JPWO2012042664A1 - Soaking equipment - Google Patents

Abstract

Provided is a soaking apparatus capable of achieving uniform heating of an object to be heat-treated and downsizing of the apparatus. The soaking apparatus includes a plate (1) in which a heat pipe circuit (2) enclosing the working fluid (31) is formed, and a heating means (3) for heating the working fluid (31). The heat pipe circuit (2) has a header part where the hydraulic fluid (31) is heated and vaporized, and a vapor (33) where the hydraulic fluid (31) is vaporized and is condensed by exchanging heat with the plate (1). A plurality of branches that branch. The heating means (3) is provided on the side of the evaporation surface (12) where the hydraulic fluid (31) contacts when the heating means (3) heats the hydraulic fluid (31).

Description

  The present invention relates to a soaking apparatus that heats an object to be heat treated in a soaking state.

  A conventional technique related to a heat treatment plate for heat-treating a heat treatment object in a soaking state is disclosed in, for example, Japanese Patent Application Laid-Open No. 9-314561 (Patent Document 1) or Japanese Patent Application Laid-Open No. 2007-294688 (Patent Document 2). ing.

  FIG. 20 is a perspective view showing a configuration of an example of a conventional heat treatment plate. In the soaking plate shown in FIG. 20, a sealed container 107 is formed by closing both ends of a plurality of through holes 102a formed in the plate 101 with lids 107a and 107b, and the inside of the sealed container 107 is evacuated. After that, a predetermined amount of hydraulic fluid is sealed, and the heater 106 is brought into thermal contact with the bottom surface of the plate 101 via the heat transfer block 104.

  FIG. 21 is a plan view showing the configuration of another example of a conventional heat treatment plate. FIG. 22 is a side view showing the configuration of another example of a conventional heat treatment plate. In the heat treatment plate shown in FIGS. 21 and 22, pipes 123 are arranged in a plurality of holes formed in the plate 121 to form a meandering circuit of a pipe container, and an inlet 141 serving as one end of the meandering circuit. Has an evaporator 143 which forms a single communication circuit with the meandering circuit by connecting an outlet 142 which is the other end of the circuit to the lower part. A predetermined amount of the working fluid 131 is sealed after evacuating the inside of this single communication circuit, and the working fluid 131 is heated by the heater 126 mounted inside the evaporator 143.

JP-A-9-314561 JP 2007-294688 A

  As described above, various techniques relating to a soaking apparatus that uniformly heat-treats an object to be heat-treated have been proposed so far. However, the soaking apparatus is required to heat the target object more uniformly, and in addition, downsizing of the apparatus is also required. In these respects, the conventional devices disclosed in the above documents are not always sufficient, and there is still room for improvement.

  The present invention has been made in view of the above problems, and a main purpose thereof is to provide a soaking apparatus that can uniformly heat a heat treatment target and can achieve downsizing of the apparatus. .

  The soaking apparatus according to the present invention includes a plate in which a heat pipe circuit enclosing a working fluid is formed, and a heating means for heating the working fluid. The heat pipe circuit includes a header portion that heats and vaporizes the working fluid, and a plurality of branches that branch from the header portion that condense and vaporize the vaporized working fluid with the plate. The heating means is provided on the wall surface side of the header portion where the hydraulic fluid contacts when the heating means heats the hydraulic fluid.

  Preferably, in the soaking apparatus, the plate is formed in a rectangular shape in a planar shape, the header portion extends along one side surface of the plate, and the branch portion faces the other side surface of the plate facing the one side surface. It is provided to extend.

  In the soaking apparatus, the plurality of branch portions are preferably arranged in parallel to each other. Preferably, the heat pipe circuit further includes a connecting portion that connects the branch portions. The connecting portion may connect the tips of the branch portions extending from the header portion. A plurality of connecting portions may be provided and arranged in parallel to each other.

  Preferably, in the above soaking apparatus, the heating means includes a heater, a heat transfer block in which a recess is formed and the heater is accommodated in the recess, and a heater pressing plate that holds the heater in the recess.

  Preferably, in the above soaking apparatus, the heating means includes a fixing member that integrally fixes the heater pressing plate and the heat transfer block to the plate.

  The soaking apparatus may include a thermally conductive interposed member interposed between the plate and the heat transfer block. The heating means may include a heat conductive interposition member interposed between the heat transfer block and the heater pressing plate. The heating means may include a heat insulating interposition member interposed between the heat transfer block and the heater pressing plate.

  In the soaking process, the heater pressing plate is preferably formed with a recess for accommodating the heater at a position facing the recess.

  Preferably, in the soaking process, a high-performance boiling surface that promotes boiling of the hydraulic fluid is formed on the wall surface that contacts the hydraulic fluid in the portion where the hydraulic fluid is heated.

