JPWO2021075039A5 - - Google Patents
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- JPWO2021075039A5 JPWO2021075039A5 JP2021552071A JP2021552071A JPWO2021075039A5 JP WO2021075039 A5 JPWO2021075039 A5 JP WO2021075039A5 JP 2021552071 A JP2021552071 A JP 2021552071A JP 2021552071 A JP2021552071 A JP 2021552071A JP WO2021075039 A5 JPWO2021075039 A5 JP WO2021075039A5
- Authority
- JP
- Japan
- Prior art keywords
- series data
- time
- period
- parameters
- data processing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000003672 processing method Methods 0.000 claims 13
- 238000005259 measurement Methods 0.000 claims 10
- 230000002159 abnormal effect Effects 0.000 claims 9
- 239000000284 extract Substances 0.000 claims 3
- 230000005856 abnormality Effects 0.000 claims 2
- 238000000605 extraction Methods 0.000 claims 2
- 230000010365 information processing Effects 0.000 claims 1
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/JP2019/041013 WO2021075039A1 (ja) | 2019-10-18 | 2019-10-18 | 時系列データ処理方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPWO2021075039A1 JPWO2021075039A1 (https=) | 2021-04-22 |
| JPWO2021075039A5 true JPWO2021075039A5 (https=) | 2022-05-30 |
| JP7315017B2 JP7315017B2 (ja) | 2023-07-26 |
Family
ID=75537359
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2021552071A Active JP7315017B2 (ja) | 2019-10-18 | 2019-10-18 | 時系列データ処理方法 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US11885720B2 (https=) |
| JP (1) | JP7315017B2 (https=) |
| WO (1) | WO2021075039A1 (https=) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7287481B2 (ja) * | 2019-10-16 | 2023-06-06 | 日本電信電話株式会社 | 閾値取得装置、その方法、およびプログラム |
| US20230280736A1 (en) * | 2022-03-02 | 2023-09-07 | Applied Materials, Inc. | Comprehensive analysis module for determining processing equipment performance |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4762088B2 (ja) * | 2006-08-31 | 2011-08-31 | 株式会社東芝 | プロセス異常診断装置 |
| WO2011036809A1 (ja) * | 2009-09-28 | 2011-03-31 | 株式会社 東芝 | 異常判定システムおよびその方法 |
| JP2014228887A (ja) * | 2013-05-17 | 2014-12-08 | 株式会社東芝 | 稼働データ分析装置およびその方法、ならびにプログラム |
| JP6564799B2 (ja) | 2017-03-03 | 2019-08-21 | 日本電信電話株式会社 | 閾値決定装置、閾値決定方法及びプログラム |
-
2019
- 2019-10-18 WO PCT/JP2019/041013 patent/WO2021075039A1/ja not_active Ceased
- 2019-10-18 US US17/764,639 patent/US11885720B2/en active Active
- 2019-10-18 JP JP2021552071A patent/JP7315017B2/ja active Active
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