuumsystemen. |
US5157333A (en) | 1991-03-12 | 1992-10-20 | Mks Instruments, Inc. | Discharge initiating means for cold cathode discharge ionization gauge |
DE69411620T2 (de) | 1993-04-28 | 1999-02-04 | Fredericks Co | Ionisationswandler mit sich gegenuberliegenden Magneten |
US5386115A (en) * | 1993-09-22 | 1995-01-31 | Westinghouse Electric Corporation | Solid state micro-machined mass spectrograph universal gas detection sensor |
US5401963A (en) * | 1993-11-01 | 1995-03-28 | Rosemount Analytical Inc. | Micromachined mass spectrometer |
US6761804B2 (en) | 2002-02-11 | 2004-07-13 | Applied Materials, Inc. | Inverted magnetron |
US7098667B2 (en) | 2003-12-31 | 2006-08-29 | Fei Company | Cold cathode ion gauge |
CN100555552C (zh) | 2004-07-30 | 2009-10-28 | 清华大学 | 真空规管 |
GB0722063D0 (en) | 2007-11-12 | 2007-12-19 | Edwards Ltd | Ionisation vacuum gauges and gauge heads |
JP2010151623A (ja) | 2008-12-25 | 2010-07-08 | Canon Anelva Corp | 冷陰極電離真空計およびそれに用いる放電開始補助電極板 |
JP5669411B2 (ja) | 2009-04-09 | 2015-02-12 | キヤノンアネルバ株式会社 | 冷陰極電離真空計及びそれを備えた真空処理装置並びに放電開始補助電極 |
JP5632644B2 (ja) | 2009-05-28 | 2014-11-26 | キヤノンアネルバ株式会社 | 冷陰極電離真空計、放電開始補助電極及び真空処理装置 |
JP5579038B2 (ja) | 2010-05-14 | 2014-08-27 | キヤノンアネルバ株式会社 | 冷陰極電離真空計、該冷陰極電離真空計を備えた真空処理装置、該冷陰極電離真空計に用いる放電開始補助電極、該冷陰極電離真空計を用いた圧力測定方法 |
CH705474A1 (de) | 2011-09-08 | 2013-03-15 | Inficon Gmbh | Ionisations - Vakuummesszelle. |
GB201116026D0 (en) * | 2011-09-16 | 2011-10-26 | Micromass Ltd | Performance improvements for rf-only quadrupole mass filters and linear quadrupole ion traps with axial ejection |
JP6131113B2 (ja) | 2013-06-13 | 2017-05-17 | キヤノンアネルバ株式会社 | 冷陰極電離真空計及び内壁保護部材 |
TW201520526A (zh) | 2013-09-30 | 2015-06-01 | Mks Instr Inc | 冷陰極離子化真空計 |
EP3100020B1 (de) | 2014-01-31 | 2019-01-02 | Nanotech Analysis S.r.l. | Miniaturisiertes gerät zur messung von sehr niedrigem druck und von gaskonzentrationen |
US9588004B2 (en) | 2014-11-07 | 2017-03-07 | Mks Instruments, Inc. | Long lifetime cold cathode ionization vacuum gauge design |
DE102016105222A1 (de) | 2016-03-21 | 2016-05-12 | Agilent Technologies, Inc. - A Delaware Corporation - | Kombination aus Getterpumpe und Kaltkathodendruckmesspumpe |
DE102016110495B4 (de) | 2016-06-07 | 2018-03-29 | Vacom Vakuum Komponenten & Messtechnik Gmbh | Vorrichtung und Verfahren zum Erzeugen, Speichern und Freisetzen von Ionen aus einer umgebenden Restgasatmosphäre |
CN110418953B (zh) | 2017-03-13 | 2020-09-11 | 佳能安内华股份有限公司 | 冷阴极电离真空计和冷阴极电离真空计用盒 |
US10928265B2 (en) * | 2018-05-29 | 2021-02-23 | Mks Instruments, Inc. | Gas analysis with an inverted magnetron source |
-
2019
- 2019-11-27 US US16/698,178 patent/US10948456B1/en active Active
-
2020
- 2020-11-24 KR KR1020227021256A patent/KR20220106161A/ko unknown
- 2020-11-24 CN CN202080081522.2A patent/CN114730695A/zh active Pending
- 2020-11-24 TW TW109141134A patent/TW202134618A/zh unknown
- 2020-11-24 JP JP2022530928A patent/JP2023505040A/ja active Pending
- 2020-11-24 EP EP20828885.2A patent/EP4066273A1/de active Pending
- 2020-11-24 WO PCT/US2020/062048 patent/WO2021108424A1/en unknown
-
2022
- 2022-04-18 IL IL292326A patent/IL292326A/en unknown
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