JPWO2020060957A5 - - Google Patents

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Publication number
JPWO2020060957A5
JPWO2020060957A5 JP2021512531A JP2021512531A JPWO2020060957A5 JP WO2020060957 A5 JPWO2020060957 A5 JP WO2020060957A5 JP 2021512531 A JP2021512531 A JP 2021512531A JP 2021512531 A JP2021512531 A JP 2021512531A JP WO2020060957 A5 JPWO2020060957 A5 JP WO2020060957A5
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JP
Japan
Prior art keywords
fluid
port
flow
monitoring module
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2021512531A
Other languages
English (en)
Japanese (ja)
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JP2021536577A (ja
Publication date
Application filed filed Critical
Priority claimed from PCT/US2019/051375 external-priority patent/WO2020060957A1/en
Publication of JP2021536577A publication Critical patent/JP2021536577A/ja
Publication of JPWO2020060957A5 publication Critical patent/JPWO2020060957A5/ja
Pending legal-status Critical Current

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JP2021512531A 2018-09-18 2019-09-17 流体監視モジュール構造 Pending JP2021536577A (ja)

Applications Claiming Priority (13)

Application Number Priority Date Filing Date Title
US201862732848P 2018-09-18 2018-09-18
US62/732,848 2018-09-18
US201862775066P 2018-12-04 2018-12-04
US62/775,066 2018-12-04
US201962844399P 2019-05-07 2019-05-07
US201962844383P 2019-05-07 2019-05-07
US201962844390P 2019-05-07 2019-05-07
US62/844,399 2019-05-07
US62/844,390 2019-05-07
US62/844,383 2019-05-07
US201962895115P 2019-09-03 2019-09-03
US62/895,115 2019-09-03
PCT/US2019/051375 WO2020060957A1 (en) 2018-09-18 2019-09-17 Fluid monitoring module arrangements

Publications (2)

Publication Number Publication Date
JP2021536577A JP2021536577A (ja) 2021-12-27
JPWO2020060957A5 true JPWO2020060957A5 (zh) 2022-09-14

Family

ID=69773863

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021512531A Pending JP2021536577A (ja) 2018-09-18 2019-09-17 流体監視モジュール構造

Country Status (8)

Country Link
US (3) US10890474B2 (zh)
EP (1) EP3853563A1 (zh)
JP (1) JP2021536577A (zh)
KR (1) KR20210060450A (zh)
CN (1) CN112673239A (zh)
IL (1) IL281610A (zh)
TW (1) TW202012888A (zh)
WO (1) WO2020060957A1 (zh)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
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US12000723B2 (en) 2022-02-18 2024-06-04 Mks Instruments, Inc. Method and apparatus for pressure based mass flow control

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