JPWO2013088927A1 - 圧電配向セラミックスおよび圧電アクチュエータ - Google Patents
圧電配向セラミックスおよび圧電アクチュエータ Download PDFInfo
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- 239000000919 ceramic Substances 0.000 title claims abstract description 116
- 238000000034 method Methods 0.000 claims abstract description 17
- 230000008878 coupling Effects 0.000 abstract description 14
- 238000010168 coupling process Methods 0.000 abstract description 14
- 238000005859 coupling reaction Methods 0.000 abstract description 14
- 239000013078 crystal Substances 0.000 abstract description 7
- 239000000843 powder Substances 0.000 description 20
- 239000002002 slurry Substances 0.000 description 10
- 239000000203 mixture Substances 0.000 description 9
- 239000010936 titanium Substances 0.000 description 8
- 238000010586 diagram Methods 0.000 description 7
- 150000001875 compounds Chemical class 0.000 description 6
- 230000004907 flux Effects 0.000 description 6
- 239000002994 raw material Substances 0.000 description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 5
- PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Substances [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 5
- 230000010287 polarization Effects 0.000 description 5
- 238000002441 X-ray diffraction Methods 0.000 description 3
- 238000006073 displacement reaction Methods 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 230000007246 mechanism Effects 0.000 description 3
- 238000000465 moulding Methods 0.000 description 3
- 239000002904 solvent Substances 0.000 description 3
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 229910052787 antimony Inorganic materials 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 230000008602 contraction Effects 0.000 description 2
- 239000002270 dispersing agent Substances 0.000 description 2
- 238000010304 firing Methods 0.000 description 2
- 229910000464 lead oxide Inorganic materials 0.000 description 2
- 229910000480 nickel oxide Inorganic materials 0.000 description 2
- 229910052758 niobium Inorganic materials 0.000 description 2
- 239000010955 niobium Substances 0.000 description 2
- 229910000484 niobium oxide Inorganic materials 0.000 description 2
- URLJKFSTXLNXLG-UHFFFAOYSA-N niobium(5+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Nb+5].[Nb+5] URLJKFSTXLNXLG-UHFFFAOYSA-N 0.000 description 2
- YEXPOXQUZXUXJW-UHFFFAOYSA-N oxolead Chemical compound [Pb]=O YEXPOXQUZXUXJW-UHFFFAOYSA-N 0.000 description 2
- GNRSAWUEBMWBQH-UHFFFAOYSA-N oxonickel Chemical compound [Ni]=O GNRSAWUEBMWBQH-UHFFFAOYSA-N 0.000 description 2
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 2
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 238000005406 washing Methods 0.000 description 2
- 229910001928 zirconium oxide Inorganic materials 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 229910052748 manganese Inorganic materials 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 239000011268 mixed slurry Substances 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000009774 resonance method Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000010998 test method Methods 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
