JPWO2020012812A1 - 炭化珪素半導体装置 - Google Patents
炭化珪素半導体装置 Download PDFInfo
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- JPWO2020012812A1 JPWO2020012812A1 JP2020530027A JP2020530027A JPWO2020012812A1 JP WO2020012812 A1 JPWO2020012812 A1 JP WO2020012812A1 JP 2020530027 A JP2020530027 A JP 2020530027A JP 2020530027 A JP2020530027 A JP 2020530027A JP WO2020012812 A1 JPWO2020012812 A1 JP WO2020012812A1
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- Prior art keywords
- silicon carbide
- insulating film
- outer peripheral
- main surface
- resin
- Prior art date
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- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 title claims abstract description 156
- 229910010271 silicon carbide Inorganic materials 0.000 title claims abstract description 156
- 239000004065 semiconductor Substances 0.000 title claims abstract description 76
- 230000002093 peripheral effect Effects 0.000 claims abstract description 130
- 229920005989 resin Polymers 0.000 claims abstract description 93
- 239000011347 resin Substances 0.000 claims abstract description 93
- 239000000758 substrate Substances 0.000 claims abstract description 64
- 239000012535 impurity Substances 0.000 description 20
- 239000010410 layer Substances 0.000 description 19
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 18
- 210000000746 body region Anatomy 0.000 description 17
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 16
- 229910052802 copper Inorganic materials 0.000 description 16
- 239000010949 copper Substances 0.000 description 16
- 239000000463 material Substances 0.000 description 12
- 239000004642 Polyimide Substances 0.000 description 11
- 229920001721 polyimide Polymers 0.000 description 11
- 239000000523 sample Substances 0.000 description 11
- 239000013078 crystal Substances 0.000 description 10
- 239000011229 interlayer Substances 0.000 description 8
- 229910052751 metal Inorganic materials 0.000 description 8
- 239000002184 metal Substances 0.000 description 8
- 229910000679 solder Inorganic materials 0.000 description 7
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 6
- 229920000647 polyepoxide Polymers 0.000 description 6
- 239000000377 silicon dioxide Substances 0.000 description 6
- 229910052782 aluminium Inorganic materials 0.000 description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 4
- 238000005520 cutting process Methods 0.000 description 4
- 230000001629 suppression Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 230000007257 malfunction Effects 0.000 description 3
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- 235000012239 silicon dioxide Nutrition 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 239000006061 abrasive grain Substances 0.000 description 2
- 238000004220 aggregation Methods 0.000 description 2
