JPWO2018216108A1 - 素子基板の製造方法およびレーザクリーニング装置 - Google Patents
素子基板の製造方法およびレーザクリーニング装置 Download PDFInfo
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Abstract
Description
10 基板
11 基板の第1面
12 基板の第2面
20 ステージ
30 光源ユニット
33 検出用レーザ光
40 位置決め装置
50 制御装置
60 レーザビームの照射対象(ターゲット)
61 凸部
62 コンタミネーション
70 終端装置
100 レーザクリーニング装置(LC装置)
Claims (13)
- 第1面および前記第1面に平行な第2面を有する基板を用意する工程Aと、
前記基板の前記第1面に平行な第1の方向にレーザビームを出射する工程Bと、
前記基板の前記第1面に平行な第2の方向であって前記第1の方向に交差する第2の方向に、前記レーザビームを並進または回転させることにより、前記基板の前記第1面上の凸部またはコンタミネーションの少なくとも一部を除去する工程Cと、
を含む、素子基板の製造方法。 - 前記工程Bにおける前記レーザビームの強度よりも低い強度を持つ検出用レーザ光で、前記工程Bの前に、前記基板の前記第1面に平行な面を走査して、前記基板の前記第1面上における前記凸部または前記コンタミネーションの各位置を検出する工程Dを含み、
前記工程Bにおける前記レーザビームは、前記凸部または前記コンタミネーションの各位置に向けて順次出射される、請求項1に記載の製造方法。 - 前記工程Bにおいて除去された前記凸部または前記コンタミネーションの前記少なくとも一部を、気流により、前記基板の前記第1面から離れる方向に移動させる工程Eを含む、請求項1または2に記載の製造方法。
- 前記基板は、
第1の材料から形成されたベースと、
前記第1の材料とは異なる第2の材料から形成され、前記ベースに支持されているフィルムと、
を有しており、
前記フィルムの表面は、前記基板の前記第1面である、請求項1から3のいずれかに記載の製造方法。 - 前記工程Aは、ステージの上面に前記基板を載せる工程を含み、前記基板の前記第2面は前記ステージの前記上面に支持される、請求項1から4のいずれかに記載の製造方法。
- 第1面および前記第1面に平行な第2面を有する基板を支持するステージと、
レーザビームを出射する光源ユニットと、
前記ステージに対する前記光源ユニットの位置および向きの少なくとも一方を変化させる位置決め装置と、
前記光源ユニットおよび前記位置決め装置に電気的に接続され、前記光源ユニットおよび前記位置決め装置を制御する制御装置と、
を備え、
前記制御装置は、
前記光源ユニットから前記基板の前記第1面に平行な第1の方向に前記レーザビームを出射させ、
前記位置決め装置により、前記基板の前記第1面に平行な第2の方向であって前記第1の方向に交差する第2の方向に、前記レーザビームを並進または回転させ、前記基板の前記第1面上の凸部またはコンタミネーションの少なくとも一部を除去する、レーザクリーニング装置。 - 前記光源ユニットから出射された前記レーザビームを受ける終端装置を備える、請求項6に記載の装置。
- 前記位置決め装置は、前記レーザビームの並進または回転に応じて前記終端装置の位置および向きの少なくとも一方を変化させる、請求項7に記載の装置。
- 前記光源ユニットおよび前記終端装置は、前記ステージの両側に位置しており、
前記制御装置は、前記位置決め装置により、前記光源ユニットおよび前記終端装置を、前記基板の前記第1面に平行な方向に移動させる、請求項8に記載の装置。 - 前記制御装置は、前記位置決め装置により、前記光源ユニットおよび前記終端装置を、前記第1の方向に対して直交する方向に移動させる、請求項9に記載の装置。
- 前記制御装置は、前記位置決め装置により、前記光源ユニットおよび前記終端装置を、前記第1の方向に対して直交する方向に移動させる、請求項9に記載の装置。
- 前記位置決め装置によって位置および向きの少なくとも一方が変化する強度センサを備え、
前記制御装置は、
前記光源ユニットから前記レーザビームの強度よりも低い強度を持つ検出用レーザ光を出射させ、
前記位置決め装置により、前記検出用レーザ光で前記基板の前記第1面に平行な面を走査させ、かつ、前記検出用レーザ光による走査に応じて前記強度センサの位置および向きの少なくとも一方を変化させ、
前記強度センサの出力に基づいて、前記基板の前記第1面上における前記凸部または前記コンタミネーションの位置を検出したときは、前記検出用レーザ光に代えて前記レーザビームを前記光源ユニットから前記凸部または前記コンタミネーションの前記位置に向けて出射させる、請求項6から11のいずれかに記載の装置。 - 前記光源ユニットおよび前記強度センサは、前記ステージの両側に位置しており、
前記制御装置は、前記位置決め装置により、前記光源ユニットおよび前記強度センサを、前記第1の方向に対して直交する方向に移動させる、請求項12に記載の装置。
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-
2017
- 2017-05-23 WO PCT/JP2017/019223 patent/WO2018216108A1/ja active Application Filing
- 2017-05-23 JP JP2017566040A patent/JP6334074B1/ja not_active Expired - Fee Related
- 2017-05-23 US US15/774,481 patent/US10710200B2/en active Active
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US20200298343A1 (en) | 2020-09-24 |
US10710200B2 (en) | 2020-07-14 |
US20190358748A1 (en) | 2019-11-28 |
WO2018216108A1 (ja) | 2018-11-29 |
JP6334074B1 (ja) | 2018-05-30 |
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