JPWO2015174288A1 - Firing jig - Google Patents

Abstract

An object of the present invention is to provide a firing jig that can shorten the temperature rise time and the temperature fall time during firing, and is less susceptible to undesired deformation. The firing jig has a first main surface (31) and a second main surface (32) which is the back surface of the first main surface (31), and surrounds the ventilation portion (3a). (3) and a metal mesh (4) fixed to the metal substrate (3) so as to cover the ventilation portion (3a) on the first main surface (31) side of the metal substrate (3). The metal substrate (3) and the metal mesh (4) are mainly made of Ni.

Description

  The present invention relates to a firing jig.

  In order to obtain an electronic component or the like, an operation of forming an element body from a ceramic material and firing the element body may be performed. An example of a jig used for such work, that is, a firing jig is described in Japanese Patent Application Laid-Open No. 2000-111269 (Patent Document 1).

JP 2000-1111269 A

  Since a ceramic material such as alumina has a large heat capacity, when the ceramic material is fired, the temperature rise time and the temperature fall time become long.

  In general, the firing jig tends to be deformed while being used many times for firing.

  Accordingly, an object of the present invention is to provide a firing jig that can shorten the temperature raising time and the temperature lowering time during firing as much as possible and hardly cause undesired deformation.

  In order to achieve the above object, a firing jig according to the present invention has a first main surface and a second main surface that is the back side of the first main surface, and a frame-shaped metal base that surrounds the ventilation portion. And a metal mesh fixed to the metal base so as to close the ventilation portion on the first main surface side of the metal base, and the metal base and the metal mesh are mainly made of Ni.

  According to the present invention, since the metal base and the metal mesh are mainly made of Ni, they are excellent in thermal conductivity as compared with the ceramic material. Therefore, the temperature rising time and temperature falling time during firing can be shortened as much as possible. Also, undesired deformation is less likely to occur.

It is a perspective view of the baking jig in Embodiment 1, 2 based on this invention. It is an exploded view of the jig for baking in Embodiment 1, 2 based on this invention. It is the top view to which the Z section in FIG. 2 was expanded. It is arrow sectional drawing regarding the IV-IV line | wire in FIG. It is the photograph in the 1st direction of the 1st mesh surface of the metal mesh with which the jig | tool for baking in Embodiment 2 based on this invention is equipped. It is the photograph in the 2nd direction of the 1st mesh surface of the metal mesh with which the jig | tool for baking in Embodiment 2 based on this invention is equipped. It is the photograph in the 1st direction of the 2nd mesh surface of the metal mesh with which the jig | tool for baking in Embodiment 2 based on this invention is equipped. It is the photograph in the 2nd direction of the 2nd mesh surface of the metal mesh with which the jig | tool for baking in Embodiment 2 based on this invention is equipped. It is a top view of the state which has arrange | positioned the several baking jig | tool in Embodiment 3 based on this invention radially. It is a side view of the state which piled up the several jig | tool for baking in Embodiment 3 based on this invention.

(Embodiment 1)
With reference to FIGS. 1-4, the baking jig in Embodiment 1 based on this invention is demonstrated. A perspective view of firing jig 101 in the present embodiment is shown in FIG. 1, and an exploded view is shown in FIG. FIG. 3 shows an enlarged view of the Z portion in FIG. FIG. 4 shows a cross-sectional view taken along the line IV-IV in FIG.

  The firing jig 101 in the present embodiment includes a metal base 3 and a metal mesh 4. The metal substrate 3 has a first main surface 31 and a second main surface 32 which is a surface on the back side of the first main surface 31, and has a frame shape surrounding the ventilation portion 3a. The metal substrate 3 has an outer wall 33 provided from the outer periphery of the first main surface 31 to the outer periphery of the second main surface 32, and an inner wall 34 provided on the inner side of the outer wall 33. Each of the inner side walls 34 is connected so as to form an annular shape, thereby forming an inner peripheral surface of the ventilation portion 3a. The metal mesh 4 is fixed to the metal base 3 so as to cover the ventilation portion 3 a on the first main surface 31 side of the metal base 3. The gas existing around the firing jig 101 can pass through the gaps of the metal mesh 4 and the ventilation part 3a of the metal substrate 3. The metal base 3 and the metal mesh 4 are mainly made of Ni.

