JPWO2013084900A1 - 積層体、及び積層体の製造方法 - Google Patents
積層体、及び積層体の製造方法 Download PDFInfo
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Abstract
Description
周期的な凹凸部を表面に有する反射防止構造体と、
前記凹凸部上に成膜される透明導電膜とを有し、
最外側の凸部を除く任意の凸部と、該任意の凸部からの距離の合計が最短である6個の凸部とは、(1)該6個の凸部のうちの4個の前記凸部のそれぞれと前記任意の凸部との間に凸部の頂点よりも低く凹部の底点よりも高い位置で凸部同士を連結する連結部が存在し、(2)該6個の凸部のうちの残りの2個の前記凸部のそれぞれと前記任意の凸部との間に凹部が存在するように、配置されることを特徴とする。
周期的な凹凸部を表面に有する原型を用いて周期的な凹凸部を表面に有する反射防止構造体を製造する工程と、
前記反射防止構造体の前記凹凸部上に透明導電膜を成膜する工程とを有し、
前記原型において、最外側の凸部を除く任意の凸部と、該任意の凸部からの距離の合計が最短である6個の凸部とは、(1)該6個の凸部のうちの4個の前記凸部のそれぞれと前記任意の凸部との間に凸部の頂点よりも低く凹部の底点よりも高い位置で凸部同士を連結する連結部が存在し、(2)該6個の凸部のうちの残りの2個の前記凸部のそれぞれと前記任意の凸部との間に凹部が存在するように、配置されることを特徴とする。
図1は、本発明の第1の実施形態による積層体の一部を示す斜視図である。図1において、積層体の表面の凹凸を表現するため、等高線を細線で示す。
(1)6個の凸部21−2〜21−7のうちの4個の凸部21−2、21−3、21−5、21−6のそれぞれと、凸部21−1との間に連結部23が存在する。
(2)6個の凸部21−2〜21−7のうちの残りの2個の凸部21−4、21−7のそれぞれと、凸部21−1との間に凹部22が存在する。
(3)6個の凹部22−2〜22−7のうちの4個の凹部22−2、22−3、22−5、22−6のそれぞれと、凹部22−1との間に連結部23が存在する。
(4)6個の凹部22−2〜22−7のうちの残りの2個の凹部22−4、22−7のそれぞれと、凹部22−1との間に凸部21が存在する。
(5)6個の凸部61−2〜61−7のうちの4個の凸部61−2、61−3、61−5、61−6のそれぞれと、凸部61−1との間に連結部63が存在する。
(6)6個の凸部61−2〜61−7のうちの残りの2個の凸部61−4、61−7のそれぞれと、凸部61−1との間に凹部62が存在する。
図10は、本発明の第2の実施形態による積層体の一部を示す斜視図である。図10において、積層体の表面の凹凸を表現するため、等高線を細線で示す。
(7)6個の凸部121−2〜121−7のうちの4個の凸部121−2、121−3、121−5、121−6のそれぞれと、凸部121−1との間に連結部123が存在する。
(8)6個の凸部121−2〜121−7のうちの残りの2個の凸部121−4、121−7のそれぞれと、凸部121−1との間に凹部122が存在する。
実施例1では、図6、図7及び図9に示す方法で周期的な凹凸部を表面に有する反射防止構造体を作製し、反射防止構造体の凹凸部上に透明導電膜を成膜して積層体を作製した。反射防止構造体の凹凸部の凸部は、正六方格子状に周期的に配置した。
比較例1では、従来の凹凸部を表面に有する反射防止構造体を作製し、反射防止構造体の凹凸部上に透明導電膜を成膜して積層体を作製した。反射防止構造体の凹凸部の凸部は、正六方格子状に周期的に配置した。
10 反射防止構造体
20 凹凸部
21 凸部
21a 頂点
22 凹部
22a 底点
23 連結部
30 透明導電膜
50 原型
51 基体
52 レジスト膜
53、54 感光部
Claims (12)
- 周期的な凹凸部を表面に有する反射防止構造体と、
前記凹凸部上に成膜される透明導電膜とを有し、
最外側の凸部を除く任意の凸部と、該任意の凸部からの距離の合計が最短である6個の凸部とは、(1)該6個の凸部のうちの4個の前記凸部のそれぞれと前記任意の凸部との間に凸部の頂点よりも低く凹部の底点よりも高い位置で凸部同士を連結する連結部が存在し、(2)該6個の凸部のうちの残りの2個の前記凸部のそれぞれと前記任意の凸部との間に凹部が存在するように、配置されることを特徴とする積層体。 - 前記任意の凸部を中心に交差する3方向のうち、2方向に沿って前記凸部と前記連結部とが交互に配置され、残りの一方向に沿って前記前記凸部と前記凹部とが交互に配置される請求項1に記載の積層体。
- 前記凸部は、正六方格子状に周期的に配置される請求項1又は2に記載の積層体。
- 前記凸部は、正四方格子状に周期的に配置される請求項1又は2に記載の積層体。
- 金属電極層、発光層、透明電極層、及び透明基板が積層された構成を有し、
前記透明電極層は、請求項1乃至4のいずれか1項に記載の積層体で形成された表示装置。 - 金属電極層、発光層、透明電極層、及び透明基板が積層された構成を有し、
前記透明電極層は、請求項1乃至4のいずれか1項に記載の積層体で形成された照明装置。 - 金属電極層、発電層、透明電極層、及び透明基板が積層された構成を有し、
前記透明電極層は、請求項1乃至4のいずれか1項に記載の積層体で形成された太陽電池。 - 周期的な凹凸部を表面に有する原型を用いて周期的な凹凸部を表面に有する反射防止構造体を製造する工程と、
前記反射防止構造体の前記凹凸部上に透明導電膜を成膜する工程とを有し、
前記原型において、最外側の凸部を除く任意の凸部と、該任意の凸部からの距離の合計が最短である6個の凸部とは、(1)該6個の凸部のうちの4個の前記凸部のそれぞれと前記任意の凸部との間に凸部の頂点よりも低く凹部の底点よりも高い位置で凸部同士を連結する連結部が存在し、(2)該6個の凸部のうちの残りの2個の前記凸部のそれぞれと前記任意の凸部との間に凹部が存在するように、配置されることを特徴とする積層体の製造方法。 - 前記任意の凸部を中心に交差する3方向のうち、2方向に沿って前記凸部と前記連結部とが交互に配置され、残りの一方向に沿って前記前記凸部と前記凹部とが交互に配置される請求項8に記載の積層体の製造方法。
- 前記原型を製造する工程をさらに有し、
該工程は、
基体上にレジスト膜を成膜する工程と、
該レジスト膜の表面に、第1の方向に沿って光強度が変化する第1の干渉縞を露光する工程と、
該レジスト膜の表面に、前記第1の方向と交差する第2の方向に沿って光強度が変化する第2の干渉縞を露光する工程と、
前記第1及び第2の干渉縞の露光後に、前記レジスト膜を現像する工程とを有する請求項8又は9に記載の積層体の製造方法。 - 前記第1の方向と前記第2の方向とのなす角が60°である請求項10に記載の積層体の製造方法。
- 前記第1の方向と前記第2の方向とのなす角が90°である請求項10に記載の積層体の製造方法。
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