JPWO2020094608A5 - - Google Patents

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Publication number
JPWO2020094608A5
JPWO2020094608A5 JP2021523712A JP2021523712A JPWO2020094608A5 JP WO2020094608 A5 JPWO2020094608 A5 JP WO2020094608A5 JP 2021523712 A JP2021523712 A JP 2021523712A JP 2021523712 A JP2021523712 A JP 2021523712A JP WO2020094608 A5 JPWO2020094608 A5 JP WO2020094608A5
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JP
Japan
Prior art keywords
guide
probe head
holes
guide holes
guides
Prior art date
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Granted
Application number
JP2021523712A
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English (en)
Japanese (ja)
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JP7470114B2 (ja
JP2022506377A (ja
Publication date
Priority claimed from IT102018000010071A external-priority patent/IT201800010071A1/it
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Publication of JP2022506377A publication Critical patent/JP2022506377A/ja
Publication of JPWO2020094608A5 publication Critical patent/JPWO2020094608A5/ja
Application granted granted Critical
Publication of JP7470114B2 publication Critical patent/JP7470114B2/ja
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JP2021523712A 2018-11-06 2019-11-05 被試験デバイスに対する改善された接触特性を有する垂直プローブヘッド Active JP7470114B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
IT102018000010071 2018-11-06
IT102018000010071A IT201800010071A1 (it) 2018-11-06 2018-11-06 Testa di misura a sonde verticali con migliorate proprietà di contatto con un dispositivo di test
PCT/EP2019/080171 WO2020094608A1 (en) 2018-11-06 2019-11-05 Vertical probe head with improved contact properties towards a device under test

Publications (3)

Publication Number Publication Date
JP2022506377A JP2022506377A (ja) 2022-01-17
JPWO2020094608A5 true JPWO2020094608A5 (it) 2022-10-21
JP7470114B2 JP7470114B2 (ja) 2024-04-17

Family

ID=65409291

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021523712A Active JP7470114B2 (ja) 2018-11-06 2019-11-05 被試験デバイスに対する改善された接触特性を有する垂直プローブヘッド

Country Status (10)

Country Link
US (1) US12085588B2 (it)
EP (1) EP3877768A1 (it)
JP (1) JP7470114B2 (it)
KR (1) KR20210089206A (it)
CN (1) CN113039444A (it)
IT (1) IT201800010071A1 (it)
PH (1) PH12021550959A1 (it)
SG (1) SG11202104299SA (it)
TW (1) TWI837207B (it)
WO (1) WO2020094608A1 (it)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT202200026214A1 (it) * 2022-12-21 2024-06-21 Technoprobe S P A Testa di misura a sonde verticali perfezionata

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6411112B1 (en) * 1998-02-19 2002-06-25 International Business Machines Corporation Off-axis contact tip and dense packing design for a fine pitch probe
JP3942823B2 (ja) * 2000-12-28 2007-07-11 山一電機株式会社 検査装置
FR2860347A1 (fr) * 2003-09-29 2005-04-01 Probest Connecteur electrique a au moins deux contacts
JP2007127488A (ja) * 2005-11-02 2007-05-24 Rika Denshi Co Ltd プローブカード
US8723546B2 (en) * 2007-10-19 2014-05-13 Microprobe, Inc. Vertical guided layered probe
EP2107380A1 (en) * 2008-04-01 2009-10-07 Technoprobe S.p.A Testing head having vertical probes configured to improve the electric contact with a device to be tested
JP2009276097A (ja) 2008-05-12 2009-11-26 Nidec-Read Corp 基板検査治具
TWI435083B (zh) * 2010-07-27 2014-04-21 Mpi Corp Combination probe head for vertical probe card and its assembly alignment method
JP6305754B2 (ja) * 2013-12-20 2018-04-04 東京特殊電線株式会社 コンタクトプローブユニット
WO2016108520A1 (ko) * 2015-01-04 2016-07-07 김일 검사접촉장치
KR102536001B1 (ko) * 2015-03-13 2023-05-24 테크노프로브 에스.피.에이. 특히 고주파 응용을 위한 수직형 프로브를 구비한 테스트 헤드
JP5822042B1 (ja) 2015-03-27 2015-11-24 日本電産リード株式会社 検査治具、基板検査装置、及び検査治具の製造方法
WO2016156002A1 (en) * 2015-03-31 2016-10-06 Technoprobe S.P.A. Contact probe and corresponding testing head with vertical probes, particularly for high frequency applications
JP6820277B2 (ja) 2015-05-07 2021-01-27 テクノプローベ エス．ピー．エー． 特に低減ピッチ用途のための、垂直プローブを有するテストヘッド
US10866266B2 (en) * 2015-10-29 2020-12-15 Taiwan Semiconductor Manufacturing Company Ltd. Probe head receiver and probe card assembly having the same
KR101886536B1 (ko) * 2016-12-27 2018-08-07 주식회사 텝스 접촉력을 조절할 수 있는 스트레이트 니들 프로브 카드
IT201700046645A1 (it) * 2017-04-28 2018-10-28 Technoprobe Spa Scheda di misura per un’apparecchiatura di test di dispositivi elettronici
WO2019129585A1 (en) * 2017-12-28 2019-07-04 Technoprobe S.P.A. Probe head having vertical probes with respectively opposite scrub directions

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