JPWO2020027075A1 - 複合基板、圧電素子および複合基板の製造方法 - Google Patents
複合基板、圧電素子および複合基板の製造方法 Download PDFInfo
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- 239000000758 substrate Substances 0.000 title claims abstract description 182
- 239000002131 composite material Substances 0.000 title claims abstract description 50
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 12
- 229910052594 sapphire Inorganic materials 0.000 claims abstract description 78
- 239000010980 sapphire Substances 0.000 claims abstract description 78
- 238000000034 method Methods 0.000 claims abstract description 25
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims abstract description 8
- 239000001301 oxygen Substances 0.000 claims abstract description 8
- 229910052760 oxygen Inorganic materials 0.000 claims abstract description 8
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims abstract description 7
- 229910052782 aluminium Inorganic materials 0.000 claims abstract description 7
- 238000005304 joining Methods 0.000 claims abstract description 7
- 239000001257 hydrogen Substances 0.000 claims description 14
- 229910052739 hydrogen Inorganic materials 0.000 claims description 14
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 12
- 125000004430 oxygen atom Chemical group O* 0.000 claims description 11
- AZDRQVAHHNSJOQ-UHFFFAOYSA-N alumane Chemical group [AlH3] AZDRQVAHHNSJOQ-UHFFFAOYSA-N 0.000 claims description 9
- 125000004429 atom Chemical group 0.000 claims description 9
- 239000013078 crystal Substances 0.000 claims description 9
- WSMQKESQZFQMFW-UHFFFAOYSA-N 5-methyl-pyrazole-3-carboxylic acid Chemical compound CC1=CC(C(O)=O)=NN1 WSMQKESQZFQMFW-UHFFFAOYSA-N 0.000 claims description 5
- 239000000463 material Substances 0.000 claims description 5
- 230000008569 process Effects 0.000 claims description 5
- 238000010897 surface acoustic wave method Methods 0.000 claims description 5
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 claims description 4
- 238000005520 cutting process Methods 0.000 claims description 3
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 claims description 3
- 239000010453 quartz Substances 0.000 claims description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 2
- 239000011787 zinc oxide Substances 0.000 claims description 2
- 206010021143 Hypoxia Diseases 0.000 description 12
- 238000009792 diffusion process Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000004833 X-ray photoelectron spectroscopy Methods 0.000 description 2
- 230000004913 activation Effects 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 230000017525 heat dissipation Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- -1 hydrogen ions Chemical class 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 239000010410 layer Substances 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 238000001004 secondary ion mass spectrometry Methods 0.000 description 2
- 238000009489 vacuum treatment Methods 0.000 description 2
- 238000005231 Edge Defined Film Fed Growth Methods 0.000 description 1
- 244000126211 Hericium coralloides Species 0.000 description 1
- 239000012790 adhesive layer Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 208000037265 diseases, disorders, signs and symptoms Diseases 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000009832 plasma treatment Methods 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
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- C30B33/00—After-treatment of single crystals or homogeneous polycrystalline material with defined structure
- C30B33/06—Joining of crystals
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02535—Details of surface acoustic wave devices
- H03H9/02543—Characteristics of substrate, e.g. cutting angles
- H03H9/02574—Characteristics of substrate, e.g. cutting angles of combined substrates, multilayered substrates, piezoelectrical layers on not-piezoelectrical substrate
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
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- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/16—Oxides
- C30B29/20—Aluminium oxides
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/08—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of resonators or networks using surface acoustic waves
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02535—Details of surface acoustic wave devices
- H03H9/02543—Characteristics of substrate, e.g. cutting angles
- H03H9/02559—Characteristics of substrate, e.g. cutting angles of lithium niobate or lithium-tantalate substrates
