JPWO2020159730A5 - - Google Patents

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JPWO2020159730A5
JPWO2020159730A5 JP2021544540A JP2021544540A JPWO2020159730A5 JP WO2020159730 A5 JPWO2020159730 A5 JP WO2020159730A5 JP 2021544540 A JP2021544540 A JP 2021544540A JP 2021544540 A JP2021544540 A JP 2021544540A JP WO2020159730 A5 JPWO2020159730 A5 JP WO2020159730A5
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failure
sensor data
index value
components
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JP2022523101A (ja
JP7238146B2 (ja
JP2022523101A5 (https=
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JP2021544540A 2019-01-31 2020-01-17 イオン注入半導体製造ツールにおける構成要素の故障の是正 Active JP7238146B2 (ja)

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JP2023030851A JP7472344B2 (ja) 2019-01-31 2023-03-01 イオン注入半導体製造ツールにおける構成要素の故障の是正

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Application Number Priority Date Filing Date Title
US16/264,034 US11348813B2 (en) 2019-01-31 2019-01-31 Correcting component failures in ion implant semiconductor manufacturing tool
US16/264,034 2019-01-31
PCT/US2020/014197 WO2020159730A1 (en) 2019-01-31 2020-01-17 Correcting component failures in ion implant semiconductor manufacturing tool

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JP2022523101A JP2022523101A (ja) 2022-04-21
JPWO2020159730A5 true JPWO2020159730A5 (https=) 2022-08-04
JP2022523101A5 JP2022523101A5 (https=) 2022-08-04
JP7238146B2 JP7238146B2 (ja) 2023-03-13

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JP2021544540A Active JP7238146B2 (ja) 2019-01-31 2020-01-17 イオン注入半導体製造ツールにおける構成要素の故障の是正
JP2023030851A Active JP7472344B2 (ja) 2019-01-31 2023-03-01 イオン注入半導体製造ツールにおける構成要素の故障の是正

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US (2) US11348813B2 (https=)
JP (2) JP7238146B2 (https=)
KR (2) KR102539586B1 (https=)
CN (2) CN113383282B (https=)
TW (2) TWI797418B (https=)
WO (1) WO2020159730A1 (https=)

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