JPWO2018116782A1 - 太陽電池セルおよび太陽電池セルの製造方法 - Google Patents
太陽電池セルおよび太陽電池セルの製造方法 Download PDFInfo
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- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
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- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 2
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- 229910044991 metal oxide Inorganic materials 0.000 description 2
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- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 2
- 229920001200 poly(ethylene-vinyl acetate) Polymers 0.000 description 2
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- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- 229910052684 Cerium Inorganic materials 0.000 description 1
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- GPXJNWSHGFTCBW-UHFFFAOYSA-N Indium phosphide Chemical compound [In]#P GPXJNWSHGFTCBW-UHFFFAOYSA-N 0.000 description 1
- XYFCBTPGUUZFHI-UHFFFAOYSA-N Phosphine Chemical compound P XYFCBTPGUUZFHI-UHFFFAOYSA-N 0.000 description 1
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- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 1
- 229910006404 SnO 2 Inorganic materials 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- 229910052787 antimony Inorganic materials 0.000 description 1
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- GWXLDORMOJMVQZ-UHFFFAOYSA-N cerium Chemical compound [Ce] GWXLDORMOJMVQZ-UHFFFAOYSA-N 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
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- ZOCHARZZJNPSEU-UHFFFAOYSA-N diboron Chemical compound B#B ZOCHARZZJNPSEU-UHFFFAOYSA-N 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
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- 238000010438 heat treatment Methods 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- 229910003437 indium oxide Inorganic materials 0.000 description 1
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- QPJSUIGXIBEQAC-UHFFFAOYSA-N n-(2,4-dichloro-5-propan-2-yloxyphenyl)acetamide Chemical compound CC(C)OC1=CC(NC(C)=O)=C(Cl)C=C1Cl QPJSUIGXIBEQAC-UHFFFAOYSA-N 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
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- JBQYATWDVHIOAR-UHFFFAOYSA-N tellanylidenegermanium Chemical compound [Te]=[Ge] JBQYATWDVHIOAR-UHFFFAOYSA-N 0.000 description 1
- 229920005992 thermoplastic resin Polymers 0.000 description 1
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- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 1
- 229910001887 tin oxide Inorganic materials 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
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Abstract
Description
(2)遠隔部分90と近接部分92との間のステップ状の変化において、境界近傍で傾斜があってもよい。
(3)遠隔部分90と近接部分92とにわたる変化がステップ状ではなく、連続的な傾斜を持ってもよい。
(A)太陽電池セル10の製造方法
太陽電池セル10は、プラズマCVD(PECVD((Chemical Vapor Deposition)))法、触媒型CVD(Cat−CVD)法、スパッタリング法等を使用して製造されるが、ここではプラズマCVD法のうちのRFプラズマCVD法を使用する。また、以下では、半導体基板70の裏面側に、第2i型層72b、n型層78、第2TCO76bを順に形成する手順を説明する。
まず、z軸の正方向から負方向に向かって、第1保護部材40a、第1封止部材42a、太陽電池セル10等、第2封止部材42b、第2保護部材40bが順に重ね合わせられることによって、積層体が生成される。これに続いて、積層体に対して、ラミネート・キュア工程がなされる。この工程では、積層体から空気を抜き、加熱、加圧して、積層体を一体化する。ラミネート・キュア工程における真空ラミネートでは、温度が前述のごとく、150℃程度に設定される。
Claims (5)
- 結晶性半導体基板と、
前記結晶性半導体基板の一面側に形成される真性非晶質半導体層と、
前記真性非晶質半導体層上に形成され、かつ導電型の不純物を含む導電性非晶質半導体層と、
前記導電性非晶質半導体層上に形成される透明導電膜層とを備え、
前記導電性非晶質半導体層における第1部分より前記透明導電膜層に近い第2部分の密度は、前記第1部分の密度よりも小さいことを特徴とする太陽電池セル。 - 前記導電性非晶質半導体層において、前記第2部分のドープ率は前記第1部分のドープ率よりも小さいことを特徴とする請求項1に記載の太陽電池セル。
- 別の真性非晶質半導体層と、
導電型の不純物を含む別の導電性非晶質半導体層と、
別の透明導電膜層とをさらに備え、
前記別の真性非晶質半導体層、前記別の導電性非晶質半導体層、前記別の透明導電膜層は、前記結晶性半導体基板において、前記真性非晶質半導体層、前記導電性非晶質半導体層、前記透明導電膜層の反対側に形成され、
前記別の導電性非晶質半導体層に含まれる不純物の導電型は、前記導電性非晶質半導体層に含まれる不純物の導電型と異なり、
前記別の導電性非晶質半導体層における第3部分より前記別の透明導電膜層に近い第4部分の密度は、前記第3部分の密度よりも小さいことを特徴とする請求項1または2に記載の太陽電池セル。 - 少なくとも一部をマスクした結晶性半導体基板の一面側に真性非晶質半導体層を形成するステップと、
前記真性非晶質半導体層上に、導電型の不純物を含む導電性非晶質半導体層を形成するステップと、
前記導電性非晶質半導体層上に透明導電膜層を形成するステップとを備え、
前記導電性非晶質半導体層における第1部分より前記透明導電膜層に近い第2部分を形成する場合の成膜速度は、前記第1部分を形成する場合の成膜速度よりも速いことを特徴とする太陽電池セルの製造方法。 - 前記導電性非晶質半導体層における第2部分を形成する場合の成膜速度は、前記第1部分を形成する場合の成膜速度の1.01倍〜5.00倍であることを特徴とする請求項4に記載の太陽電池セルの製造方法。
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JP2016248504 | 2016-12-21 | ||
JP2016248504 | 2016-12-21 | ||
PCT/JP2017/043091 WO2018116782A1 (ja) | 2016-12-21 | 2017-11-30 | 太陽電池セルおよび太陽電池セルの製造方法 |
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