JPWO2021066075A1 - - Google Patents

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Publication number
JPWO2021066075A1
JPWO2021066075A1 JP2021551426A JP2021551426A JPWO2021066075A1 JP WO2021066075 A1 JPWO2021066075 A1 JP WO2021066075A1 JP 2021551426 A JP2021551426 A JP 2021551426A JP 2021551426 A JP2021551426 A JP 2021551426A JP WO2021066075 A1 JPWO2021066075 A1 JP WO2021066075A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2021551426A
Other versions
JPWO2021066075A5 (ja
JP7291795B2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
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Priority claimed from PCT/JP2020/037328 external-priority patent/WO2021066075A1/ja
Publication of JPWO2021066075A1 publication Critical patent/JPWO2021066075A1/ja
Publication of JPWO2021066075A5 publication Critical patent/JPWO2021066075A5/ja
Application granted granted Critical
Publication of JP7291795B2 publication Critical patent/JP7291795B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/34—Accessories
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/27—Work carriers
    • B24B37/28—Work carriers for double side lapping of plane surfaces

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
JP2021551426A 2019-09-30 2020-09-30 基板配置支援治具及び基板の製造方法 Active JP7291795B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
VN1201905355 2019-09-30
VN1-2019-05355 2019-09-30
PCT/JP2020/037328 WO2021066075A1 (ja) 2019-09-30 2020-09-30 基板配置支援治具及び基板の製造方法

Publications (3)

Publication Number Publication Date
JPWO2021066075A1 true JPWO2021066075A1 (ja) 2021-04-08
JPWO2021066075A5 JPWO2021066075A5 (ja) 2022-10-05
JP7291795B2 JP7291795B2 (ja) 2023-06-15

Family

ID=81595362

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021551426A Active JP7291795B2 (ja) 2019-09-30 2020-09-30 基板配置支援治具及び基板の製造方法

Country Status (2)

Country Link
JP (1) JP7291795B2 (ja)
CN (1) CN114521161B (ja)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10225841A (ja) * 1997-02-17 1998-08-25 Suwa Kikai Seisakusho:Kk ワークの装着治具
JP2000135672A (ja) * 1998-10-30 2000-05-16 Murata Mfg Co Ltd ラップキャリアにワークを充填する治具
JP2012076191A (ja) * 2010-10-04 2012-04-19 Asahi Glass Co Ltd 被研磨体装填治具及び被研磨体の研磨方法及び磁気ディスク用ガラス基板の製造方法
JP2014063543A (ja) * 2012-09-20 2014-04-10 Konica Minolta Inc 情報記録媒体用ガラス基板の製造方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000288921A (ja) * 1999-03-31 2000-10-17 Hoya Corp 研磨用キャリア及び研磨方法並びに情報記録媒体用基板の製造方法
JP5613723B2 (ja) * 2012-06-19 2014-10-29 昭和電工株式会社 キャリアプレートおよび円盤状基板の製造方法、円盤状基板の両面加工装置
JP5983422B2 (ja) * 2013-01-21 2016-08-31 旭硝子株式会社 ガラス基板の研磨方法及び製造方法
JP6101175B2 (ja) * 2013-08-28 2017-03-22 Ｓｕｍｃｏ Ｔｅｃｈｘｉｖ株式会社 半導体ウェーハの研磨方法
JP2015069665A (ja) * 2013-09-27 2015-04-13 Hoya株式会社 磁気ディスク用ガラス基板の製造方法
JP2015123553A (ja) * 2013-12-26 2015-07-06 Hoya株式会社 キャリア、キャリアの製造方法、および磁気ディスク用ガラス基板の製造方法
JP5982427B2 (ja) * 2014-06-09 2016-08-31 昭和電工株式会社 両面加工装置に用いられるキャリアプレート

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10225841A (ja) * 1997-02-17 1998-08-25 Suwa Kikai Seisakusho:Kk ワークの装着治具
JP2000135672A (ja) * 1998-10-30 2000-05-16 Murata Mfg Co Ltd ラップキャリアにワークを充填する治具
JP2012076191A (ja) * 2010-10-04 2012-04-19 Asahi Glass Co Ltd 被研磨体装填治具及び被研磨体の研磨方法及び磁気ディスク用ガラス基板の製造方法
JP2014063543A (ja) * 2012-09-20 2014-04-10 Konica Minolta Inc 情報記録媒体用ガラス基板の製造方法

Also Published As

Publication number Publication date
CN114521161A (zh) 2022-05-20
CN114521161B (zh) 2023-06-20
JP7291795B2 (ja) 2023-06-15

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