  Preferably, in the soaking process, the width in which the heating means is in thermal contact with the plate is equal to or less than the width of the wall surface in contact with the portion of the working fluid heated.

  According to the soaking apparatus of the present invention, the object to be heat-treated can be heated uniformly, and downsizing of the apparatus can be achieved.

It is a top view of the soaking process apparatus of Embodiment 1 of this invention. It is sectional drawing of the soaking | uniform-heating apparatus in alignment with the II-II line | wire shown in FIG. It is sectional drawing of the soaking | uniform-heating apparatus in alignment with the III-III line shown in FIG. It is sectional drawing which shows the detail of a structure of a heating means. It is sectional drawing which shows the 1st modification of the soaking | uniform-heating apparatus of Embodiment 1. FIG. FIG. 6 is a cross-sectional view showing a second modification of the soaking apparatus of the first embodiment. It is sectional drawing which shows the 3rd modification of the soaking | uniform-heating apparatus of Embodiment 1. FIG. It is sectional drawing of the soaking | uniform-heating apparatus of Embodiment 2. FIG. FIG. 5 is a cross-sectional view of a soaking treatment apparatus according to a third embodiment. FIG. 10 is a cross-sectional view of a modification of the soaking apparatus of Embodiment 3. It is sectional drawing of the soaking | uniform-heating process apparatus of Embodiment 4. FIG. It is sectional drawing of the soaking | uniform-heating apparatus of Embodiment 5. FIG. It is sectional drawing of the soaking | uniform-heating apparatus of Embodiment 6. FIG. It is sectional drawing which shows the other example of arrangement | positioning of a plate. It is sectional drawing which shows the other example of arrangement | positioning of a plate. FIG. 10 is a plan view of a soaking treatment apparatus according to a seventh embodiment. FIG. 12 is a plan view of another example of the soaking apparatus of the seventh embodiment. FIG. 12 is a plan view of another example of the soaking apparatus of the seventh embodiment. FIG. 12 is a plan view of another example of the soaking apparatus of the seventh embodiment. It is a perspective view which shows the structure of an example of the conventional heat processing plate. It is a top view which shows the structure of the other example of the conventional heat processing plate. It is a side view which shows the structure of the other example of the conventional heat processing plate.

  Embodiments of the present invention will be described below with reference to the drawings. In the following drawings, the same or corresponding parts are denoted by the same reference numerals, and description thereof will not be repeated.

(Embodiment 1)
FIG. 1 is a plan view of a soaking apparatus according to Embodiment 1 of the present invention. 2 is a cross-sectional view of the soaking apparatus along the line II-II shown in FIG. As shown in FIGS. 1 and 2, the soaking apparatus of Embodiment 1 includes a rectangular plate 1. The plate 1 is made of a material having a high thermal conductivity, such as copper and aluminum. The material forming the plate 1 can be arbitrarily selected depending on the soaking performance required for the heat treatment object.

  The plate 1 has a planar shape that is rectangular. The surface 1a which is one side of the plate 1 is formed flat so that a heat treatment object such as an organic material for semiconductor manufacturing can be mounted and heated. The heating means 3 is attached to the back surface 1b which is the other one surface of the plate 1.

  As shown in FIG. 1, a heat pipe circuit 2 is formed inside the plate 1. The heat pipe circuit 2 includes a header portion 2b and a plurality of branch portions 2a branched from the header portion 2b. The header portion 2b is disposed so as to extend along the side surface 1c that forms one side surface of the plate 1 when the plate 1 formed in a planar rectangular shape is viewed in plan. The branch portion 2a is provided so as to extend from the header portion 2b toward the side surface 1d forming the other side surface of the plate 1 facing the side surface 1c. The plurality of branch portions 2a are arranged in parallel to each other as shown in FIG. On the side surface 1c side of the plate 1, each of the plurality of branch portions 2a is connected to the header portion 2b. The circuit inside the plate 1 is formed, for example, by joining a flat plate and a grooved plate.

  The heat pipe circuit 2 is formed by evacuating an internal space 30 formed inside the plate 1 and then filling and enclosing a predetermined amount of hydraulic fluid in the internal space 30. The hydraulic fluid is heated by the heating means 3 as will be described later.

  FIG. 3 is a cross-sectional view of the soaking apparatus along the line III-III shown in FIG. FIG. 2 shows a sectional view of the soaking apparatus in a section including the entire header portion 2b and branch portion 2a of the heat pipe circuit 2 extending from the side surface 1c to the side surface 1d of the plate 1. On the other hand, in FIG. 3, sectional drawing of the soaking | uniform-heating apparatus in the cross section containing only the header part 2b of the heat pipe circuit 2 is shown. FIG. 3 illustrates a state in which the working fluid 31 is filled in the header portion 2b of the heat pipe circuit 2 and the working fluid 31 is in contact with the evaporation surface 12 forming the bottom surface of the header portion 2b having a rectangular cross section. Yes. The hydraulic fluid 31 is in contact with the evaporation surface 12 which is the wall surface of the header portion 2b on the back surface 1b side of the plate 1 inside the header portion 2b.