- 230000002776 aggregation Effects 0.000 description 2
- 229910003460 diamond Inorganic materials 0.000 description 2
- 239000010432 diamond Substances 0.000 description 2
- 239000003822 epoxy resin Substances 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- 239000004593 Epoxy Substances 0.000 description 1
- PEEHTFAAVSWFBL-UHFFFAOYSA-N Maleimide Chemical compound O=C1NC(=O)C=C1 PEEHTFAAVSWFBL-UHFFFAOYSA-N 0.000 description 1
- 229910005883 NiSi Inorganic materials 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 239000004697 Polyetherimide Substances 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 235000002017 Zea mays subsp mays Nutrition 0.000 description 1
- 241000482268 Zea mays subsp. mays Species 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 230000003139 buffering effect Effects 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000003698 laser cutting Methods 0.000 description 1
- 238000004949 mass spectrometry Methods 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 239000002114 nanocomposite Substances 0.000 description 1
- 239000002105 nanoparticle Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- PEUPIGGLJVUNEU-UHFFFAOYSA-N nickel silicon Chemical compound [Si].[Ni] PEUPIGGLJVUNEU-UHFFFAOYSA-N 0.000 description 1
- 239000005011 phenolic resin Substances 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 229920002577 polybenzoxazole Polymers 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920001601 polyetherimide Polymers 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000007779 soft material Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- -1 titanium aluminum silicon Chemical compound 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
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- H01L23/3107—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed
- H01L23/3114—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed the device being a chip scale package, e.g. CSP
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- H01L23/3157—Partial encapsulation or coating
- H01L23/3171—Partial encapsulation or coating the coating being directly applied to the semiconductor body, e.g. passivation layer
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- H01L2224/291—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
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Abstract
Description
まず、本開示の実施形態の概要について説明する。本明細書中の結晶学的記載においては、個別方位を[]、集合方位を<>、個別面を()、集合面を{}でそれぞれ示している。また結晶学上の指数が負であることは、通常、”−”(バー)を数字の上に付すことによって表現されるが、本明細書中では数字の前に負の符号を付している。
以下、実施の形態について図に基づいて説明する。なお、以下の図面において、同一または相当する部分には同一の参照番号を付し、その説明は繰り返さない。
図1に示されるように、本実施形態に係る炭化珪素半導体装置100は、炭化珪素半導体チップ30と、樹脂8と、金属フレーム74と、はんだ層73とを主に有している。金属フレーム74は、たとえば銅フレームである。当該銅フレームには、ニッケルが鍍金されていてもよい。炭化珪素半導体チップ30は、はんだ層73を介して金属フレーム74上に設けられている。別の観点から言えば、はんだ層73は、炭化珪素半導体チップ30と金属フレーム74との間に位置している。樹脂8は、炭化珪素半導体チップ30と、はんだ層73とを覆っている。
