JPWO2021108424A5 - - Google Patents

Download PDF

Info

Publication number
JPWO2021108424A5
JPWO2021108424A5 JP2022530928A JP2022530928A JPWO2021108424A5 JP WO2021108424 A5 JPWO2021108424 A5 JP WO2021108424A5 JP 2022530928 A JP2022530928 A JP 2022530928A JP 2022530928 A JP2022530928 A JP 2022530928A JP WO2021108424 A5 JPWO2021108424 A5 JP WO2021108424A5
Authority
JP
Japan
Prior art keywords
ion
source
ions
deflector
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2022530928A
Other languages
English (en)
Japanese (ja)
Other versions
JP2023505040A (ja
Publication date
Priority claimed from US16/698,178 external-priority patent/US10948456B1/en
Application filed filed Critical
Publication of JP2023505040A publication Critical patent/JP2023505040A/ja
Publication of JPWO2021108424A5 publication Critical patent/JPWO2021108424A5/ja
Pending legal-status Critical Current

Links

JP2022530928A 2019-11-27 2020-11-24 イオン源を有するガス分析器システム Pending JP2023505040A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US16/698,178 2019-11-27
US16/698,178 US10948456B1 (en) 2019-11-27 2019-11-27 Gas analyzer system with ion source
PCT/US2020/062048 WO2021108424A1 (en) 2019-11-27 2020-11-24 Gas analyzer system with ion source

Publications (2)

Publication Number Publication Date
JP2023505040A JP2023505040A (ja) 2023-02-08
JPWO2021108424A5 true JPWO2021108424A5 (de) 2023-11-29

Family

ID=73943337

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022530928A Pending JP2023505040A (ja) 2019-11-27 2020-11-24 イオン源を有するガス分析器システム

Country Status (8)

Country Link
US (1) US10948456B1 (de)
EP (1) EP4066273A1 (de)
JP (1) JP2023505040A (de)
KR (1) KR20220106161A (de)
CN (1) CN114730695A (de)
IL (1) IL292326A (de)
TW (1) TW202134618A (de)
WO (1) WO2021108424A1 (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR3121220B1 (fr) * 2021-03-24 2023-05-19 Ateq Spectromètre de masse pour la détection de fuites par gaz traceur