The header portion 2b that forms part of the heat pipe circuit 2 and the heating means 3 are disposed with the plate 1 interposed therebetween. As shown in FIG. 3, the header portion 2 b of the heat pipe circuit 2 has a width l ₁ . The width in which the heating means 3 is in thermal contact with the plate 1 is the width ₁₀ . The width l ₀ where the heating means 3 is in thermal contact with the plate 1 is equal to or smaller than the width l ₁ of the evaporation surface 12. By defining the dimensions of the heat pipe circuit 2 and the heating means 3 in this way, the heat generated by the heating means 3 is easily transmitted by the hydraulic fluid 31 in the header portion 2b.

If the width l ₀ of the heating means 3 is in contact with the plate 1 is greater than the width l ₁ of the evaporation surface 12 of the header portion 2b, the amount of heat transferred by heat conduction from the heating means 3 to the surface 1a through the back surface 1b of the plate 1 And the temperature may become non-uniform on the side surface 1c side and the side surface 1d side on the surface 1a of the plate 1. The heat generated by the heating means 3 is transmitted to the hydraulic fluid 31, and the entire branch portion 2a is uniformly heated by evaporation and condensation of the hydraulic fluid 31, as will be described later, thereby heating the entire plate 1 more uniformly. can do.

Width l ₀ of the heating means 3 is in contact with the plate 1, with respect to the width l ₁ of the evaporation surface 12, for example, it may be several mm smaller. The optimum dimensions are the material of the plate 1, the thickness of the plate 1 (after processing the heat pipe circuit 2), the thickness of the plate 1 (that is, the distance between the front surface 1 a and the back surface 1 b), and the temperature range to be used. It depends on.

  FIG. 4 is a cross-sectional view showing details of the configuration of the heating means 3, and is an enlarged view of the vicinity of the side surface 1c in FIG. As shown in FIG. 4, the heating unit 3 includes a heater 6, a heat transfer block 4, and a heater pressing plate 10. The heat transfer block 4 is formed with a groove-like recess 4 a for fixing the heater 6. A heater 6, which is an example of a heating member that supplies heat to the working fluid 31 in the heat pipe circuit 2 by generating heat, is incorporated in the concave portion 4 a as a groove portion processed into the heat transfer block 4. The heat transfer block 4 has a function as an accommodating portion for accommodating the heater 6 in the recess 4a. The heater 6 may be, for example, an electric heater.

  A heater 6 is fitted into a recess 4 a formed in the heat transfer block 4, and the inside of the recess 4 a is enclosed by the heater 6 and the heat transfer material 5. The heater 6 is held in the recess 4 a of the heat transfer block 4 by the heater pressing plate 10. The heater pressing plate 10 has a function as a holding member that holds the heater 6 in the recess 4a.

  While the heater 6 is sandwiched between the heat transfer block 4 and the heater holding plate 10 and the heater 6 and the heater holding plate 10 are pressure-bonded with the fixing bolt 9, the heat transfer block 4 is directly behind the header portion 2 b in the plate 1. Fix in close contact with 1b. The heating means 3 includes a fixing bolt 9 as a fixing member that integrally fixes the heater pressing plate 10 and the heat transfer block 4 to the plate 1.

  The heat transfer block 4 is in thermal contact with a part of the back surface 1 b that is one side of the plate 1, and a part of the plate 1 is heated by the heater 6 held in the heat transfer block 4.

  With respect to the operation of the soaking apparatus having the above configuration, the principle of heat transport inside the soaking apparatus will be described with reference to FIGS. 2 and 4, the heat flow 21 in the figure indicates the flow of heat from the heating means 3 toward the plate 1. When the heater 6 is energized and generates heat, the heat is transferred to the contact surface 14 between the plate 1 and the heat transfer block 4 via the heat transfer material 5 and the heat transfer block 4. The heat is further transferred to the evaporation surface 12 at the bottom of the header portion 2 b inside the plate 1 via the inside of the plate 1. The bottom part of the header part 2 b inside the plate 1 is heated by the heat flow 21, whereby the bottom part of the header part 2 b becomes the evaporation surface 12 of the hydraulic fluid 31.

