JPWO2014069063A1 - 弾性表面波センサ - Google Patents
弾性表面波センサ Download PDFInfo
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- G01N29/02—Analysing fluids
- G01N29/022—Fluid sensors based on microsensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices
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Abstract
Description
図1は、第1の実施形態に係るSAWセンサ1を示す斜視図である。
図8は、第2の実施形態に係るSAWセンサのセンサチップ209を示す断面図である。なお、該断面図は、図6(b)の一部に相当する。
図9は、第3の実施形態に係るSAWセンサのセンサチップ309を示す断面図である。なお、該断面図は、図6(b)の一部に相当する。
図10は、第4の実施形態に係るSAWセンサ401を示す分解斜視図である。図11(a)は、図10のXIa−XIa線における断面図であり、図11(b)は図10のXIb−XIb線における断面図である。
図12(a)および図12(b)は、第5の実施形態に係るSAWセンサ501を示す断面図であり、図11(a)および図11(b)に対応している。
図13は、第6の実施形態に係るSAWセンサ601を示す断面図であり、図12(a)の一部に対応している。
図14は、検出部上に検体液を導く流路の形状の変形例を説明する図であり、中層部材717の斜視図である。
Claims (11)
- 圧電基板と、
前記圧電基板の上面に位置しており、検体に含まれる検出対象を検出する検出部と、
前記圧電基板の上面に前記検出部を挟んで位置している一対のIDT電極と、
前記検出部および前記一対のIDT電極を、空間を介して覆っているカバーと、
を備えた弾性表面波センサであって、
前記カバーの下面は、
前記検出部に対向する第1領域と、
前記第1領域に対して、前記検出部および前記一対のIDT電極の並び方向の両側に位置している一対の第2領域と、を有し、
前記第1領域は、前記一対の第2領域よりも前記検体との接触角が小さい
弾性表面波センサ。 - 前記第1領域は、前記検体との接触角が90°未満である
請求項1に記載の弾性表面波センサ。 - 前記カバーは、
前記第1領域および前記一対の第2領域を有する基材と、
前記基材の前記第1領域に積層されたフィルムと、を有し、
前記フィルムの下面は、前記一対の第2領域よりも前記検体との接触角が小さい
請求項1または2に記載の弾性表面波センサ。 - 前記カバーは、
前記第1領域および前記一対の第2領域を有する基材と、
前記基材の前記第1領域の表面に位置し、前記基材の表面よりも前記検体との接触角が小さい表面を有するコーティング層と、を有し、
前記一対の第2領域の表面には、前記コーティング層が位置していない
請求項1または2に記載の弾性表面波センサ。 - 前記カバーの下面は、前記第1領域と前記第1領域よりも下方に突出している前記一対の第2領域とで構成される溝を有している
請求項1〜4のいずれか1項に記載の弾性表面波センサ。 - 前記一対の第2領域は、前記一対のIDT電極にそれぞれ対向している
請求項1〜5のいずれか1項に記載の弾性波表面波センサ。 - 前記圧電基板および前記カバーを収容するパッケージと、
前記パッケージの外部と前記空間とを繋ぐ流路と、をさらに備える
請求項1〜6のいずれか1項に記載の弾性表面波センサ。 - 前記流路の上面は、前記第1領域と同一面内に位置しており、
前記流路の上面は、前記一対の第2領域よりも前記検体との接触角が小さい
請求項7に記載の弾性表面波センサ。 - 上面に前記圧電基板が位置している下層部をさらに備え、
前記カバーは、
前記下層部上に位置し、前記圧電基板の側方に位置している中層部と、
前記中層部上に位置し、前記圧電基板の上方を覆う上層部と、を有している
請求項1〜6のいずれか1項に記載の弾性表面波センサ。 - 前記中層部は、
前記下層部上に位置している第1層と、
前記第1層上に位置している第2層と、を有し、
前記検出部および前記一対のIDT電極の並び方向において、前記第1層は、前記第2層よりも前記圧電基板に近い
請求項9に記載の弾性表面波センサ。 - 前記第1層の上面のうち前記第2層から露出している露出面は、前記一対の第2領域よりも前記検体との接触角が小さく、かつ、前記第1領域よりも前記検体との接触角が大きい
請求項10に記載の弾性表面波センサ。
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Application Number | Priority Date | Filing Date | Title |
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JP2012237819 | 2012-10-29 | ||
JP2012237819 | 2012-10-29 | ||
PCT/JP2013/070808 WO2014069063A1 (ja) | 2012-10-29 | 2013-07-31 | 弾性表面波センサ |
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JP2016081366A Division JP6111469B2 (ja) | 2012-10-29 | 2016-04-14 | 弾性表面波センサ |
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JP2016081366A Active JP6111469B2 (ja) | 2012-10-29 | 2016-04-14 | 弾性表面波センサ |
JP2017014008A Active JP6312347B2 (ja) | 2012-10-29 | 2017-01-30 | 弾性表面波センサ |
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JP (3) | JP5922791B2 (ja) |
WO (1) | WO2014069063A1 (ja) |
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JP5922791B2 (ja) * | 2012-10-29 | 2016-05-24 | 京セラ株式会社 | 弾性表面波センサ |
US9885689B2 (en) * | 2013-11-29 | 2018-02-06 | Kyocera Corporation | Sensor apparatus |
