JPWO2021075039A1 - - Google Patents
Info
- Publication number
- JPWO2021075039A1 JPWO2021075039A1 JP2021552071A JP2021552071A JPWO2021075039A1 JP WO2021075039 A1 JPWO2021075039 A1 JP WO2021075039A1 JP 2021552071 A JP2021552071 A JP 2021552071A JP 2021552071 A JP2021552071 A JP 2021552071A JP WO2021075039 A1 JPWO2021075039 A1 JP WO2021075039A1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M99/00—Subject matter not provided for in other groups of this subclass
- G01M99/005—Testing of complete machines, e.g. washing-machines or mobile phones
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B23/00—Testing or monitoring of control systems or parts thereof
- G05B23/02—Electric testing or monitoring
- G05B23/0205—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults
- G05B23/0218—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults characterised by the fault detection method dealing with either existing or incipient faults
- G05B23/0221—Preprocessing measurements, e.g. data collection rate adjustment; Standardization of measurements; Time series or signal analysis, e.g. frequency analysis or wavelets; Trustworthiness of measurements; Indexes therefor; Measurements using easily measured parameters to estimate parameters difficult to measure; Virtual sensor creation; De-noising; Sensor fusion; Unconventional preprocessing inherently present in specific fault detection methods like PCA-based methods
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- G—PHYSICS
- G06—COMPUTING OR CALCULATING; COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F11/00—Error detection; Error correction; Monitoring
- G06F11/07—Responding to the occurrence of a fault, e.g. fault tolerance
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Theoretical Computer Science (AREA)
- Automation & Control Theory (AREA)
- Quality & Reliability (AREA)
- General Engineering & Computer Science (AREA)
- Testing And Monitoring For Control Systems (AREA)
- Debugging And Monitoring (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/JP2019/041013 WO2021075039A1 (ja) | 2019-10-18 | 2019-10-18 | 時系列データ処理方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPWO2021075039A1 true JPWO2021075039A1 (https=) | 2021-04-22 |
| JPWO2021075039A5 JPWO2021075039A5 (https=) | 2022-05-30 |
| JP7315017B2 JP7315017B2 (ja) | 2023-07-26 |
Family
ID=75537359
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2021552071A Active JP7315017B2 (ja) | 2019-10-18 | 2019-10-18 | 時系列データ処理方法 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US11885720B2 (https=) |
| JP (1) | JP7315017B2 (https=) |
| WO (1) | WO2021075039A1 (https=) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7287481B2 (ja) * | 2019-10-16 | 2023-06-06 | 日本電信電話株式会社 | 閾値取得装置、その方法、およびプログラム |
| US20230280736A1 (en) * | 2022-03-02 | 2023-09-07 | Applied Materials, Inc. | Comprehensive analysis module for determining processing equipment performance |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008059270A (ja) * | 2006-08-31 | 2008-03-13 | Toshiba Corp | プロセス異常診断装置及びプロセス監視システム |
| WO2011036809A1 (ja) * | 2009-09-28 | 2011-03-31 | 株式会社 東芝 | 異常判定システムおよびその方法 |
| JP2014228887A (ja) * | 2013-05-17 | 2014-12-08 | 株式会社東芝 | 稼働データ分析装置およびその方法、ならびにプログラム |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6564799B2 (ja) | 2017-03-03 | 2019-08-21 | 日本電信電話株式会社 | 閾値決定装置、閾値決定方法及びプログラム |
-
2019
- 2019-10-18 WO PCT/JP2019/041013 patent/WO2021075039A1/ja not_active Ceased
- 2019-10-18 US US17/764,639 patent/US11885720B2/en active Active
- 2019-10-18 JP JP2021552071A patent/JP7315017B2/ja active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008059270A (ja) * | 2006-08-31 | 2008-03-13 | Toshiba Corp | プロセス異常診断装置及びプロセス監視システム |
| WO2011036809A1 (ja) * | 2009-09-28 | 2011-03-31 | 株式会社 東芝 | 異常判定システムおよびその方法 |
| JP2014228887A (ja) * | 2013-05-17 | 2014-12-08 | 株式会社東芝 | 稼働データ分析装置およびその方法、ならびにプログラム |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2021075039A1 (ja) | 2021-04-22 |
| US11885720B2 (en) | 2024-01-30 |
| US20220334030A1 (en) | 2022-10-20 |
| JP7315017B2 (ja) | 2023-07-26 |
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