  The working liquid 31 filled in the plate 1 is heated on the evaporation surface 12 in the header portion 2b. Since the inside of the plate 1 is in a vacuum-depressurized state, when the hydraulic fluid 31 is heated, the hydraulic fluid 31 is quickly vaporized to generate vapor bubbles 32. The vapor bubble 32 ascends in the hydraulic fluid 31 and becomes a vapor 33 from the liquid level of the hydraulic fluid 31 and moves in the heat pipe circuit 2 formed in the plate 1 from the side surface 1c side to the side surface 1d surface direction. Then, it branches from the header portion 2b and flows into each of the plurality of branch portions 2a.

  The steam 33 moves in the internal space 30 formed in the plate 1 and moves to the surface 1a side opposite to the back surface 1b to which the heating means 3 is attached. The steam 33 is condensed and liquefied in each part in the branch part 2a of the heat pipe circuit 2 while moving in the internal space 30 from the side face 1c side to the side face 1d side, and is in thermal contact with the branch part 2a. Releases latent heat of condensation in part 1. In this way, the steam 33 is condensed by dissipating heat to the plate 1, and changes its state to the condensate 34. While the steam 33 flows toward the side surface 1d, heat is uniformly transmitted to the plate 1 in the entire branch portion 2a, and the plate 1 absorbs heat from the steam 33, whereby the plate 1 is heated at a uniform temperature.

  Since the pressure of the steam 33 flowing in the branch portion 2a is high on the side surface 1c side of the plate 1 and decreases toward the side surface 1d side, the water level of the working fluid 31 in the branch portion 2a is as shown in FIG. The side 1d side is larger than the 1c side. The hydraulic fluid 31 recirculates from the side surface 1d side to the side surface 1c side filled with the original hydraulic fluid 31 due to the level difference of the water level. In the soaking apparatus of the present embodiment, the heat transport from the heater 6 to the plate 1 described above is repeated.

  The header part 2b functions as a heating part in which the hydraulic fluid 31 is heated and vaporized. The branch part 2a functions as a condensing part in which the steam 33 vaporized from the working liquid 31 is condensed by exchanging heat with the plate 1. The header part 2b has a function as a steam distribution header that distributes the steam 33 generated in the header part 2b to the plurality of branch parts 2a. The header part 2b also has a function as a liquid assembly header in which the condensate 34 obtained by condensing and condensing the vapor 33 in the plurality of branch parts 2a gathers. Each of the plurality of branch portions 2a is formed in a lateral branch tubular shape that extends in a direction intersecting (typically orthogonal) to the extending direction of the header portion 2b with respect to the header tubular header portion 2b.

  According to the soaking apparatus described above, the heating means 3 is provided on the evaporation surface 12 side of the header portion 2b, which is the wall surface with which the working fluid 31 comes into contact when the heating means 3 heats the liquid working fluid 31. ing. Since the evaporation surface 12 is immediately above the contact surface 14 where the plate 1 and the heat transfer block 4 are in contact, the amount of heat directly transferred to the surface 1 a of the plate 1 out of the heat from the heater 6 is small. Most of the heat from the heater 6 is spent heating the hydraulic fluid 31 on the evaporation surface 12. Since the heat pipe circuit 2 and the heating means 3 have the dimensions specified in FIG. 3, the amount of heat transmitted to the hydraulic fluid 31 among the heat generated by the heater 6 is further increased.

  Therefore, while suppressing the heat of the heater 6 from being directly transferred to the plate 1, the working fluid 31 in the plate 1 is evaporated, and the vapor 33 vaporized by the working fluid 31 is diffused to each part in the plate 1. it can. Since the working fluid 31 is evaporated by the header portion 2b in the plate 1 to generate the steam 33, and the steam 33 is condensed by the branch portion 2a, the plate 1 can be heated, so that the surface 1a of the surface 1a of the plate 1 is soaked. Can be improved. Therefore, the heat treatment object mounted on the surface 1a of the plate 1 can be uniformly heated.

  Further, in the above-described soaking apparatus, the entire plate 1 can be heated by one heating means 3, and a plurality of heaters are not required as in the method shown in the prior art of FIG. Therefore, since the number of parts can be reduced, the manufacturing cost of the soaking apparatus can be reduced. Further, since the heat generated by the heater 6 is immediately transmitted to each part of the plate 1 due to the evaporation phenomenon of the hydraulic fluid 31, the temperature rise of the heater 6 can be suppressed and the amount of heat generated to the surroundings can be reduced, thereby reducing the required energy. The running cost of the soaking apparatus can be reduced. In addition, since the evaporation surface 12 is provided inside the plate 1, there is no need to separately provide an evaporation portion as in the prior art of FIGS. Therefore, it is possible to achieve downsizing and further cost reduction of the soaking apparatus, and it is possible to reduce the heat capacity of the plate 1, so that it is possible to obtain a soaking apparatus with high thermal responsiveness.

