JPWO2011105205A1 - 紫外線酸化装置及びそれを用いた超純水製造装置、並びに紫外線酸化方法及び超純水製造方法 - Google Patents
紫外線酸化装置及びそれを用いた超純水製造装置、並びに紫外線酸化方法及び超純水製造方法 Download PDFInfo
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Abstract
Description
5リットルの三口フラスコに無水トルエン2.5リットルと金属ナトリウム400gとを入れ窒素ガス気流下でトルエンの沸点まで加熱し、ジメチルジクロロシラン1リットルを1時間かけて滴下した。滴下終了後、10時間加熱還流し沈殿物を生成させた。この沈殿を濾過し、まずメタノールで洗浄した後、水で洗浄して、白色粉末のポリジメチルシラン420gを得た。ポリジメチルシラン250gを、水冷還流器を備えた三口フラスコ中に仕込み、窒素気流下、420℃で30時間加熱反応させて数平均分子量が1200のポリカルボシランを得た。
製造例1により得られたチタニア/シリカ繊維を平板状不織布とし、それを備える光触媒カートリッジとし、図5に示される紫外線酸化装置を作製した。紫外線ランプの出力は60Wであり、24本を使用した。紫外線ランプの波長は254nmと185nmの両方を放射する。紫外線ランプと平板状不織布の距離は90mmとし、平板状不織布表面の平均紫外線強度は2mW/cm2であった。上水を公知の凝集濾過装置、2床3塔型イオン交換装置、逆浸透膜装置で処理した後、この紫外線酸化装置で処理し、続けて公知の脱気装置、イオン吸着装置、及び限外濾過装置で処理することにより超純水を得た。得られた超純水のTOCは20ppb程度あった。処理速度は、最終的に得られる超純水のTOCが0.5ppb程度になるように調整した。この場合の処理速度は16.1m3/h、紫外線酸化装置に係る消費エネルギーは0.13kWh/m3であった。
次に、実施例1により得られた紫外線酸化装置を用いて、図7に示される超純水製造装置を作製した。逆浸透膜装置としては、GE社製のAG型を用い、イオン交換装置としては、SnowPure社製の連続電気再生式イオン交換装置(XL型)を用い、混床式イオン交換装置としては、伸栄化学産業(株)製のカートリッジポリッシャー(RT型)を用い、限外濾過装置としては、日東電工(株)製のNTU型を用いた。また、公知の前処理装置として、伸栄化学産業(株)製の活性炭濾過器(RT型)、軟水器(RT型)、及び新菱アクアエア(株)製のフィルター(BL型)を用いた。
特開平10−151450の実施例に記載の方法を参考に、直径250mm、長さ1500mmのステンレス製の筒に、254nmと194nmと184nmの各波長を放射する65Wの低圧紫外線ランプ24本を内蔵した紫外線酸化装置を作成した。光触媒は、アナターゼ型チタニアを透光性アルミナ板材に担持したものを紫外線酸化装置の内部に挿入した。紫外線酸化装置の内容積に対する光触媒の重量は80ppmとした。紫外線酸化装置以外は、実施例1と同様に、上水を公知の凝集濾過装置、2床3塔型イオン交換装置、逆浸透膜装置、脱気装置で処理した後、この紫外線酸化装置で処理し、続けて公知のイオン吸着装置および限外濾過装置で処理することにより超純水を得た。処理速度は、最終的に得られる超純水のTOCが0.5ppb程度になるように調整した。この場合の処理速度は4.7m3/hであり、紫外線酸化装置に係る消費エネルギーは0.47KWh/m3であった。
10A 流入口
10B 流出口
12 光触媒カートリッジ(光触媒繊維)
12A 平板状不織布
12B 金網
14 紫外線照射ランプ(紫外線照射部)
16 紫外線照射ランプ収容部材(紫外線照射部収容部)
18 二重管
18A 外管
18B 内管
18C 流入口
18D 流出口
20 仕切り板
40 逆浸透膜装置
42 イオン交換装置
44 タンク
46 紫外線酸化装置
48 混床式イオン交換装置
50 限外濾過装置
Claims (11)
- 被処理水を一方向に流動させる流動槽と、
被処理水が通過可能に前記流動槽内に配置された光触媒繊維と、
紫外線を照射可能な紫外線照射部と、