US10627367B2 (en) * | 2015-03-30 | 2020-04-21 | Kyocera Corporation | Liquid specimen sensor and method of measuring liquid specimen |
TWI627381B (zh) * | 2016-10-21 | 2018-06-21 | 台灣艾華電子工業股份有限公司 | 彎曲感測器 |
IL310599A (en) * | 2017-07-07 | 2024-04-01 | Aviana Molecular Tech Llc | Methods and devices for interfacing sensors with liquid materials |
US11141726B2 (en) * | 2017-11-13 | 2021-10-12 | Lifeos Genomics Corporation | Cartridge and method of distributing biological sample in fluid channel thereof |
KR102032376B1 (ko) * | 2018-05-02 | 2019-10-16 | 해성디에스 주식회사 | 센서 패키지 및 이를 포함하는 센서 패키지 모듈 |
CN109088614A (zh) * | 2018-06-28 | 2018-12-25 | 深圳华远微电科技有限公司 | 声表面波滤波器及其封装方法和电子设备 |
EP3961922A4 (en) * | 2019-04-26 | 2022-11-16 | Kyocera Corporation | METHOD FOR MANUFACTURING A SENSOR DEVICE AND SENSOR DEVICE |
EP4329745A1 (en) * | 2021-04-28 | 2024-03-06 | Obi Pharma, Inc. | Combination therapy by using akr1c3-activated compound with immune checkpoint inhibitor |
Family Cites Families (42)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5130257A (en) * | 1988-09-29 | 1992-07-14 | Hewlett-Packard Company | Chemical sensor utilizing a surface transverse wave device |
US5306727A (en) | 1993-04-30 | 1994-04-26 | Research Corporation Technologies, Inc. | Phosphoramidates useful as antitumor agents |
JPH07198428A (ja) * | 1993-12-28 | 1995-08-01 | Meidensha Corp | 弾性表面波センサ |
US20040099310A1 (en) * | 2001-01-05 | 2004-05-27 | Per Andersson | Microfluidic device |
US6482953B1 (en) | 2001-12-03 | 2002-11-19 | Eastman Kodak Company | 2-benzyloxy-4-nitro-5-substituted-acylanilide compounds and method of using them |
ZA200507752B (en) | 2003-03-28 | 2007-01-31 | Threshold Pharmaceuticals Inc | Compositions and methods for treating cancer |
US20040214798A1 (en) | 2003-04-22 | 2004-10-28 | Longqin Hu | Nitroaryl phosphoramide compositions and methods for targeting and inhibiting undesirable cell growth or proliferation |
KR101130956B1 (ko) * | 2003-11-14 | 2012-03-30 | 쓰리엠 이노베이티브 프로퍼티즈 컴파니 | N-술포닐아미노카르보닐 함유 화합물 |
EP1700108A1 (en) * | 2003-12-30 | 2006-09-13 | 3M Innovative Properties Company | Surface acoustic wave sensor assemblies |
JP4824580B2 (ja) * | 2003-12-30 | 2011-11-30 | スリーエム イノベイティブ プロパティズ カンパニー | 検出カートリッジ |
DE102004020570A1 (de) | 2004-04-27 | 2005-11-24 | Bayer Healthcare Ag | Substituierte Phenylaminopyrimidine |
WO2006057946A2 (en) | 2004-11-22 | 2006-06-01 | Threshold Pharmaceuticals, Inc. | Tubulin binding anti cancer agents and prodrugs thereof |
JP4628075B2 (ja) * | 2004-12-03 | 2011-02-09 | 日本無線株式会社 | センサ |
JP4618492B2 (ja) * | 2004-12-24 | 2011-01-26 | セイコーエプソン株式会社 | 弾性表面波センサ |
JP2007010378A (ja) | 2005-06-28 | 2007-01-18 | Seiko Epson Corp | 弾性表面波素子及びその製造方法、弾性表面波センサ、並びに弾性表面波センサシステム |
JP5180824B2 (ja) | 2005-06-29 | 2013-04-10 | スレッシュホールド ファーマシューティカルズ, インコーポレイテッド | ホスホルアミデートアルキル化剤プロドラッグ |
RU2467007C2 (ru) | 2005-12-21 | 2012-11-20 | Эбботт Лэборетриз | Производные [1,8]нафтиридина, полезные в качестве ингибиторов репликации вируса hcv |