  FIG. 5 is a cross-sectional view showing a first modification of the soaking apparatus of the first embodiment. The soaking apparatus of the first modification shown in FIG. 5 is different from the configuration shown in FIG. 4 in that it includes a heat conductive interposition member 7 interposed between the plate 1 and the heat transfer block 4. As shown in FIG. 5, when the heat conductive interposition member 7 is sandwiched between the contact surface 14 between the back surface 1 b of the plate 1 and the heat transfer block 4, the contact between the back surface 1 b of the plate 1 and the heat transfer block 4. Thermal resistance is reduced.

  Therefore, since the heat generated by the heater 6 can be more efficiently transmitted to the working fluid 31 via the plate 1, the thermal responsiveness of the soaking apparatus is further improved. In addition, the amount of heat dissipated from the surface of the heat transfer block 4 and the heater pressing plate 10 to the surroundings is reduced, and a soaking apparatus with higher thermal efficiency can be provided.

  FIG. 6 is a cross-sectional view showing a second modification of the soaking apparatus of the first embodiment. The soaking apparatus of the second modification shown in FIG. 6 is shown in FIG. 5 in that the heating means 3 includes a thermally conductive interposing member 8 interposed between the heat transfer block 4 and the heater pressing plate 10. It is different from the configuration. The heat generated in the heater 6 is also transferred to the heater holding plate 10 via the heat transfer material 5. As shown in FIG. 6, when the heat conductive interposition member 8 is sandwiched between the heat transfer block 4 and the heater holding plate 10, the thermal resistance between the heater holding plate 10 and the heat transfer block 4 becomes small. It becomes easy to transfer heat from the heater pressing plate 10 to the heat transfer block 4 as in the heat flow 22 shown in FIG.

  Therefore, the amount of heat lost to the surroundings out of the heat transmitted to the heater pressing plate 10 can be reduced, and the heat flow 22 from the heater pressing plate 10 to the heat transfer block 4 can be increased. The transmitted heat can be transferred to the heat transfer block 4 more efficiently. As a result, the heat transferred from the heat transfer block 4 to the working fluid 31 via the plate 1 to heat the working fluid 31 increases, so that the thermal responsiveness of the soaking apparatus can be further improved.

  FIG. 7 is a cross-sectional view showing a third modification of the soaking apparatus of the first embodiment. The soaking apparatus of the third modified example shown in FIG. 7 has the configuration shown in FIG. 5 in that the heating means 3 includes a heat insulating interposed member 8a interposed between the heat transfer block 4 and the heater pressing plate 10. Is different. In FIG. 6, the example in which the heat conductive interposition member 8 is sandwiched between the heat transfer block 4 and the heater pressing plate 10 has been described, but conversely, as shown in FIG. If the interstitial member 8a having heat insulation is sandwiched between them, the amount of heat flow flowing from the heater 6 to the heater holding plate 10 can be reduced.

  Therefore, the amount of heat released from the heater pressing plate 10 to the surroundings can be reduced, so that the heat generated by the heater 6 can be transmitted to the heat transfer block 4 more efficiently. As a result, the heat transferred from the heat transfer block 4 to the working fluid 31 via the plate 1 to heat the working fluid 31 increases, so that the thermal responsiveness of the soaking apparatus can be further improved. In this case, the heater pressing plate 10 may be formed of a material having low thermal conductivity.

(Embodiment 2)
FIG. 8 is a cross-sectional view of the soaking apparatus of the second embodiment. The soaking apparatus of the second embodiment is different from the first embodiment in that the heating means 3 does not include the heat transfer block 4.

  That is, in the heating means 3 according to the second embodiment, the heat transfer block 4 is not used, and a groove-shaped depression 10 a for fixing the heater 6 to the heater pressing plate 10 is formed. The heater 6 is incorporated in a recess 10 a as a groove processed in the heater pressing plate 10. The heater 6 is accommodated in a recess 10a formed in the heater pressing plate 10, and a heat transfer material 5 is disposed around the heater 6. The inside of the hollow portion 10 a is enclosed by the heater 6 and the heat transfer material 5.

  The heater pressing plate 10 is fixed by a fixing bolt 9 in direct contact with the back surface 1b immediately below the header portion 2b in the plate 1. When the heating means 3 is configured in this way, the number of parts of the soaking apparatus is reduced by not using the heat transfer block 4, and thus the cost of the soaking apparatus can be reduced.

(Embodiment 3)
FIG. 9 is a sectional view of the soaking apparatus of the third embodiment. The soaking apparatus of the third embodiment is different from the first and second embodiments in that the place where the heater 6 is fixed is changed. Specifically, in the first embodiment, both the heat transfer block 4 and the heater pressing plate 10 included in the heating unit 3 are fixed to the plate 1 using the fixing bolts 9. The structure was removable from the plate 1. In the second embodiment, the heater 6 is incorporated in a groove-like depression 10 a for fixing the heater 6 to the heater pressing plate 10. On the other hand, in the third embodiment, the heat transfer block 4 and the plate 1 are thermally integrated by a method such as brazing or welding.

