JPWO2021069998A1 - - Google Patents

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Publication number
JPWO2021069998A1
JPWO2021069998A1 JP2021550719A JP2021550719A JPWO2021069998A1 JP WO2021069998 A1 JPWO2021069998 A1 JP WO2021069998A1 JP 2021550719 A JP2021550719 A JP 2021550719A JP 2021550719 A JP2021550719 A JP 2021550719A JP WO2021069998 A1 JPWO2021069998 A1 JP WO2021069998A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2021550719A
Other languages
Japanese (ja)
Other versions
JP7510431B2 (ja
JPWO2021069998A5 (https=
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2021069998A1 publication Critical patent/JPWO2021069998A1/ja
Publication of JPWO2021069998A5 publication Critical patent/JPWO2021069998A5/ja
Priority to JP2024100616A priority Critical patent/JP7711271B2/ja
Application granted granted Critical
Publication of JP7510431B2 publication Critical patent/JP7510431B2/ja
Priority to JP2025116148A priority patent/JP2025137576A/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C11/00Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
    • G11C11/21Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements
    • G11C11/34Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices
    • G11C11/40Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices using transistors
    • G11C11/401Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices using transistors forming cells needing refreshing or charge regeneration, i.e. dynamic cells
    • G11C11/403Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices using transistors forming cells needing refreshing or charge regeneration, i.e. dynamic cells with charge regeneration common to a multiplicity of memory cells, i.e. external refresh
    • G11C11/405Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices using transistors forming cells needing refreshing or charge regeneration, i.e. dynamic cells with charge regeneration common to a multiplicity of memory cells, i.e. external refresh with three charge-transfer gates, e.g. MOS transistors, per cell
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10BELECTRONIC MEMORY DEVICES
    • H10B12/00Dynamic random access memory [DRAM] devices
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10BELECTRONIC MEMORY DEVICES
    • H10B69/00Erasable-and-programmable ROM [EPROM] devices not provided for in groups H10B41/00 - H10B63/00, e.g. ultraviolet erasable-and-programmable ROM [UVEPROM] devices
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00Field-effect transistors [FET]
    • H10D30/60Insulated-gate field-effect transistors [IGFET]
    • H10D30/67Thin-film transistors [TFT]
    • H10D30/6729Thin-film transistors [TFT] characterised by the electrodes
    • H10D30/673Thin-film transistors [TFT] characterised by the electrodes characterised by the shapes, relative sizes or dispositions of the gate electrodes
    • H10D30/6733Multi-gate TFTs
    • H10D30/6734Multi-gate TFTs having gate electrodes arranged on both top and bottom sides of the channel, e.g. dual-gate TFTs
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00Field-effect transistors [FET]
    • H10D30/60Insulated-gate field-effect transistors [IGFET]
    • H10D30/67Thin-film transistors [TFT]
    • H10D30/674Thin-film transistors [TFT] characterised by the active materials
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00Field-effect transistors [FET]
    • H10D30/60Insulated-gate field-effect transistors [IGFET]
    • H10D30/67Thin-film transistors [TFT]
    • H10D30/674Thin-film transistors [TFT] characterised by the active materials
    • H10D30/6755Oxide semiconductors, e.g. zinc oxide, copper aluminium oxide or cadmium stannate
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H10D86/40Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs
    • H10D86/421Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs having a particular composition, shape or crystalline structure of the active layer
    • H10D86/423Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs having a particular composition, shape or crystalline structure of the active layer comprising semiconductor materials not belonging to the Group IV, e.g. InGaZnO
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H10D86/40Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs
    • H10D86/441Interconnections, e.g. scanning lines
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H10D86/40Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs
    • H10D86/481Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs integrated with passive devices, e.g. auxiliary capacitors
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H10D86/40Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs
    • H10D86/60Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs wherein the TFTs are in active matrices
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D87/00Integrated devices comprising both bulk components and either SOI or SOS components on the same substrate

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Semiconductor Memories (AREA)
  • Thin Film Transistor (AREA)
  • Dram (AREA)
JP2021550719A 2019-10-11 2020-09-25 記憶装置 Active JP7510431B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2024100616A JP7711271B2 (ja) 2019-10-11 2024-06-21 記憶装置
JP2025116148A JP2025137576A (ja) 2019-10-11 2025-07-09 記憶装置

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2019187386 2019-10-11
JP2019187386 2019-10-11
PCT/IB2020/058976 WO2021069998A1 (ja) 2019-10-11 2020-09-25 記憶装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2024100616A Division JP7711271B2 (ja) 2019-10-11 2024-06-21 記憶装置

