JPWO2021066075A1 - - Google Patents
Info
- Publication number
- JPWO2021066075A1 JPWO2021066075A1 JP2021551426A JP2021551426A JPWO2021066075A1 JP WO2021066075 A1 JPWO2021066075 A1 JP WO2021066075A1 JP 2021551426 A JP2021551426 A JP 2021551426A JP 2021551426 A JP2021551426 A JP 2021551426A JP WO2021066075 A1 JPWO2021066075 A1 JP WO2021066075A1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/34—Accessories
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/27—Work carriers
- B24B37/28—Work carriers for double side lapping of plane surfaces
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
VN1201905355 | 2019-09-30 | ||
VN1-2019-05355 | 2019-09-30 | ||
PCT/JP2020/037328 WO2021066075A1 (ja) | 2019-09-30 | 2020-09-30 | 基板配置支援治具及び基板の製造方法 |
Publications (3)
Publication Number | Publication Date |
---|---|
JPWO2021066075A1 true JPWO2021066075A1 (ja) | 2021-04-08 |
JPWO2021066075A5 JPWO2021066075A5 (ja) | 2022-10-05 |
JP7291795B2 JP7291795B2 (ja) | 2023-06-15 |
Family
ID=81595362
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2021551426A Active JP7291795B2 (ja) | 2019-09-30 | 2020-09-30 | 基板配置支援治具及び基板の製造方法 |
Country Status (2)
Country | Link |
---|---|
JP (1) | JP7291795B2 (ja) |
CN (1) | CN114521161B (ja) |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH10225841A (ja) * | 1997-02-17 | 1998-08-25 | Suwa Kikai Seisakusho:Kk | ワークの装着治具 |
JP2000135672A (ja) * | 1998-10-30 | 2000-05-16 | Murata Mfg Co Ltd | ラップキャリアにワークを充填する治具 |
JP2012076191A (ja) * | 2010-10-04 | 2012-04-19 | Asahi Glass Co Ltd | 被研磨体装填治具及び被研磨体の研磨方法及び磁気ディスク用ガラス基板の製造方法 |
JP2014063543A (ja) * | 2012-09-20 | 2014-04-10 | Konica Minolta Inc | 情報記録媒体用ガラス基板の製造方法 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000288921A (ja) * | 1999-03-31 | 2000-10-17 | Hoya Corp | 研磨用キャリア及び研磨方法並びに情報記録媒体用基板の製造方法 |
JP5613723B2 (ja) * | 2012-06-19 | 2014-10-29 | 昭和電工株式会社 | キャリアプレートおよび円盤状基板の製造方法、円盤状基板の両面加工装置 |
JP5983422B2 (ja) * | 2013-01-21 | 2016-08-31 | 旭硝子株式会社 | ガラス基板の研磨方法及び製造方法 |
JP6101175B2 (ja) * | 2013-08-28 | 2017-03-22 | Sumco Techxiv株式会社 | 半導体ウェーハの研磨方法 |
JP2015069665A (ja) * | 2013-09-27 | 2015-04-13 | Hoya株式会社 | 磁気ディスク用ガラス基板の製造方法 |
JP2015123553A (ja) * | 2013-12-26 | 2015-07-06 | Hoya株式会社 | キャリア、キャリアの製造方法、および磁気ディスク用ガラス基板の製造方法 |
JP5982427B2 (ja) * | 2014-06-09 | 2016-08-31 | 昭和電工株式会社 | 両面加工装置に用いられるキャリアプレート |
-
2020
- 2020-09-30 CN CN202080067872.3A patent/CN114521161B/zh active Active
- 2020-09-30 JP JP2021551426A patent/JP7291795B2/ja active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH10225841A (ja) * | 1997-02-17 | 1998-08-25 | Suwa Kikai Seisakusho:Kk | ワークの装着治具 |
JP2000135672A (ja) * | 1998-10-30 | 2000-05-16 | Murata Mfg Co Ltd | ラップキャリアにワークを充填する治具 |
JP2012076191A (ja) * | 2010-10-04 | 2012-04-19 | Asahi Glass Co Ltd | 被研磨体装填治具及び被研磨体の研磨方法及び磁気ディスク用ガラス基板の製造方法 |
JP2014063543A (ja) * | 2012-09-20 | 2014-04-10 | Konica Minolta Inc | 情報記録媒体用ガラス基板の製造方法 |
Also Published As
Publication number | Publication date |
---|---|
CN114521161A (zh) | 2022-05-20 |
CN114521161B (zh) | 2023-06-20 |
JP7291795B2 (ja) | 2023-06-15 |
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