  In the first and second embodiments, the component that fixes the heater 6 (the heat transfer block 4 in the first embodiment and the heater pressing plate 10 in the second embodiment) and the plate 1 are separate members. The contact surface 14 between the component fixing the plate and the plate 1 is not completely in close contact with each other, so that contact thermal resistance is generated. Even when the heat conductive interposition member 7 is arranged between the heat transfer block 4 and the plate 1, the contact heat resistance is reduced, but the heat resistance between the heat transfer block 4 and the plate 1 is completely eliminated. Was difficult. On the other hand, in Embodiment 3, the heat resistance between the heat transfer block 4 and the back surface 1b of the plate 1 is obtained by thermally integrating the heat transfer block 4 and the plate 1 as shown in FIG. Can be made extremely small.

  Therefore, when the heat generated by the heater 6 and transferred to the heat transfer block 4 is further transferred to the plate 1 side via the contact surface 14 between the heat transfer block 4 and the plate 1, part of the heat energy. Can be prevented from being lost. As a result, the amount of heat that is transmitted from the heat transfer block 4 to the working fluid 31 via the plate 1 and heats the working fluid 31 increases, so that the thermal responsiveness of the soaking apparatus can be further improved.

  FIG. 10 is a cross-sectional view of a modification of the soaking apparatus of the third embodiment. 9 and FIG. 10, in the modification shown in FIG. 10, a recess 10 a that accommodates the heater 6 is formed at a position of the heater pressing plate 10 that faces the recess 4 a. The heater 6 is disposed over both the recessed portion 4 a formed in the heat transfer block 4 and the recessed portion 10 a formed in the heater holding plate 10. The interior of the space formed by the recess 4 a and the recess 10 a is enclosed by the heater 6 and the heat transfer material 5.

  The effect of reducing the thermal resistance between the heat transfer block 4 and the back surface 1b of the plate 1 of the soaking apparatus of the third embodiment described with reference to FIG. 9 does not depend on the size of the heat transfer block 4. . That is, as shown in FIG. 10, the same effect can be obtained even if the size of the heat transfer block 4 is reduced and the size of the heater pressing plate 10 is increased. In addition, in the modified example shown in FIG. 10, the size of the heat transfer block 4 is reduced, so that the plate 1 can be cut from a slightly larger material integrally with the heat transfer block 4 and processed. Therefore, the manufacturing time of the soaking apparatus can be shortened, and the manufacturing cost can be reduced.

(Embodiment 4)
FIG. 11 is a cross-sectional view of the soaking apparatus of the fourth embodiment. The soaking apparatus of the fourth embodiment has a structure in which the heater pressing plate 10 of the heating means 3 of the third embodiment is integrally joined to the heat transfer block 4 and integrated.

  When the heat transfer block 4 and the heater pressing plate 10 are separate members that are not thermally integrated as in the first to third embodiments, the heat transferred to the heater pressing plate 10 by the heater 6 is like the heat flow 22. When heat is transmitted to the heat transfer block 4 side, thermal resistance is generated. In the fourth embodiment, the heater pressing plate 10 is thermally integrated with the heat transfer block 4, and the plate 1, the heat transfer block 4 and the entire heater pressing plate 10 are thermally integrated.

  Therefore, the thermal resistance in the path through which the heat generated by the heater 6 is transmitted to the plate 1 is further smaller than that of the third embodiment described above. As a result, the amount of heat that is transmitted from the heat transfer block 4 to the working fluid 31 via the plate 1 and heats the working fluid 31 increases, so that the thermal responsiveness of the soaking apparatus can be further improved.

(Embodiment 5)
FIG. 12 is a cross-sectional view of the soaking apparatus of the fifth embodiment. The soaking apparatus of the fifth embodiment has a high-performance boiling surface 39 that promotes boiling of the working fluid 31 on the evaporation surface 12 that is the wall surface of the header portion 2b of the heat pipe circuit 2 on the side where the heating means 3 is provided. This is different from the fourth embodiment in that it is formed. The high-performance boiling surface 39 is for accelerating heat transfer by boiling heat transfer from the heating means 3 to the plate 1.

  The boiling of the hydraulic fluid 31 is a phenomenon in which the vapor bubbles 32 that have grown on the evaporation surface 12 with the minute bubble nuclei as the starting point are detached from the evaporation surface 12. In order to promote the boiling of the working fluid 31, the evaporation surface 12 may have a structure in which a number of minute dents are formed on the surface and minute bubble nuclei are easily generated. Specifically, the high-performance boiling surface 39 may be a metal particle welded to the evaporation surface 12 of the plate 1 or a groove processed on the evaporation surface 12.