前記流動槽内の被処理水の流動方向に交差する面の全域に亘って設けられ、前記紫外線照射部を収容する紫外線照射部収容部とを備えた紫外線酸化装置であって、
前記紫外線照射部収容部は、上流側から収容された紫外線照射部に向かって被処理水を該収容部内に流入させ、前記収容部内を流動させた後に下流側に流出させるよう形成され、前記紫外線照射部からの紫外線が前記光触媒繊維に照射可能な素材から構成されていることを特徴とする紫外線酸化装置。 - 前記紫外線照射部収容部は、紫外線照射部を収容する内管と、該内管の覆う外管とを備えていること特徴とする請求項1記載の紫外線酸化装置。
- 前記内管と外管の径方向の間隔が1〜10mmであることを特徴とする請求項2記載の紫外線酸化装置。
- 前記内管及び外管が、180〜190nmと250〜260nmの波長の紫外線を透過する素材から構成されていることを特徴とする請求項2又は3記載の紫外線酸化装置。
- 前記紫外線照射部は、180〜190nmと250〜260nmそれぞれにピーク波長を有する紫外線を照射可能に構成されていることを特徴とする請求項1乃至4いずれか記載の紫外線酸化装置。
- 前記紫外線照射部が長尺状に形成され、前記光触媒繊維が平板状に形成されており、前記紫外線照射部の長手方向と前記光触媒繊維の平面方向が平行になるように設定されていることを特徴とする請求項1乃至5いずれか記載の紫外線酸化装置。
- 被処理水中の不純物を除去する逆浸透膜装置と、
該逆浸透膜装置の下流に設置され、前記逆浸透膜装置によって不純物除去された被処理水中のイオン成分を除去するイオン交換装置と、
該イオン交換装置の下流に設置され、前記イオン交換装置によってイオン成分除去された被処理水中の有機物成分を分解する請求項1乃至6いずれか記載の紫外線酸化装置と、
該紫外線酸化装置の下流に設置され、前記紫外線酸化装置による有機物成分の分解によって被処理水中に生じたイオン成分を除去する混床式イオン交換装置と、
該混床式イオン交換装置の下流に設置され、前記逆浸透膜装置以降の処理によって被処理水中に生じた粒子状物を除去する限外濾過装置とを備えたこと
を特徴とする超純水製造装置。 - 前記限外濾過装置の上流側に設置され、被処理水中のガスを除去する脱気装置をさらに備えたことを特徴とする請求項7記載の超純水製造装置。
- 前記脱気装置は、少なくとも前記逆浸透膜装置とイオン交換装置の間及び前記イオン交換装置と前記限外濾過装置の間に設置されていることを特徴とする請求項8記載の超純水製造装置。
- 被処理水が通過可能な光触媒繊維と、紫外線を照射可能な紫外線照射部と、該紫外線照射部を収容し、被処理水が内部を流動可能な紫外線照射部収容部とを有する流動槽内を流動する被処理水中に含まれる有機物を酸化分解処理する紫外線酸化方法であって、
前記光触媒繊維に前記紫外線照射部から紫外線を照射させた状態で被処理水が前記光触媒繊維を通過する工程と、
被処理水に前記紫外線照射部から紫外線を照射させた状態で被処理水が前記紫外線照射部収容部内を流動する工程とを備えたこと
を特徴とする紫外線酸化方法。 - 被処理水中の不純物を除去する不純物除去工程と、
該不純物除去工程によって処理された被処理水中のイオン成分を除去する第1イオン成分除去工程と、
請求項10記載の紫外線酸化方法によって、前記第1イオン除去工程によって処理された被処理水中の有機物成分を分解する有機物成分分解工程と、
該有機物成分分解工程によって被処理水中に生じたイオン成分を除去する第2イオン成分除去工程と、
前記不純物除去工程以降に被処理水中に生じた粒子状物を除去する粒子状物除去工程とを備えたこと
を特徴とする超純水製造方法。
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Free format text: JAPANESE INTERMEDIATE CODE: R250 |
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R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
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