一般的に炭化珪素半導体チップ30は樹脂8によって覆われている。外部環境から樹脂8の内部に入り込んだ水分は、高温下において膨張して内部に空間を形成する。これにより、樹脂8に応力がかかることで、樹脂8にクラックが発生する。次に、低温下においては、空間の内部が結露することで、空間が減圧状態になる。そのため、外部環境から水分が引き込まれる。次に、高温下になると、水分が膨張して空間がさらに拡大する。結果として、樹脂8に形成されたクラックが伸長する。以上のように、炭化珪素半導体装置100が、高温と低温とが交互に繰り返される環境化に配置されると、炭化珪素半導体チップ30上の樹脂8が剥離する場合がある(ポップコーン現象)。上記において、高温は、たとえば150℃である。低温は、たとえば−55℃である。
以下のサンプルを用いて、樹脂の剥離抑制効果の確認実験を行った。サンプルにおけるチップサイズの縦寸法×横寸法と実装用銅フレームの実装面の寸法を示す。第1のサンプルは、チップサイズが3mm×3mm、実装用銅フレームの実装面の寸法14mm×9.5mmである。第2のサンプルは、チップサイズが3mm×3mm、実装用銅フレームの実装面の寸法17mm×10mmである。第3のサンプルは、チップサイズが6mm×6mm、実装用銅フレームの実装面の寸法14mm×9.5mmである。第4のサンプルは、チップサイズが6mm×6mm、実装用銅フレームの実装面の寸法は17mm×10mmである。チップの厚みは、150μmから200μmである。これらのサンプルにおいて実施形態(図4に示す構造)に示すように、ポリイミドが炭化珪素基板10と樹脂8との間に設けられているものと、ポリイミドが炭化珪素基板10と樹脂8との間に設けられていないものの2水準を準備した。
高温と低温とが交互に繰り返される環境化でのサイクル試験の前と後の状態を、超音波プローブを用いた超音波顕微鏡を用いて観察することにより、樹脂の剥離の有無を確認することが可能である。樹脂とチップ上面との間および樹脂とフレーム面との間の密着状態を観察することで、剥離発生の有無の判断をすることができる。まず、高温(150℃)と低温側(−55℃)との温度サイクルが、1000回、より望ましくは5000回繰り返される。その後、超音波の反射、透過分析に基づいて、剥離の発生の有無が判断される。横方向寸法100μm程度の剥離の発生を良否判断の基準としている。
剥離抑制対策がなされていないサンプルにおいては、1000回未満の温度サイクルで剥離が発生し、サイクル試験後の高温高湿試験でも動作不良が発生した。特に、チップ角部においては、500回未満の温度サイクルで剥離が発生するという特徴が確認されている。一方、剥離抑制対策がなされているサンプルにおいては、1000回以上でもチップの角部、辺部に剥離はなく、また、サイクル試験後の高温高湿試験でも良好な動作が確認された。同様の効果は、より厳しい高温側(175℃)と低温側(−55℃)での試験回数5000回のサイクル試験と、サイクル試験後の高温高湿試験後でも確認された。
Claims (6)
- 炭化珪素半導体チップと、
前記炭化珪素半導体チップを覆う樹脂とを備え、
前記炭化珪素半導体チップは、炭化珪素基板と、前記炭化珪素基板上にある第1絶縁膜と、前記第1絶縁膜上にある第2絶縁膜とを含み、
前記炭化珪素基板は、前記第1絶縁膜に接する第1主面と、前記第1主面と反対側の第2主面と、前記第1主面および前記第2主面の各々の連なる外周面とを有し、
前記樹脂は、前記外周面および前記第2絶縁膜の双方を覆っており、
前記第2絶縁膜のヤング率は、前記樹脂のヤング率よりも小さく、
前記第2絶縁膜の熱膨張係数は、前記炭化珪素基板の熱膨張係数よりも大きく、かつ前記樹脂の熱膨張係数よりも大きく、
前記第2絶縁膜は、前記第1主面に平行な方向における第1外周端部を有し、
前記第1主面に対して垂直な断面において、前記第1外周端部は、前記外周面に沿って設けられている、炭化珪素半導体装置。 - 前記第2絶縁膜は、前記第1外周端部に連なりかつ角張っている肩部を有し、
前記樹脂は、前記肩部に接している、請求項1に記載の炭化珪素半導体装置。 - 前記第1絶縁膜は、前記第1主面に平行な方向における第2外周端部を有し、
前記第1主面に対して垂直な断面において、前記第2外周端部は、前記外周面に沿って設けられている、請求項1または請求項2に記載の炭化珪素半導体装置。 - 前記第1絶縁膜は、第1環状部と、前記第1環状部から離間しかつ前記第1環状部を取り囲む第2環状部とを有している、請求項1〜請求項3のいずれか1項に記載の炭化珪素半導体装置。
- 前記第2絶縁膜は、前記第1環状部と前記第2環状部との間に設けられた充填部を有し、
前記充填部は、前記炭化珪素基板に接している、請求項4に記載の炭化珪素半導体装置。 - 炭化珪素半導体チップと、
前記炭化珪素半導体チップを覆う樹脂とを備え、
前記炭化珪素半導体チップは、炭化珪素基板と、前記炭化珪素基板上にある第1絶縁膜と、前記第1絶縁膜上にある第2絶縁膜とを含み、
前記炭化珪素基板は、前記第1絶縁膜に接する第1主面と、前記第1主面と反対側の第2主面と、前記第1主面および前記第2主面の各々の連なる外周面とを有し、
前記樹脂は、前記外周面および前記第2絶縁膜の双方を覆っており、
前記第2絶縁膜のヤング率は、前記樹脂のヤング率よりも小さく、
前記第2絶縁膜の熱膨張係数は、前記炭化珪素基板の熱膨張係数よりも大きく、かつ前記樹脂の熱膨張係数よりも大きく、
前記第2絶縁膜は、前記第1主面に平行な方向における第1外周端部と、前記第1外周端部に連なりかつ角張っている肩部を有し、
前記第1主面に対して垂直な断面において、前記第1外周端部は、前記外周面に沿って設けられており、
前記樹脂は、前記肩部に接しており、
前記第1絶縁膜は、前記第1主面に平行な方向における第2外周端部を有し、
前記第1主面に対して垂直な断面において、前記第2外周端部は、前記外周面に沿って設けられており、
前記第1絶縁膜は、第1環状部と、前記第1環状部から離間しかつ前記第1環状部を取り囲む第2環状部とを有しており、
前記第2絶縁膜は、前記第1環状部と前記第2環状部との間に設けられた充填部を有し、
前記充填部は、前記炭化珪素基板に接している、炭化珪素半導体装置。
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