  By providing such a high-performance boiling surface 39, the hydraulic fluid 31 easily boils to become the vapor bubbles 32, and the generation of the vapor 33 is promoted. In the soaking apparatus of the fifth embodiment, the amount of heat transferred to the working fluid 31 can be increased and the amount of heat transferred to the surface 1a by the heat conduction in the plate 1 can be reduced as compared with the first to fourth embodiments. Therefore, since the heat generated by the heater 6 can be used more efficiently for the generation of the steam 33, the thermal responsiveness of the soaking apparatus can be further improved.

(Embodiment 6)
FIG. 13 is a cross-sectional view of the soaking apparatus of the sixth embodiment. In the description of the first embodiment, the groove depth of the branch portion 2a of the heat pipe circuit 2 formed inside the plate 1 is described as being the same throughout the extending direction of the branch portion 2a. It is not limited to a simple configuration. For example, as shown in FIG. 13, the heat pipe circuit 2 may be formed so that the groove depth of the branch portion 2 a on the side surface 1 d side is smaller than that on the side surface 1 c side of the plate 1.

  In this way, when the flat plate 1 is disposed horizontally, the condensate 34 generated by condensing the vapor 33 in the branch portion 2a causes the bottom surface of the inclined branch portion 2a to be viewed from the side surface 1d side. It becomes easy to flow toward the side surface 1c. Thereby, the hydraulic fluid 31 can be easily returned to the header part 2b which heats the hydraulic fluid 31, and the evaporation of the evaporation surface 12 can be prevented and the efficiency of the heat pipe circuit 2 can be improved. Moreover, since the amount of the working fluid 31 required can be reduced, the thermal responsiveness of the soaking apparatus can be further improved.

  In the description of the first to sixth embodiments, the example in which the plate 1 is arranged in the horizontal state has been described. However, the arrangement of the plate 1 is not limited to the horizontal state. 14 and 15 are cross-sectional views showing other examples of the arrangement of the plates 1. As shown in FIG. 14, the plate 1 may be arranged in a vertically standing state, and as shown in FIG. 15, the plate 1 may be arranged in an inclined state.

  Even when the plate 1 is in a vertical state or an inclined state, the heating means on the wall surface side of the header portion 2b of the heat pipe circuit 2 that is in contact with the working liquid 31 when the heating means 3 heats the working liquid. 3 can be arranged, and in this way, the effect of efficiently transferring heat from the heating means 3 to the hydraulic fluid 31 can be obtained in the same manner as described above. In the soaking apparatus arranged as shown in FIGS. 14 and 15, the heating means 3 can be attached to the side surface 1 c side of the plate 1 without being limited to the configuration in which the heating means 3 is provided on the back surface 1 b side of the plate 1. is there.

  By arbitrarily combining the plates 1 in a horizontal, vertical and inclined state, a duct or container surrounding the space can be formed by the soaking apparatus of the present invention. If the object to be heat-treated is accommodated in such a duct or container, the object to be heat-treated can be heated more uniformly.

(Embodiment 7)
FIG. 16 is a plan view of the soaking apparatus of the seventh embodiment. In the description of the first embodiment, an example in which the heat pipe circuit 2 formed inside the plate 1 includes a header portion 2b and branch portions 2a extending orthogonally to the header portion 2b and processed in parallel with each other. However, the present invention is not limited to such a configuration. For example, as shown in FIG. 16, the heat pipe circuit 2 may further include a connecting portion 2d that connects the branch portions 2a extending from the header portion 2b.

  In this way, since the path of the steam 33 generated by heating the hydraulic fluid 31 in the header portion 2b increases, the surface 1a of the plate 1 can be heated more uniformly. If the connecting portion 2d is formed so as to connect the tips of the branch portions 2a, when the heat pipe circuit 2 is formed by machining, the tool is moved relative to the plate 1 so as to follow a loop-shaped path. Can be processed. Therefore, the processing time for processing the plate 1 to form the heat pipe circuit 2 can be shortened, and the manufacturing cost of the soaking apparatus can be further reduced.

  17 to 19 are plan views of other examples of the soaking apparatus of the seventh embodiment. When the heat pipe circuit 2 having the shape shown in FIGS. 17 and 18 is formed, similarly to the configuration of FIG. 16, the effect of increasing the path of the steam 33 and reducing the manufacturing cost of the soaking apparatus can be obtained. . As shown in FIG. 19, if a grid-like heat pipe circuit 2 is formed in which a plurality of connecting portions 2d are provided and the plurality of connecting portions 2d are arranged in parallel to each other, the path of the steam 33 is further increased. The surface 1a of the plate 1 can be heated more uniformly.