  The thickness of the metal mesh 4 is, for example, not less than 0.3 mm and not more than 1.5 mm. The metal mesh 4 may be a Ni mesh.

  As an object to be fired, for example, a ceramic body before firing a multilayer ceramic electronic component can be considered. In this case, examples of the type of the firing object include those of 1.0 mm × 0.5 mm × 0.5 mm.

  In the present embodiment, since the metal base 3 and the metal mesh 4 are mainly made of Ni, they are superior in thermal conductivity and have a smaller heat capacity than ceramic materials. In the present embodiment, since the heat capacity of the metal substrate 3 and the metal mesh 4 is small, the temperature raising time and the temperature falling time during firing can be shortened as much as possible. Therefore, the power consumption for raising the temperature in the firing furnace can be reduced.

  Ni has heat resistance and can be used for high-temperature firing at about 1200 ° C. Since the metal base 3 and the metal mesh 4 are made of Ni as a main material, the mechanical strength of these objects is increased and it is difficult to break.

  Since the metal base 3 and the metal mesh 4 are made of the same metal as the main material, even if the firing jig is placed under a high temperature condition, the thermal expansion amounts are almost equal. Therefore, undesired deformation of the metal base 3 and the metal mesh 4 due to thermal stress can be made difficult to occur.

  As shown in FIG. 2, the metal mesh 4 has a mounting portion 4 d on the outer edge, and the mounting portion 4 d is formed along the outer wall 33 from the first main surface 31 side in at least a part of the outer periphery of the metal base 3. The metal mesh 4 is preferably attached to the metal base 3 by being bent toward the two principal surfaces 32. A line indicated by a broken line in the metal mesh 4 shown in FIG. 2 represents a line that is mountain-folded at the time of attachment. Since the attachment of the metal mesh 4 to the metal base 3 is performed by bending the attachment portion 4d in this manner, the metal mesh 4 is detached from the metal base 3 by bending the bent attachment portion 4d in reverse. It can be easily removed. Installation and removal can be repeated. With such a configuration, when a problem occurs in one of the metal mesh 4 and the metal substrate 3, the defective object can be easily replaced. Note that the attachment portion 4d provided in the metal mesh 4 shown in FIG. 2 is merely an example, and the shape, position, and size of the attachment portion are not limited to the example shown in FIG.

  As shown in FIG. 2 to FIG. 4, the metal mesh 4 includes a first mesh surface 5 and a second mesh surface 6 which is a surface on the back side of the first mesh surface 5 and has severe irregularities than the first mesh surface 5. It is preferable to have. As shown in FIG. 4, the metal mesh 4 has a peak portion 8 and a valley portion 9 in one cross-sectional shape. The valley 9 is located between the two peaks 8. The peak 8 is located between the two valleys 9. The peak 8 protrudes toward the second mesh surface 6 side. The valley portion 9 is flat in the example shown in FIG. 4, but may protrude slightly toward the first mesh surface 5 side. However, the protrusion amount in that case is smaller than the protrusion amount of the peak portion 8. As shown in FIG. 4, the height of the peak portion 8 is H, and the pitch of the peak portion 8 is W. For example, the height H is 0.1 mm or more and 0.5 mm or less, and the pitch W is 0.5 mm or more and 2.5 mm or less.

  As described above, the state of the surface is different between the front and back surfaces, so that a desired surface can be used upward as necessary. In addition, it is preferable that the 2nd mesh surface 6 here becomes a surface on which a baking target object is mounted. If this is the case, the contact area between the object to be fired and the metal mesh 4 is reduced, so that the phenomenon in which the object to be fired adheres to the metal mesh 4 is reduced as much as possible during preparatory work or during firing. Because you can.