WO2007098089A2 (en) | 2006-02-17 | 2007-08-30 | Novacea, Inc. | Treatment of hyperproliferative diseases with methotrexate n-oxide and analogs |
JP4811267B2 (ja) * | 2006-12-22 | 2011-11-09 | パナソニック株式会社 | マイクロチップ及びそれを用いた分析デバイス |
WO2008083101A1 (en) | 2006-12-26 | 2008-07-10 | Threshold Pharmaceuticals, Inc. | Phosphoramidate alkylator prodrugs for the treatment of cancer |
WO2008081181A1 (en) * | 2006-12-28 | 2008-07-10 | Highland Biosciences Limited | Biosensor |
WO2008151253A1 (en) | 2007-06-04 | 2008-12-11 | Threshold Pharmaceuticals, Inc. | Hypoxia activated prodrugs of antineoplastic agents |
DE602007011745D1 (de) * | 2007-07-10 | 2011-02-17 | Roche Diagnostics Gmbh | Mikrofluidische Vorrichtung, Mischverfahren und Verwendung der Vorrichtung |
WO2009018163A1 (en) | 2007-07-27 | 2009-02-05 | Threshold Pharmaceuticals, Inc. | Hypoxia activated prodrugs of anthracyclines |
JP2009150754A (ja) * | 2007-12-20 | 2009-07-09 | Seiko Epson Corp | 生体試料反応用チップ、生体試料反応装置、および生体試料反応方法 |
US8263025B2 (en) * | 2008-02-01 | 2012-09-11 | Nippon Telegraph And Telephone Corporation | Flow cell |
EP2703500B1 (en) * | 2008-05-09 | 2020-01-08 | Akonni Biosystems | Microarray system |
WO2010044686A1 (en) | 2008-10-17 | 2010-04-22 | Auckland Uniservices Limited | Akr1c3 as a biomarker, methods of selecting and treating patients based upon an akr1c3 profile and compounds for use therein |
ES2884674T3 (es) | 2008-10-21 | 2021-12-10 | Immunogenesis Inc | Tratamiento del cáncer con el profármaco activado por hipoxia TH-302 en combinación con docetaxel o pemetrexed |
US20100145294A1 (en) * | 2008-12-05 | 2010-06-10 | Xuedong Song | Three-dimensional vertical hydration/dehydration sensor |
JPWO2010073484A1 (ja) * | 2008-12-25 | 2012-06-07 | 株式会社村田製作所 | 弾性波センサー |
WO2010150587A1 (ja) * | 2009-06-25 | 2010-12-29 | 株式会社 村田製作所 | 弾性表面波センサー |
BR112012012471A2 (pt) | 2009-11-24 | 2016-11-01 | Univ Rutgers | compostos, composições e métodos para tratamento de infecções de protozoários |
EP3311835B1 (en) | 2010-07-12 | 2021-03-24 | Threshold Pharmaceuticals Inc. | Administration of hypoxia activated prodrugs and antiangiogenic agents for the treatment of cancer |
JP2012181093A (ja) * | 2011-03-01 | 2012-09-20 | Japan Radio Co Ltd | 弾性表面波センサ |
CN102924507A (zh) | 2011-11-10 | 2013-02-13 | 安徽四维药业有限公司 | 一种抗肿瘤化合物及其制备方法与应用、药物组合物 |
JP5922791B2 (ja) * | 2012-10-29 | 2016-05-24 | 京セラ株式会社 | 弾性表面波センサ |
JP6356160B2 (ja) | 2013-02-25 | 2018-07-11 | ザ スクリプス リサーチ インスティテュート | ネオセプチン:低分子アジュバント |
WO2015051921A1 (en) | 2013-10-10 | 2015-04-16 | Merck Patent Gmbh | Synthesis of 1-alkyl-2-amino-imidazol-5-carboxylic acid ester via calpha-substituted n-alkyl-glycine ester derivatives |
AU2016229136B2 (en) | 2015-03-10 | 2018-08-09 | Obi Pharma, Inc. | DNA alkylating agents |
BR112017021167A2 (pt) | 2015-04-02 | 2018-07-03 | Obi Pharma, Inc. | composto, método de tratamento de câncer, e processo para preparar o composto de fórmula i |
TWI772263B (zh) | 2015-06-24 | 2022-08-01 | 美商免疫原公司 | 含有dna烷化劑之氮丙啶 |
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