  If the heat pipe circuit 2 is formed along the entire periphery of the plate 1 as shown in FIGS. 17 to 19, heating by the steam 33 is performed on all the side surfaces of the plate 1, Temperature drop due to partial heat dissipation can be reduced. Therefore, as shown in FIG. 1 or FIG. 16, compared with the configuration in which the heat pipe circuit 2 is not partially provided on the end portion side of the plate 1 on the side away from the header portion 2b, the heat uniformity of the plate 1 is further increased. Can be improved.

  Although the embodiments of the present invention have been described above, the configurations of the embodiments may be appropriately combined. In addition, it should be considered that the embodiment disclosed this time is illustrative in all points and not restrictive. The scope of the present invention is defined by the terms of the claims, rather than the description above, and is intended to include any modifications within the scope and meaning equivalent to the terms of the claims.

  The present invention can be particularly advantageously applied to a soaking apparatus that heats an object to be heat-treated such as an organic material for semiconductor production to a soaking state.

  1 plate, 1a surface, 1b back surface, 1c, 1d side surface, 2 heat pipe circuit, 2a branch portion, 2b header portion, 2d connecting portion, 3 heating means, 4 heat transfer block, 4a recess, 5 heat transfer material, 6 heater , 6 forms, 7, 8, 8a intervening member, 9 fixing bolt, 10 heater holding plate, 10a recess, 12 evaporation surface, 14 contact surface, 21, 22 heat flow, 30 internal space, 31 working fluid, 32 vapor bubble, 33 Steam, 34 Condensate, 39 High-performance boiling surface, 41 First member, 42 Second member, 42a Opposing surface.

Claims (14)

A plate (1) in which a heat pipe circuit (2) enclosing a hydraulic fluid (31) is formed;
Heating means (3) for heating the hydraulic fluid (31),
In the heat pipe circuit (2), the header (2b) where the hydraulic fluid (31) is heated and vaporized, and the vapor (33) vaporized from the hydraulic fluid (31) exchanges heat with the plate (1). A plurality of branch portions (2a) branching from the header portion (2b) to be condensed,
The heating means (3) is provided on the wall surface (12) side of the header portion (2b), which contacts the hydraulic fluid (31) when the heating means (3) heats the hydraulic fluid (31). A soaking apparatus. The plate (1) is formed in a planar rectangular shape,
The header portion (2b) extends along one side surface (1c) of the plate (1), and the branch portion (2a) is the other side surface of the plate (1) facing the one side surface (1c) ( The soaking apparatus according to claim 1, which is provided so as to extend toward 1d).   The soaking apparatus according to claim 2, wherein the plurality of branches (2a) are arranged in parallel to each other.   The said heat pipe circuit (2) is a soaking | uniform-heating apparatus of Claim 2 which further contains the connection part (2d) which connects the said branch parts (2a).   The soaking apparatus according to claim 4, wherein the connecting portion (2d) connects the ends of the branch portions (2a) extending from the header portion (2b).   The soaking apparatus according to claim 4, wherein a plurality of the connecting portions (2d) are provided and arranged in parallel to each other.   The heating means (3) includes a heater (6), a heat transfer block (4) in which a recess (4a) is formed and the heater (6) is accommodated in the recess (4a), and the heater (6). The soaking apparatus according to claim 1, further comprising a heater pressing plate (10) held in the recess (4a).   The said heating means (3) contains the fixing member (9) which fixes the said heater holding | suppressing board (10) and the said heat-transfer block (4) to the said plate (1) integrally, Claim 7 The soaking apparatus described.   The soaking apparatus of Claim 7 provided with the heat conductive interposition member (7) interposed between the said plate (1) and the said heat-transfer block (4).   The said heating means (3) is provided with the heat conductive interposition member (8) interposed between the said heat-transfer block (4) and the said heater holding | suppressing plate (10), The range of Claim 7 characterized by the above-mentioned. Soaking equipment.   The said heating means (3) is equipped with the heat insulation interposed member (8a) interposed between the said heat-transfer block (4) and the said heater holding | suppressing plate (10), The leveling of Claim 7 characterized by the above-mentioned. Heat treatment equipment.   The leveler according to claim 7, wherein the heater holding plate (10) is formed with a recess (10a) for accommodating the heater (6) at a position facing the recess (4a). Heat treatment equipment.   The soaking apparatus according to claim 1, wherein the wall surface (12) is provided with a high-performance boiling surface (39) that promotes boiling of the hydraulic fluid (31). The width (l ₀ ) in which the heating means (3) is in thermal contact with the plate (1) is equal to or less than the width (l ₁ ) of the wall surface (12). Heat treatment equipment.

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