JPWO2019107273A1 - 面発光半導体レーザ - Google Patents
面発光半導体レーザ Download PDFInfo
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- 238000002347 injection Methods 0.000 claims abstract description 99
- 239000007924 injection Substances 0.000 claims abstract description 99
- 239000000758 substrate Substances 0.000 claims abstract description 53
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- 125000006850 spacer group Chemical group 0.000 description 9
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- 229910052751 metal Inorganic materials 0.000 description 7
- 239000002184 metal Substances 0.000 description 7
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 6
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 6
- 230000004048 modification Effects 0.000 description 6
- 238000012986 modification Methods 0.000 description 6
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 6
- FTWRSWRBSVXQPI-UHFFFAOYSA-N alumanylidynearsane;gallanylidynearsane Chemical compound [As]#[Al].[As]#[Ga] FTWRSWRBSVXQPI-UHFFFAOYSA-N 0.000 description 4
- 239000011651 chromium Substances 0.000 description 4
- 239000010949 copper Substances 0.000 description 4
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- 239000000463 material Substances 0.000 description 4
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- JBQYATWDVHIOAR-UHFFFAOYSA-N tellanylidenegermanium Chemical compound [Te]=[Ge] JBQYATWDVHIOAR-UHFFFAOYSA-N 0.000 description 4
- 239000010936 titanium Substances 0.000 description 4
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 3
- 230000009471 action Effects 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 3
- 229910052738 indium Inorganic materials 0.000 description 3
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 229910002601 GaN Inorganic materials 0.000 description 2
- 229910000530 Gallium indium arsenide Inorganic materials 0.000 description 2
- GPXJNWSHGFTCBW-UHFFFAOYSA-N Indium phosphide Chemical compound [In]#P GPXJNWSHGFTCBW-UHFFFAOYSA-N 0.000 description 2
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 2
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- RNQKDQAVIXDKAG-UHFFFAOYSA-N aluminum gallium Chemical compound [Al].[Ga] RNQKDQAVIXDKAG-UHFFFAOYSA-N 0.000 description 2
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- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000011777 magnesium Substances 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 230000001151 other effect Effects 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 229910052763 palladium Inorganic materials 0.000 description 2
- 238000001020 plasma etching Methods 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 239000011669 selenium Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- LEONUFNNVUYDNQ-UHFFFAOYSA-N vanadium atom Chemical compound [V] LEONUFNNVUYDNQ-UHFFFAOYSA-N 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
- BUGBHKTXTAQXES-UHFFFAOYSA-N Selenium Chemical compound [Se] BUGBHKTXTAQXES-UHFFFAOYSA-N 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- AJGDITRVXRPLBY-UHFFFAOYSA-N aluminum indium Chemical compound [Al].[In] AJGDITRVXRPLBY-UHFFFAOYSA-N 0.000 description 1
- 229910052790 beryllium Inorganic materials 0.000 description 1
- ATBAMAFKBVZNFJ-UHFFFAOYSA-N beryllium atom Chemical compound [Be] ATBAMAFKBVZNFJ-UHFFFAOYSA-N 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 238000001451 molecular beam epitaxy Methods 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000006798 recombination Effects 0.000 description 1
- 238000005215 recombination Methods 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 229910052711 selenium Inorganic materials 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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- H01S5/18—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities
- H01S5/183—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL]
- H01S5/18308—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL] having a special structure for lateral current or light confinement
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Abstract
Description
1.実施の形態
電流注入領域の面積よりも小さい面積のコンタクト領域を有する半導体レーザ
2.変形例
第2光反射層に拡散領域を設けた例
図1および図2は、本技術の一実施の形態に係る面発光半導体レーザ(半導体レーザ1)の模式的な構成を表したものである。図1は、半導体レーザ1を斜め上方向から見た構成を、一部の断面構成とともに表している。図2は、この図1に表した一部の断面構成を拡大して表したものである。半導体レーザ1は、基板11の一方の面(表面)上に半導体の積層構造10を有しており、基板11の他方の面(裏面)に反射防止膜23を有している。積層構造10は、基板11のメサ領域11Mに設けられており、基板11側から順に、第1光反射層12、活性層13、電流狭窄層14、第2光反射層15およびコンタクト層16を含んでいる。半導体レーザ1は、基板11に接する第1電極21と、コンタクト層16に接する第2電極22とを含んでいる。この半導体レーザ1では、基板11の表面側に設けられた積層構造10で発生した光が、基板11の裏面側から取り出されるようになっている。即ち、半導体レーザ1は、いわゆる裏面出射型のVCSELである。
この半導体レーザ1では、第1電極21と第2電極22との間に所定の電圧が印可されると、電流狭窄層14により電流狭窄された電流が、電流注入領域14Aを介して活性層13に注入される。これにより、電子―正孔再結合により発光が生じる。この光は、第1光反射層12と第2光反射層15との間で反射され、これらの間を往復して所定の波長でレーザ発振を生じ、レーザ光として第1光反射層12(基板11)側から取り出される。半導体レーザ1では、例えば、複数のメサ領域11M各々から出射された光が、互いに重ね合わされて、取り出される。
本実施の形態の半導体レーザ1では、第2電極22が積層構造10に接する領域、即ち、コンタクト領域16Aの面積が、電流注入領域14Aの面積よりも小さくなっている。これにより、電流注入領域14Aの中心近傍の電流密度が高くなり、低次横モードの発振が生じやすくなる。以下、この作用・効果について、比較例を用いて説明する。
図16は、上記実施の形態の変形例に係る半導体レーザ(半導体レーザ1A)の断面構成を模式的に表したものである。この半導体レーザ1Aでは、平面視でコンタクト領域16Aに重なる領域に拡散領域R(電気伝導領域)が設けられている。この点を除き、半導体レーザ1Aは、半導体レーザ1と同様の構成を有し、その作用および効果も同様である。
(1)
基板と、
前記基板に接して設けられた第1電極と、
前記基板上に設けられた第1光反射層と、
前記第1光反射層を間にして前記基板上に設けられた第2光反射層と、
前記第2光反射層と前記第1光反射層との間の活性層と、
前記活性層と前記第2光反射層との間に設けられ、電流注入領域を有する電流狭窄層と、
前記第2光反射層を間にして前記基板上に設けられ、少なくとも一部が前記電流注入領域に重なる位置に配置された第2電極と、
前記第2電極と前記第2光反射層との間に設けられ、前記第2電極が接するコンタクト領域を有するコンタクト層とを備え、
前記コンタクト領域は、前記電流注入領域の面積よりも小さい面積を有する
面発光半導体レーザ。
(2)
前記コンタクト領域全域が、前記電流注入領域に重なる位置に配置されている
前記(1)に記載の面発光半導体レーザ。
(3)
前記コンタクト領域および前記電流注入領域は、円状の平面形状を有する
前記(1)または(2)に記載の面発光半導体レーザ。
(4)
前記コンタクト領域および前記電流注入領域は、多角形状の平面形状を有する
前記(1)または(2)に記載の面発光半導体レーザ。
(5)
前記コンタクト領域の平面形状の中心は、前記電流注入領域の平面形状の中心と重なる位置に配置されている
前記(1)ないし(4)のうちいずれか1つに記載の面発光半導体レーザ。
(6)
前記電流注入領域では、中心近傍の電流密度が周縁の電流密度よりも高くなっている
前記(1)ないし(5)のうちいずれか1つに記載の面発光半導体レーザ。
(7)
前記第2光反射層および前記コンタクト層は、前記コンタクト領域に重なる位置に配置されるとともに、他の部分よりも電気伝導性の高い電気伝導領域を有する
前記(1)ないし(6)のうちいずれか1つに記載の面発光半導体レーザ。
(8)
前記電気伝導領域の不純物濃度は、前記第2光反射層および前記コンタクト層の他の部分の不純物濃度よりも高くなっている
前記(7)に記載の面発光半導体レーザ。
(9)
前記基板は、選択的な領域にメサ領域を有し、
前記メサ領域に、前記第1光反射層、前記第2光反射層、前記活性層および前記電流狭窄層が設けられている
前記(1)ないし(8)のうちいずれか1つに記載の面発光半導体レーザ。
(10)
前記基板は、前記活性層で発生した光に対して透過性を有している
前記(1)ないし(9)のうちいずれか1つに記載の面発光半導体レーザ。
Claims (10)
- 基板と、
前記基板に接して設けられた第1電極と、
前記基板上に設けられた第1光反射層と、
前記第1光反射層を間にして前記基板上に設けられた第2光反射層と、
前記第2光反射層と前記第1光反射層との間の活性層と、
前記活性層と前記第2光反射層との間に設けられ、電流注入領域を有する電流狭窄層と、
前記第2光反射層を間にして前記基板上に設けられ、少なくとも一部が前記電流注入領域に重なる位置に配置された第2電極と、
前記第2電極と前記第2光反射層との間に設けられ、前記第2電極が接するコンタクト領域を有するコンタクト層とを備え、
前記コンタクト領域は、前記電流注入領域の面積よりも小さい面積を有する
面発光半導体レーザ。 - 前記コンタクト領域全域が、前記電流注入領域に重なる位置に配置されている
請求項1に記載の面発光半導体レーザ。 - 前記コンタクト領域および前記電流注入領域は、円状の平面形状を有する
請求項1に記載の面発光半導体レーザ。 - 前記コンタクト領域および前記電流注入領域は、多角形状の平面形状を有する
請求項1に記載の面発光半導体レーザ。 - 前記コンタクト領域の平面形状の中心は、前記電流注入領域の平面形状の中心と重なる位置に配置されている
請求項1に記載の面発光半導体レーザ。 - 前記電流注入領域では、中心近傍の電流密度が周縁の電流密度よりも高くなっている
請求項1に記載の面発光半導体レーザ。 - 前記第2光反射層および前記コンタクト層は、前記コンタクト領域に重なる位置に配置されるとともに、他の部分よりも電気伝導性の高い電気伝導領域を有する
請求項1に記載の面発光半導体レーザ。 - 前記電気伝導領域の不純物濃度は、前記第2光反射層および前記コンタクト層の他の部分の不純物濃度よりも高くなっている
請求項7に記載の面発光半導体レーザ。 - 前記基板は、選択的な領域にメサ領域を有し、
前記メサ領域に、前記第1光反射層、前記第2光反射層、前記活性層および前記電流狭窄層が設けられている
請求項1に記載の面発光半導体レーザ。 - 前記基板は、前記活性層で発生した光に対して透過性を有している
請求項1に記載の面発光半導体レーザ。
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JPH09135049A (ja) * | 1995-10-27 | 1997-05-20 | Hewlett Packard Co <Hp> | 表面発光レーザとそのパワー出力を監視するフォトダイオードとの集積化 |
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JP2003023211A (ja) * | 2001-07-09 | 2003-01-24 | Seiko Epson Corp | 面発光型半導体レーザおよびその製造方法 |
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