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- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/07—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base
- H10N30/072—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by laminating or bonding of piezoelectric or electrostrictive bodies
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- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/704—Piezoelectric or electrostrictive devices based on piezoelectric or electrostrictive films or coatings
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Abstract
Description
図1に、本開示の一実施形態に係る複合基板1の概略断面図を示す。複合基板1は、圧電基板2とサファイア基板3とが直接接合された複合基板である。サファイア基板3の圧電基板2と接合されている接合面3aを含む接合面領域3cにおける、アルミニウムの原子数に対する酸素の原子数の比が1.5よりも小さい。本開示の圧電素子は、複合基板1を備える。本開示において、接合面領域3cは、第3面3aから少なくとも数原子層以上の領域を含む。
圧電基板2の第1面2aには素子電極が形成され、表面弾性波素子などの圧電素子用の複合基板1として用いられる。
図2Aおよび図2Bに、本開示の複合基板の製造方法の概略説明図を示す。本開示の複合基板の製造方法は圧電基板2とサファイア基板3を準備する工程(図2A)と、サファイア基板3を還元雰囲気または真空中で熱処理する工程と、圧電基板2とサファイア基板3とを直接接合する工程(図2B)とを備える。
2 :圧電基板
2a:第1面(素子形成面)
2b:第2面(圧電基板の接合面)
3 :サファイア基板
3a:第3面(サファイア基板の接合面)
3b:第4面(裏面)
3c:接合面領域
3d:バルク領域
Claims (8)
- 圧電基板とサファイア基板とが直接接合された複合基板であって、
前記サファイア基板の前記圧電基板と接合されている接合面を含む接合面領域におけるアルミニウムの原子数に対する酸素の原子数の比が1.5よりも小さい、複合基板。 - 前記サファイア基板の前記接合面領域におけるアルミニウムの原子数に対する酸素の原子数の比が、前記サファイア基板のバルク領域におけるアルミニウムに対する酸素の原子比よりも小さい、請求項1に記載の複合基板。
- 前記サファイア基板の前記接合面領域における水素濃度が1×1016atoms/cm3以下である、請求項1または2に記載の複合基板。
- 前記圧電基板は、タンタル酸リチウム、ニオブ酸リチウム、酸化亜鉛、水晶から選ばれる圧電性を有する材料からなる請求項1から3のいずれかに記載の複合基板。
- 請求項1から4のいずれかに記載の前記複合基板を備える、圧電素子。
- 表面弾性波素子である、請求項5に記載の圧電素子。
- 圧電基板とサファイア基板を準備する工程と、
前記サファイア基板を還元雰囲気または真空中で熱処理する工程と、
前記圧電基板と前記サファイア基板とを直接接合する工程とを備える、複合基板の製造方法。 - 圧電基板を準備する工程と、
サファイア結晶体を還元雰囲気中で育成または熱処理する工程と、
前記サファイア結晶体を切断してサファイア基板を作製する工程と、
前記圧電基板と前記サファイア基板とを直接接合する工程とを備える、複合基板の製造方法。
Applications Claiming Priority (3)
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JP2018145112 | 2018-08-01 | ||
JP2018145112 | 2018-08-01 | ||
PCT/JP2019/029720 WO2020027075A1 (ja) | 2018-08-01 | 2019-07-29 | 複合基板、圧電素子および複合基板の製造方法 |
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JPWO2020027075A1 true JPWO2020027075A1 (ja) | 2021-09-09 |
JP7085000B2 JP7085000B2 (ja) | 2022-06-15 |
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JP2020533549A Active JP7085000B2 (ja) | 2018-08-01 | 2019-07-29 | 複合基板、圧電素子および複合基板の製造方法 |
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EP (1) | EP3831988A4 (ja) |
JP (1) | JP7085000B2 (ja) |
CN (1) | CN112534089B (ja) |
TW (1) | TWI706632B (ja) |
WO (1) | WO2020027075A1 (ja) |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004343359A (ja) * | 2003-05-14 | 2004-12-02 | Fujitsu Media Device Kk | 弾性表面波素子の製造方法 |
WO2017134980A1 (ja) * | 2016-02-02 | 2017-08-10 | 信越化学工業株式会社 | 複合基板および複合基板の製造方法 |
JP2017200101A (ja) * | 2016-04-28 | 2017-11-02 | 信越化学工業株式会社 | 複合ウェーハの製造方法 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
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EP1829846A4 (en) * | 2004-11-29 | 2011-04-20 | Kyocera Corp | CERAMIC COMPOSITE BODY, MANUFACTURING METHOD, MICROCHEMICAL CHIP AND REFORMER |
JP2008301066A (ja) | 2007-05-30 | 2008-12-11 | Yamajiyu Ceramics:Kk | タンタル酸リチウム(lt)又はニオブ酸リチウム(ln)単結晶複合基板 |
CN104365019B (zh) * | 2012-06-13 | 2017-08-25 | 日本碍子株式会社 | 复合基板 |
KR102104147B1 (ko) * | 2012-07-25 | 2020-04-23 | 신에쓰 가가꾸 고교 가부시끼가이샤 | 하이브리드 기판의 제조 방법 및 하이브리드 기판 |
EP2924715A4 (en) * | 2012-11-22 | 2016-07-27 | Shinetsu Chemical Co | METHOD FOR MANUFACTURING COMPOSITE SUBSTRATE AND COMPOSITE SUBSTRATE |
JP2014195026A (ja) * | 2013-03-29 | 2014-10-09 | Kyocera Corp | 複合基板 |
JP6396852B2 (ja) | 2015-06-02 | 2018-09-26 | 信越化学工業株式会社 | 酸化物単結晶薄膜を備えた複合ウェーハの製造方法 |
-
2019
- 2019-07-29 WO PCT/JP2019/029720 patent/WO2020027075A1/ja unknown
- 2019-07-29 CN CN201980049611.6A patent/CN112534089B/zh active Active
- 2019-07-29 JP JP2020533549A patent/JP7085000B2/ja active Active
- 2019-07-29 EP EP19843738.6A patent/EP3831988A4/en active Pending
- 2019-07-31 TW TW108127183A patent/TWI706632B/zh active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004343359A (ja) * | 2003-05-14 | 2004-12-02 | Fujitsu Media Device Kk | 弾性表面波素子の製造方法 |
WO2017134980A1 (ja) * | 2016-02-02 | 2017-08-10 | 信越化学工業株式会社 | 複合基板および複合基板の製造方法 |
JP2017200101A (ja) * | 2016-04-28 | 2017-11-02 | 信越化学工業株式会社 | 複合ウェーハの製造方法 |
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Publication number | Publication date |
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EP3831988A1 (en) | 2021-06-09 |
TWI706632B (zh) | 2020-10-01 |
JP7085000B2 (ja) | 2022-06-15 |
TW202008716A (zh) | 2020-02-16 |
US20210320641A1 (en) | 2021-10-14 |
WO2020027075A1 (ja) | 2020-02-06 |
CN112534089A (zh) | 2021-03-19 |
CN112534089B (zh) | 2023-04-28 |
EP3831988A4 (en) | 2022-06-29 |
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