Publications (3)

Publication Number Publication Date
JPWO2021069998A1 true JPWO2021069998A1 (https=) 2021-04-15
JPWO2021069998A5 JPWO2021069998A5 (https=) 2023-07-26
JP7510431B2 JP7510431B2 (ja) 2024-07-03

Family

ID=75438027

Family Applications (3)

Application Number Title Priority Date Filing Date
JP2021550719A Active JP7510431B2 (ja) 2019-10-11 2020-09-25 記憶装置
JP2024100616A Active JP7711271B2 (ja) 2019-10-11 2024-06-21 記憶装置
JP2025116148A Pending JP2025137576A (ja) 2019-10-11 2025-07-09 記憶装置

Family Applications After (2)

Application Number Title Priority Date Filing Date
JP2024100616A Active JP7711271B2 (ja) 2019-10-11 2024-06-21 記憶装置
JP2025116148A Pending JP2025137576A (ja) 2019-10-11 2025-07-09 記憶装置

Country Status (5)

Country Link
US (1) US12082391B2 (https=)
JP (3) JP7510431B2 (https=)
KR (1) KR20220079567A (https=)
CN (1) CN114503202A (https=)
WO (1) WO2021069998A1 (https=)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7195068B2 (ja) * 2017-06-26 2022-12-23 株式会社半導体エネルギー研究所 半導体装置、電子機器
US11984165B2 (en) 2022-05-24 2024-05-14 Taiwan Semiconductor Manufacturing Company, Ltd. Memory device with reduced area
CN116209253B (zh) * 2022-09-23 2024-02-20 北京超弦存储器研究院 存储单元、动态存储器、其读取方法及电子设备
US20250086443A1 (en) * 2023-09-11 2025-03-13 Macronix International Co., Ltd. Universal memories for in-memory computing
WO2025109451A1 (ja) * 2023-11-24 2025-05-30 株式会社半導体エネルギー研究所 半導体装置及び記憶装置
CN119418747A (zh) * 2024-11-08 2025-02-11 华中科技大学 一种动态存储器结构及其操作方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016115387A (ja) * 2014-12-11 2016-06-23 株式会社半導体エネルギー研究所 半導体装置、記憶装置及び電子機器
JP2017168809A (ja) * 2015-10-22 2017-09-21 株式会社半導体エネルギー研究所 半導体装置、又は該半導体装置を有する記憶装置
JP2019008862A (ja) * 2017-06-26 2019-01-17 株式会社半導体エネルギー研究所 半導体装置、電子機器

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1998373A3 (en) 2005-09-29 2012-10-31 Semiconductor Energy Laboratory Co, Ltd. Semiconductor device having oxide semiconductor layer and manufacturing method thereof
JP5064747B2 (ja) 2005-09-29 2012-10-31 株式会社半導体エネルギー研究所 半導体装置、電気泳動表示装置、表示モジュール、電子機器、及び半導体装置の作製方法
KR101870119B1 (ko) 2009-12-25 2018-06-25 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치
KR101891065B1 (ko) 2010-03-19 2018-08-24 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치 및 반도체 장치 구동 방법
KR101853516B1 (ko) * 2010-07-27 2018-04-30 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치
US9978879B2 (en) * 2016-08-31 2018-05-22 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device
JP6693907B2 (ja) 2017-06-08 2020-05-13 株式会社半導体エネルギー研究所 半導体装置、記憶装置、及び電子機器

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016115387A (ja) * 2014-12-11 2016-06-23 株式会社半導体エネルギー研究所 半導体装置、記憶装置及び電子機器
JP2017168809A (ja) * 2015-10-22 2017-09-21 株式会社半導体エネルギー研究所 半導体装置、又は該半導体装置を有する記憶装置
JP2019008862A (ja) * 2017-06-26 2019-01-17 株式会社半導体エネルギー研究所 半導体装置、電子機器

Also Published As

Publication number Publication date
WO2021069998A1 (ja) 2021-04-15
KR20220079567A (ko) 2022-06-13
US20220344334A1 (en) 2022-10-27
JP7510431B2 (ja) 2024-07-03
JP2025137576A (ja) 2025-09-19
JP2024117815A (ja) 2024-08-29
US12082391B2 (en) 2024-09-03
JP7711271B2 (ja) 2025-07-22
CN114503202A (zh) 2022-05-13

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