JPWO2018180771A1 - 圧電組成物および圧電素子 - Google Patents
圧電組成物および圧電素子 Download PDFInfo
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Abstract
Description
[1]カリウムおよびニオブを含む複合酸化物を含む圧電組成物であって、
複合酸化物が、組成式KNbO3で表される第1の相と、
組成式K4Nb6O17で表される第2の相および組成式KNb3O8で表される第3の相から選ばれる1つの相または2つの相と、を有することを特徴とする圧電組成物である。
xおよびyが、0<x+y<10.0%である関係を満足することを特徴とする[1]に記載の圧電組成物である。
1.圧電素子
1.1 圧電組成物
2.圧電素子の製造方法
3.本実施形態における効果
4.変形例
まず、本実施形態に係る圧電組成物が適用された圧電素子について説明する。圧電素子としては、本実施形態に係る圧電組成物が適用可能な素子であれば特に制限されない。本実施形態では、たとえば、圧電トランス、薄膜センサ、圧電超音波モータ等が例示される。
本実施形態に係る圧電組成物は、カリウム(K)およびニオブ(Nb)を含む複合酸化物を主成分として含有している。本実施形態では、主成分は、圧電組成物100mol%に対して、90mol%以上を占める成分である。
次に、圧電素子の製造方法の一例について以下に説明する。
本実施形態に係る圧電組成物は、カリウム(K)およびニオブ(Nb)を含む複合酸化物を主成分として含有している。この複合酸化物は、主に、ペロブスカイト構造を有するKNbO3相(第1の相)から構成されるが、本実施形態では、第1の相とは異なる相である第2の相および/または第3の相を有している。
上述した実施形態では、圧電体部が単層である圧電素子について説明したが、圧電体部が積層された構成を有する圧電素子であってもよい。また、これらが組み合わされた構成を有する圧電素子であってもよい。
x(%)=100I2/I1
y(%)=100I3/I1
ρ=RS/l
ここで、Rは絶縁抵抗(Ω)、Sは電極面積(cm2)、lは電極間距離(cm) である。本実施例では、抵抗率が1.00×108Ω・cm以上である試料を良好であると判断した。結果を表1に示す。なお、表1の「抵抗率ρ」の欄における「aE+b」という表記は、「a×10b」を示す。
1… 圧電体部
2,3… 電極
50… 圧電素子
10… 積層体
11… 圧電層
12… 内部電極層
21,22… 端子電極
Claims (5)
- カリウムおよびニオブを含む複合酸化物を含む圧電組成物であって、
前記複合酸化物が、組成式KNbO3で表される第1の相と、
組成式K4Nb6O17で表される第2の相および組成式KNb3O8で表される第3の相から選ばれる1つの相または2つの相と、を有することを特徴とする圧電組成物。 - 前記第1の相の体積に対する前記第2の相の体積の比率および前記第3の相の体積の比率をそれぞれx%およびy%としたときに、
前記xおよび前記yが、0<x+y<10.0%である関係を満足することを特徴とする請求項1に記載の圧電組成物。 - 前記xおよび前記yが、x>yである関係を満足することを特徴とする請求項2に記載の圧電組成物。
- 前記圧電組成物が、遷移金属元素から選ばれる1つ以上を含むことを特徴とする請求項1から3のいずれかに記載の圧電組成物。
- 請求項1から4のいずれかに記載の圧電組成物を含む圧電素子。
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PCT/JP2018/011038 WO2018180771A1 (ja) | 2017-03-28 | 2018-03-20 | 圧電組成物および圧電素子 |
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JP2015071506A (ja) * | 2013-10-02 | 2015-04-16 | 国立大学法人 香川大学 | ニオブ酸系強誘電体の配向性薄膜とその作製方法 |
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JP3562331B2 (ja) * | 1998-08-05 | 2004-09-08 | 松下電器産業株式会社 | 圧電組成物感圧体とそれを用いた応用素子 |
EP1806568A1 (en) * | 2004-10-28 | 2007-07-11 | Matsushita Electric Industrial Co., Ltd. | Piezoelectric element and method for manufacturing the same |
JP4735840B2 (ja) | 2005-12-06 | 2011-07-27 | セイコーエプソン株式会社 | 圧電体積層体、表面弾性波素子、薄膜圧電共振子および圧電アクチュエータ |
DE102006015042B4 (de) | 2006-03-31 | 2009-09-24 | Siemens Ag | Bleifreier piezokeramischer Werkstoff mit Kupferdotierung, Verfahren zum Herstellen eines piezokeramischen Bauteils mit dem Werkstoff und Verwendung des Bauteils |
JP5929640B2 (ja) * | 2011-12-26 | 2016-06-08 | Tdk株式会社 | 圧電磁器および圧電素子 |
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