  In order for the second mesh surface 6 of the metal mesh 4 to be a surface on which the firing object is placed, for example, the first mesh surface 5 of the metal mesh 4 is in contact with the first main surface 31 of the metal base 3. After the metal mesh 4 is disposed, the attachment portion 4d is bent so that the broken line shown in FIG. Then, the second mesh surface 6 facing upward may be a surface on which the firing object is placed. Alternatively, after the metal mesh 4 is arranged so that the second mesh surface 6 of the metal mesh 4 abuts on the second main surface 32 of the metal substrate 3, the broken line shown in FIG. In this way, the metal mesh 4 may be attached to the metal base 3 by bending each other to produce a firing jig, and the second mesh surface 6 facing upward may be the surface on which the firing object is placed.

(Embodiment 2)
With reference to FIGS. 1-8, the baking jig in Embodiment 2 based on this invention is demonstrated. The firing jig in the present embodiment is an example more specifically specifying the one described in the first embodiment. The basic configuration of the firing jig in the present embodiment is the same as that described in the first embodiment.

  In the metal mesh 4 in the present embodiment, enlarged photographs of the first mesh surface 5 are shown in FIGS. 5 and 6. FIGS. 5 and 6 are images of the first mesh surface 5 similarly. Since FIG. 6 was taken with the direction rotated by 180 ° compared to FIG. 5, the top and bottom and the left and right are reversed. Enlarged photographs of the second mesh surface 6 which is the back side of the first mesh surface 5 are shown in FIGS. FIGS. 7 and 8 are images of the second mesh surface 6 similarly. Since FIG. 8 was taken with the orientation rotated by 180 ° compared to FIG. 7, the top and bottom and the left and right are reversed.

  As shown in FIGS. 2 to 4, the metal mesh 4 provided in the firing jig 101 according to the present embodiment includes a first mesh surface 5 and a second mesh surface that is a back surface of the first mesh surface 5. 6. As shown in FIG. 5 and FIG. 6, the first mesh surface 5 includes a first flat portion 21 and a plurality of concave portions 23 that are lower than the first flat portion 21, and an inner surface of each of the plurality of concave portions 23. It has an opening 7. As shown in FIGS. 7 and 8, the second mesh surface 6 includes a second flat portion 22 and a plurality of raised portions 24 higher than the second flat portion 22, and faces each of the plurality of raised portions 24. And the opening 7 passes therethrough. In other words, the opening on the outer surface of the raised portion 24 of the second mesh surface 6 is the same as the opening on the inner surface of the recess 23 of the first mesh surface 5. In FIG. 3, the opening 7 is displayed as a rhombus, but this is merely a conceptual example, and the shape of the opening 7 when viewed in plan is not necessarily a rhombus.

  Also in the present embodiment, the effect described in the first embodiment can be obtained. In the present embodiment, since the roughness is different between one surface and the other surface of the metal mesh 4, a surface having a desired roughness can be selected and used.

  In such a configuration, the second mesh surface 6 is preferably a surface on which the firing object is placed. If the second mesh surface 6 satisfying such a condition is a surface on which the firing object is placed, the contact area between the firing object and the metal mesh 4 is reduced. It is possible to reduce as much as possible the phenomenon in which the firing object sticks to the metal mesh 4.

  The metal mesh 4 may be an expanded metal. Generally, expanded metal is formed by pulling in a plane direction while making staggered cuts in a metal plate. By opening the cut in the surface direction, an opening is formed in the metal plate. The opening formed in this way is usually diamond-shaped or turtle-shaped. Originally, the cuts are provided in a zigzag pattern, and as a result, the openings are provided in a zigzag pattern in the plane of the metal plate. The ratio of the opening to the total area of the metal mesh 4 is 5% or more and 50% or less. If it is an expanded metal, it can form a desired shape easily, maintaining the integrity of a member.