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Abstract
ペロブスカイト構造である圧電配向セラミックスにおいて、ペロブスカイト構造における<100>軸の配向度をLotgering法により算出した場合、圧電セラミックスの所定の断面における配向度が他の端面における配向度と比較して最も高くなる断面の法線方向をペロブスカイト構造における<100>配向方向として、圧電配向セラミックスとして主として使用する振動モードのうちの少なくとも一つの振動モードについて、その振動方向とのなす角が、30°以上75°以下の角度であることを特徴とする、圧電配向セラミックス、およびこの圧電配向セラミックスを用いた圧電アクチュエータである。
Description
また、この発明にかかる圧電アクチュエータは、ペロブスカイト構造を有する圧電配向セラミックスからなる素子を含む圧電アクチュエータにおいて、圧電配向セラミックスは、ペロブスカイト構造におけるペロブスカイト構造における<100>軸の配向度をLotgering法により算出した場合、圧電セラミックスの所定の断面における配向度が他の断面における配向度と比較して最も高くなる断面の法線方向をペロブスカイト構造における<100>配向方向として、圧電アクチュエータとして主として使用する振動モードのうちの少なくとも一つの振動モードについて、その振動方向とペロブスカイト構造における<100>配向方向とのなす角が、30°以上75°以下の角度であることを特徴とする、圧電アクチュエータである。
また、この発明にかかる圧電アクチュエータによれば、ペロブスカイト構造である圧電配向セラミックスからなる圧電アクチュエータにおいて、圧電配向セラミックスが、ペロブスカイト構造における<100>軸の配向度をLotgering法により算出した場合、圧電セラミックスの所定の断面における配向度が他の断面における配向度と比較して最も高くなる断面の法線方向をペロブスカイト構造における<100>配向方向として、圧電アクチュエータとして主として使用する振動モードのうちの少なくとも一つの振動モードについて、その振動方向とペロブスカイト構造における<100>配向方向とのなす角が、30°以上75°以下の角度であるので、良好な圧電d定数を有する圧電アクチュエータを得ることができる。
本発明に係る圧電配向セラミックスは、ペロブスカイト構造である圧電配向セラミックスである。また、この圧電配向セラミックスは、Pb((Ti1-xZrx)1-y(Ma1/3Mb2/3)y)O3系化合物で表され、MaとしてはNi,Mn,Fe,Co,Zn,Sn,Mgの少なくとも1種類、MbとしてはNb,Sb,Wの少なくとも1種類である化合物、またはPb((Ti1-xZrx)1-y(Cr1/2Mb1/2)y)O3系化合物で表され、MbとしてはNb,Sb,Wの少なくとも1種類である化合物、たとえば、Pb((Ti1-xZrx)1-y(Ni1/3Nb2/3)y)O3(PNN−PZT)系化合物を主成分とする。
次に、本発明にかかる圧電アクチュエータの一実施の形態について説明する。
得られた焼結体から長軸方向8mm、短軸方向3mm、厚み1mmの矩形板を、矩形板の長手方向とペロブスカイト構造における<100>配向方向とのなす角が0°〜90°となるように圧電配向セラミックスの素体を切り出した。なお、圧電配向セラミックスの素体の切り出しは、矩形板の長手方向とペロブスカイト構造における<100>配向方向とのなす角に応じて切り出され、表1に示すように、試料1ないし試料9が得られた。
12 圧電セラミック素体
14a、14b 外部電極
16 内部電極
18a、18b セラミック層
Claims (2)
- ペロブスカイト構造を有する圧電配向セラミックスにおいて、
ペロブスカイト構造における<100>軸の配向度をLotgering法により算出した場合、圧電セラミックスの所定の断面における配向度が他の断面における配向度と比較して最も高くなる断面の法線方向をペロブスカイト構造における<100>配向方向として、
圧電配向セラミックスとして主として使用する振動モードのうちの少なくとも一つの振動モードについて、その振動方向とペロブスカイト構造における<100>配向方向とのなす角が、30°以上75°以下の角度であることを特徴とする、圧電配向セラミックス。 - ペロブスカイト構造を有する圧電配向セラミックスからなる圧電アクチュエータにおいて、
前記圧電配向セラミックスは、
ペロブスカイト構造における<100>軸の配向度をLotgering法により算出した場合、圧電セラミックスの所定の断面における配向度が他の断面における配向度と比較して最も高くなる断面の法線方向をペロブスカイト構造における<100>配向方向として、
圧電アクチュエータとして主として使用する振動モードのうちの少なくとも一つの振動モードについて、その振動方向とペロブスカイト構造における<100>配向方向とのなす角が、30°以上75°以下の角度であることを特徴とする、圧電アクチュエータ。
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JPH1160333A (ja) * | 1997-08-21 | 1999-03-02 | Toyota Central Res & Dev Lab Inc | 圧電セラミックス |
JP2002193663A (ja) * | 2000-12-22 | 2002-07-10 | Ricoh Co Ltd | 結晶配向ペロブスカイト型化合物の焼結体、該焼結体の製造方法、該化合物に用いられるセラミックス粉体の成形体、及び板状結晶配向ペロブスカイト型化合物 |
JP2008037064A (ja) * | 2006-08-10 | 2008-02-21 | Murata Mfg Co Ltd | 配向性セラミックスの製造方法 |
JP2011181828A (ja) * | 2010-03-03 | 2011-09-15 | Fujifilm Corp | 圧電体膜とその製造方法、圧電素子および液体吐出装置 |
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JPH1160333A (ja) * | 1997-08-21 | 1999-03-02 | Toyota Central Res & Dev Lab Inc | 圧電セラミックス |
JP2002193663A (ja) * | 2000-12-22 | 2002-07-10 | Ricoh Co Ltd | 結晶配向ペロブスカイト型化合物の焼結体、該焼結体の製造方法、該化合物に用いられるセラミックス粉体の成形体、及び板状結晶配向ペロブスカイト型化合物 |
JP2008037064A (ja) * | 2006-08-10 | 2008-02-21 | Murata Mfg Co Ltd | 配向性セラミックスの製造方法 |
JP2011181828A (ja) * | 2010-03-03 | 2011-09-15 | Fujifilm Corp | 圧電体膜とその製造方法、圧電素子および液体吐出装置 |
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