JPWO2020209327A5 - - Google Patents

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JPWO2020209327A5
JPWO2020209327A5 JP2021513697A JP2021513697A JPWO2020209327A5 JP WO2020209327 A5 JPWO2020209327 A5 JP WO2020209327A5 JP 2021513697 A JP2021513697 A JP 2021513697A JP 2021513697 A JP2021513697 A JP 2021513697A JP WO2020209327 A5 JPWO2020209327 A5 JP WO2020209327A5
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compound
bifunctional
reacting
compounds
prepared
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JP2021513697A
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JPWO2020209327A1 (https=
JP7563379B2 (ja
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Priority claimed from PCT/JP2020/015948 external-priority patent/WO2020209327A1/ja
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JP2021513697A 2019-04-11 2020-04-09 ヒドロキシアリール基末端の重合体を含む薬液耐性保護膜形成組成物 Active JP7563379B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2019075867 2019-04-11
JP2019075867 2019-04-11
PCT/JP2020/015948 WO2020209327A1 (ja) 2019-04-11 2020-04-09 ヒドロキシアリール基末端の重合体を含む薬液耐性保護膜形成組成物

Publications (3)

Publication Number Publication Date
JPWO2020209327A1 JPWO2020209327A1 (https=) 2020-10-15
JPWO2020209327A5 true JPWO2020209327A5 (https=) 2023-03-31
JP7563379B2 JP7563379B2 (ja) 2024-10-08

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JP2021513697A Active JP7563379B2 (ja) 2019-04-11 2020-04-09 ヒドロキシアリール基末端の重合体を含む薬液耐性保護膜形成組成物

Country Status (6)

Country Link
US (2) US11965059B2 (https=)
JP (1) JP7563379B2 (https=)
KR (1) KR102915292B1 (https=)
CN (1) CN113646352B (https=)
TW (1) TWI846857B (https=)
WO (1) WO2020209327A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2026023597A1 (ja) * 2024-07-23 2026-01-29 日産化学株式会社 保護膜形成用組成物、保護膜、基板の製造方法及び半導体装置の製造方法

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6443521A (en) * 1987-08-10 1989-02-15 Toray Industries Epoxy resin
JPH06128360A (ja) 1992-10-14 1994-05-10 Matsushita Electric Works Ltd 液状エポキシ樹脂組成物
WO2009104685A1 (ja) 2008-02-21 2009-08-27 日産化学工業株式会社 レジスト下層膜形成組成物及びそれを用いたレジストパターンの形成方法
JP5522415B2 (ja) * 2009-07-07 2014-06-18 日産化学工業株式会社 レジスト下層膜形成組成物及びそれを用いたレジストパターンの形成方法
CN103415809B (zh) * 2011-03-15 2017-03-15 日产化学工业株式会社 形成抗蚀剂下层膜的组合物及使用该组合物的抗蚀剂图案的形成方法
KR102156732B1 (ko) * 2014-04-25 2020-09-16 닛산 가가쿠 가부시키가이샤 레지스트 하층막 형성 조성물 및 이것을 이용한 레지스트 패턴의 형성방법
JP6372887B2 (ja) 2015-05-14 2018-08-15 信越化学工業株式会社 有機膜材料、有機膜形成方法、パターン形成方法、及び化合物
KR102409417B1 (ko) 2016-05-02 2022-06-15 닛산 가가쿠 가부시키가이샤 특정 가교제를 포함하는 보호막 형성 조성물 및 이것을 이용한 패턴 형성 방법
TWI758326B (zh) * 2016-09-16 2022-03-21 日商日產化學工業股份有限公司 保護膜形成組成物
KR20190140998A (ko) * 2017-05-02 2019-12-20 닛산 가가쿠 가부시키가이샤 과산화수소수용액에 대한 보호막형성 조성물
JP7268684B2 (ja) * 2018-10-05 2023-05-08 日産化学株式会社 レジスト下層膜形成組成物及びそれを用いたレジストパターンの形成方法

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