(Embodiment 3)
With reference to FIGS. 9-10, the usage example of the jig | tool for baking is demonstrated as Embodiment 3 based on this invention. The firing jig may be the firing jig 101 described in the first embodiment. As shown in FIG. 9, a plurality of firing jigs 101 are arranged in a radial pattern and used for firing. Therefore, the firing jig 101 has a symmetrical trapezoidal shape. That is, two of the four sides are not parallel. In the example shown in FIG. 9, it is shown that one annular shape is formed by arranging eight firing jigs 101, but the number for forming one annular shape is other than eight. May be.

  In addition, the shape when the firing jig is seen in a plan view is not limited to a trapezoid, and may be another shape.

  FIG. 10 shows a state in which a plurality of firing jigs 101 are stacked. When the firing jigs 101 are stacked, the spacers 11 are used to make a gap between the firing jigs 101 located above and below. The spacers 11 are placed at the four corners on the upper surface side of the firing jig 101. The material of the spacer 11 is a ceramic material, and the surface of the spacer 11 is not smooth but is a rough surface. When stacking the firing jig 101, the upper surface of the metal mesh 4 and the spacer 11 come into contact with each other. When the upper surface of the metal mesh 4 is the second mesh surface 6 having severe unevenness, or the second mesh including the second flat portion 22 and the plurality of raised portions 24 higher than the second flat portion 22. In the case of the surface 6, the second mesh surface 6 and the slightly rough lower surface of the spacer 11 come into contact with each other, and the frictional force increases. Therefore, even when the plurality of stacked firing jigs 101 are collectively loaded into the firing furnace, they are less likely to collapse even if they are slightly inclined.

  The lowest firing jig 101 is placed on the surface of the hearth 13 via the spacer 11.

  In FIG. 10, for convenience of explanation, only one firing jig 101 is shown in one stage. However, a plurality of such stacked jigs are prepared, and as shown in FIG. It is good also as arranging radially.

  In addition, the said embodiment disclosed this time is an illustration in all the points, Comprising: It is not restrictive. The scope of the present invention is defined by the terms of the claims, rather than the description above, and is intended to include any modifications within the scope and meaning equivalent to the terms of the claims.

  The present invention can be used for a firing jig.

3 Metal base, 3a Ventilation part, 4 Metal mesh, 4c Mesh body part, 4d Mounting part, 5 First mesh surface, 6 Second mesh surface, 7 Opening part, 8 Mountain part, 9 Valley part, 11
Spacer, 12 Firing object, 13 Hearth, 21 First flat portion, 22 Second flat portion, 23 Recessed portion, 24 Raised portion, 31 First main surface, 32 Second main surface, 33 Outer side wall, 34 Inner side wall, 101 Firing jig.

Claims (6)

A frame-shaped metal substrate having a first main surface and a second main surface which is a surface on the back side of the first main surface, and surrounding the ventilation portion;
A metal mesh fixed to the metal base so as to cover the ventilation part on the first main surface side of the metal base;
The metal substrate and the metal mesh are firing jigs whose main material is Ni.   2. The firing treatment according to claim 1, wherein the metal mesh has a first mesh surface and a second mesh surface which is a surface on the back side of the first mesh surface and has more unevenness than the first mesh surface. Ingredients. The metal mesh is
A first mesh surface including a first flat portion and a plurality of concave portions that are lower than the first flat portion, and having an opening on each inner surface of the plurality of concave portions;
A second flat portion and a plurality of raised portions that are higher than the second flat portion, the opening passing through each of the plurality of raised portions, and a surface on the back side of the first mesh surface The firing jig according to claim 1, having a second mesh surface.   The firing jig according to claim 2 or 3, wherein the second mesh surface is a surface on which a firing object is placed.   The metal mesh has an attachment portion at an outer edge, and the attachment portion is bent from the first main surface side to the second main surface side in at least a part of the outer periphery of the metal base, whereby the metal mesh The firing jig according to claim 1, wherein a mesh is attached to the metal base.   The firing jig according to claim 1, wherein the metal mesh is an expanded metal.