Family Cites Families (32)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2770772A (en) 1952-07-29 1956-11-13 Int Standard Electric Corp Detection of leaks in vacuum apparatus
GB895602A (en) 1958-12-29 1962-05-02 Ici Ltd Improvements in and relating to gas discharge tubes
GB1047204A (de) 1964-05-26 1900-01-01
US3835319A (en) 1969-03-27 1974-09-10 Nat Res Corp Cold cathode ion source mass spectrometer with straight line arrangement of ion source and analyzer
AU534599B2 (en) 1978-08-25 1984-02-09 Commonwealth Scientific And Industrial Research Organisation Cold cathode ion soirce
US4542321A (en) 1982-07-12 1985-09-17 Denton Vacuum Inc Inverted magnetron ion source
US4761553A (en) * 1983-10-06 1988-08-02 The United States Of America As Represented By The United States Department Of Energy Gaseous leak detector
US4774437A (en) 1986-02-28 1988-09-27 Varian Associates, Inc. Inverted re-entrant magnetron ion source
US5089746A (en) 1989-02-14 1992-02-18 Varian Associates, Inc. Production of ion beams by chemically enhanced sputtering of solids
DE58908153D1 (de) 1989-12-08 1994-09-08 Balzer Dinoo Dr Partialdruckmesszelle mit Kaltkathodenionenquelle für die Lecksuche in Vakuumsystemen.
US5157333A (en) 1991-03-12 1992-10-20 Mks Instruments, Inc. Discharge initiating means for cold cathode discharge ionization gauge
DE69411620T2 (de) 1993-04-28 1999-02-04 Fredericks Co Ionisationswandler mit sich gegenuberliegenden Magneten
US5386115A (en) * 1993-09-22 1995-01-31 Westinghouse Electric Corporation Solid state micro-machined mass spectrograph universal gas detection sensor
US5401963A (en) * 1993-11-01 1995-03-28 Rosemount Analytical Inc. Micromachined mass spectrometer
US6761804B2 (en) 2002-02-11 2004-07-13 Applied Materials, Inc. Inverted magnetron
US7098667B2 (en) 2003-12-31 2006-08-29 Fei Company Cold cathode ion gauge
CN100555552C (zh) 2004-07-30 2009-10-28 清华大学 真空规管
GB0722063D0 (en) 2007-11-12 2007-12-19 Edwards Ltd Ionisation vacuum gauges and gauge heads
JP2010151623A (ja) 2008-12-25 2010-07-08 Canon Anelva Corp 冷陰極電離真空計およびそれに用いる放電開始補助電極板
JP5669411B2 (ja) 2009-04-09 2015-02-12 キヤノンアネルバ株式会社 冷陰極電離真空計及びそれを備えた真空処理装置並びに放電開始補助電極
JP5632644B2 (ja) 2009-05-28 2014-11-26 キヤノンアネルバ株式会社 冷陰極電離真空計、放電開始補助電極及び真空処理装置
JP5579038B2 (ja) 2010-05-14 2014-08-27 キヤノンアネルバ株式会社 冷陰極電離真空計、該冷陰極電離真空計を備えた真空処理装置、該冷陰極電離真空計に用いる放電開始補助電極、該冷陰極電離真空計を用いた圧力測定方法
CH705474A1 (de) 2011-09-08 2013-03-15 Inficon Gmbh Ionisations - Vakuummesszelle.
GB201116026D0 (en) * 2011-09-16 2011-10-26 Micromass Ltd Performance improvements for rf-only quadrupole mass filters and linear quadrupole ion traps with axial ejection
JP6131113B2 (ja) 2013-06-13 2017-05-17 キヤノンアネルバ株式会社 冷陰極電離真空計及び内壁保護部材
TW201520526A (zh) 2013-09-30 2015-06-01 Mks Instr Inc 冷陰極離子化真空計
EP3100020B1 (de) 2014-01-31 2019-01-02 Nanotech Analysis S.r.l. Miniaturisiertes gerät zur messung von sehr niedrigem druck und von gaskonzentrationen
US9588004B2 (en) 2014-11-07 2017-03-07 Mks Instruments, Inc. Long lifetime cold cathode ionization vacuum gauge design
DE102016105222A1 (de) 2016-03-21 2016-05-12 Agilent Technologies, Inc. - A Delaware Corporation - Kombination aus Getterpumpe und Kaltkathodendruckmesspumpe
DE102016110495B4 (de) 2016-06-07 2018-03-29 Vacom Vakuum Komponenten & Messtechnik Gmbh Vorrichtung und Verfahren zum Erzeugen, Speichern und Freisetzen von Ionen aus einer umgebenden Restgasatmosphäre
CN110418953B (zh) 2017-03-13 2020-09-11 佳能安内华股份有限公司 冷阴极电离真空计和冷阴极电离真空计用盒
US10928265B2 (en) * 2018-05-29 2021-02-23 Mks Instruments, Inc. Gas analysis with an inverted magnetron source

Similar Documents

Publication Publication Date Title
US6294790B1 (en) Secondary ion generator detector for time-of-flight mass spectrometry
EP1768164B1 (de) Massenspektrometer und Verfahren für Massenspektrometrie
CN101405829B (zh) 抑制非期望离子的用于示踪气体检漏的质谱仪
JP2006511912A (ja) 複数の飛行経路を有する飛行時間型質量分析器
WO1996013052A1 (en) Spatial-velocity correlation focusing in time-of-flight mass spectrometry
US5128617A (en) Ionization vacuum gauge with emission of electrons in parallel paths
US6707034B1 (en) Mass spectrometer and ion detector used therein
JPS5829578B2 (ja) シツリヨウブンセキソウチト ソノイオンセンベツソウチ
JP3392345B2 (ja) 飛行時間型質量分析装置
EP1215711A2 (de) Massenspektrometer und Vorrichtungen dafür
GB2323468A (en) Mass spectrometer total pressure collector
EP1533828B1 (de) Iondetektor
JPWO2021108424A5 (de)
KR20220106161A (ko) 이온 소스를 구비한 가스 분석기 시스템
US5034605A (en) Secondary ion mass spectrometer with independently variable extraction field
US3356843A (en) Mass spectrometer electron beam ion source having means for focusing the electron beam
Hughes et al. Ion beams from laser‐generated plasmas
EP1365437B1 (de) Massenspektrometer und Massenspektrometrieverfahren
Costa et al. The time‐of‐flight neutral particle analyzer and its calibration system for the RFX experiment
GB1210218A (en) Improvements relating to ion probe target analysis
Chishiro et al. Dependence of characteristics of Br-type magnetically insulated diode on configuration of insulating magnetic field
US2489344A (en) Mass spectrometry
JP2757460B2 (ja) 飛行時間型質量分析装置
CN113013015B (zh) 对于仪器到仪器可重复性的发射电流测量
JP3581269B2 (ja) 垂直加速型飛行時間型質量分析計