JPWO2013008850A1 - 発熱点検出方法及び発熱点検出装置 - Google Patents
発熱点検出方法及び発熱点検出装置 Download PDFInfo
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- JPWO2013008850A1 JPWO2013008850A1 JP2013523964A JP2013523964A JPWO2013008850A1 JP WO2013008850 A1 JPWO2013008850 A1 JP WO2013008850A1 JP 2013523964 A JP2013523964 A JP 2013523964A JP 2013523964 A JP2013523964 A JP 2013523964A JP WO2013008850 A1 JPWO2013008850 A1 JP WO2013008850A1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/302—Contactless testing
- G01R31/308—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation
- G01R31/311—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation of integrated circuits
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N25/00—Investigating or analyzing materials by the use of thermal means
- G01N25/72—Investigating presence of flaws
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Abstract
Description
Claims (4)
- 集積回路の発熱点の深さを検出する発熱点検出方法であって、
前記集積回路に第1の周波数で増減する周期的電気信号を供給し、それに応じて前記集積回路から検出される発熱量の変化を示す第1の検出信号を取得する第1ステップと、
前記集積回路に前記第1の周波数と異なる第2の周波数で増減する周期的電気信号を供給し、それに応じて前記集積回路から検出される発熱量の変化を示す第2の検出信号を取得する第2ステップと、
前記第1の周波数の周期的電気信号と前記第1の検出信号との間の第1の位相差、及び前記第2の周波数の周期的電気信号と前記第2の検出信号との間の第2の位相差を検出する第3ステップと、
前記第1及び第2の位相差に基づいて、前記周期的電気信号の周波数から算出される変数に対する前記周期的電気信号と前記検出信号との間の位相差の変化率を算出し、前記変化率から前記発熱点の深さ情報を得る第4ステップと、
を備えることを特徴とする発熱点検出方法。 - 前記第4ステップでは、前記周波数の平方根である前記変数に対する前記位相差の変化率を算出する、
ことを特徴とする請求項1記載の発熱点検出方法。 - 前記第1ステップ及び第2ステップで供給する前記周期的電気信号のデューティ比は、互いに等しい、
ことを特徴とする請求項1又は2記載の発熱点検出方法。 - 集積回路の発熱点の深さを検出する発熱点検出装置であって、
前記集積回路に電気信号を供給する電気信号供給部と、
前記集積回路に第1の周波数で増減する周期的電気信号、及び前記第1の周波数と異なる第2の周波数で増減する周期的電気信号を供給するように前記電気信号供給部を制御する制御部と、
前記第1の周波数の周期的電気信号の供給に応じて前記集積回路から検出される発熱量の変化を示す第1の検出信号を取得するとともに、前記第2の周波数の周期的電気信号の供給に応じて前記集積回路から検出される発熱量の変化を示す第2の検出信号を取得する検出部と、
前記第1の周波数の周期的電気信号と前記第1の検出信号との間の第1の位相差、及び前記第2の周波数の周期的電気信号と前記第2の検出信号との間の第2の位相差を検出する位相差検出部と、
前記第1及び第2の位相差に基づいて、前記周期的電気信号の周波数から算出される変数に対する前記周期的電気信号と前記検出信号との間の位相差の変化率を算出し、前記変化率から前記発熱点の深さ情報を得る演算部と、
を備えることを特徴とする発熱点検出装置。
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PCT/JP2012/067706 WO2013008850A1 (ja) | 2011-07-13 | 2012-07-11 | 発熱点検出方法及び発熱点検出装置 |
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US10401229B2 (en) | 2016-11-22 | 2019-09-03 | Honeywell International Inc. | Systems and methods for icing resistant total air temperature probes |
US10337931B2 (en) * | 2017-01-05 | 2019-07-02 | Honeywell International Inc. | Systems and methods for icing resistant total air temperature probes with air jets |
US10436649B2 (en) | 2017-05-01 | 2019-10-08 | Honeywell International Inc. | Icing resistance total temperature probe with integrated ejector |
US11105691B2 (en) | 2018-03-30 | 2021-08-31 | Honeywell International Inc. | Self-regulating heating system for a total air temperature probe |
CN110688820A (zh) * | 2019-12-10 | 2020-01-14 | 北京唯智佳辰科技发展有限责任公司 | 一种集成电路电源网络层版图热点的检测方法及装置 |
KR20230015903A (ko) * | 2020-05-26 | 2023-01-31 | 하마마츠 포토닉스 가부시키가이샤 | 반도체 디바이스 검사 방법 및 반도체 디바이스 검사 장치 |
CN115552261A (zh) * | 2020-05-26 | 2022-12-30 | 浜松光子学株式会社 | 半导体器件检查方法及半导体器件检查装置 |
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CN103688160A (zh) | 2014-03-26 |
KR101911979B1 (ko) | 2018-10-25 |
US20140169403A1 (en) | 2014-06-19 |
US10371746B2 (en) | 2019-08-06 |
TW201312103A (zh) | 2013-03-16 |
EP2733482A1 (en) | 2014-05-21 |
JP5745629B2 (ja) | 2015-07-08 |
TWI537558B (zh) | 2016-06-11 |
KR20140041702A (ko) | 2014-04-04 |
US20170123004A1 (en) | 2017-05-04 |
JP2015165241A (ja) | 2015-09-17 |
JP6250587B2 (ja) | 2017-12-20 |
CN103688160B (zh) | 2015-09-30 |
TW201629477A (zh) | 2016-08-16 |
TWI613437B (zh) | 2018-02-01 |
WO2013008850A1 (ja) | 2013-01-17 |
EP2733482B1 (en) | 2019-01-02 |
EP2733482A4 (en) | 2015-03-04 |
US9575020B2 (en) | 2017-02-21 |
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