JPWO2008123352A1 - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
- Publication number
- JPWO2008123352A1 JPWO2008123352A1 JP2009509160A JP2009509160A JPWO2008123352A1 JP WO2008123352 A1 JPWO2008123352 A1 JP WO2008123352A1 JP 2009509160 A JP2009509160 A JP 2009509160A JP 2009509160 A JP2009509160 A JP 2009509160A JP WO2008123352 A1 JPWO2008123352 A1 JP WO2008123352A1
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- germanium
- semiconductor layer
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 130
- 229910052732 germanium Inorganic materials 0.000 claims abstract description 107
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 claims abstract description 106
- 229910000577 Silicon-germanium Inorganic materials 0.000 claims abstract description 55
- LEVVHYCKPQWKOP-UHFFFAOYSA-N [Si].[Ge] Chemical compound [Si].[Ge] LEVVHYCKPQWKOP-UHFFFAOYSA-N 0.000 claims abstract description 55
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 47
- 239000010703 silicon Substances 0.000 claims abstract description 47
- 239000012535 impurity Substances 0.000 claims abstract description 41
- 230000000694 effects Effects 0.000 claims abstract description 36
- 239000000758 substrate Substances 0.000 claims abstract description 33
- 238000000034 method Methods 0.000 claims description 11
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 3
- 229910052799 carbon Inorganic materials 0.000 claims description 3
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 3
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract description 44
- 238000009792 diffusion process Methods 0.000 abstract description 17
- 239000000463 material Substances 0.000 abstract description 8
- 229910021332 silicide Inorganic materials 0.000 abstract description 5
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 abstract description 5
- 150000002290 germanium Chemical class 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 162
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 7
- 229910052814 silicon oxide Inorganic materials 0.000 description 7
- 238000010438 heat treatment Methods 0.000 description 5
- 230000007423 decrease Effects 0.000 description 4
- 230000001629 suppression Effects 0.000 description 4
- 239000000969 carrier Substances 0.000 description 3
- 230000006866 deterioration Effects 0.000 description 3
- 238000002955 isolation Methods 0.000 description 3
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
- 238000001451 molecular beam epitaxy Methods 0.000 description 2
- 229910006939 Si0.5Ge0.5 Inorganic materials 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7833—Field effect transistors with field effect produced by an insulated gate with lightly doped drain or source extension, e.g. LDD MOSFET's; DDD MOSFET's
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/10—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode not carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
- H01L29/1025—Channel region of field-effect devices
- H01L29/1029—Channel region of field-effect devices of field-effect transistors
- H01L29/1033—Channel region of field-effect devices of field-effect transistors with insulated gate, e.g. characterised by the length, the width, the geometric contour or the doping structure
- H01L29/1054—Channel region of field-effect devices of field-effect transistors with insulated gate, e.g. characterised by the length, the width, the geometric contour or the doping structure with a variation of the composition, e.g. channel with strained layer for increasing the mobility
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66545—Unipolar field-effect transistors with an insulated gate, i.e. MISFET using a dummy, i.e. replacement gate in a process wherein at least a part of the final gate is self aligned to the dummy gate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66568—Lateral single gate silicon transistors
- H01L29/66613—Lateral single gate silicon transistors with a gate recessing step, e.g. using local oxidation
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- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Insulated Gate Type Field-Effect Transistor (AREA)
- Thin Film Transistor (AREA)
Abstract
Description
前記半導体層のうちチャネル領域を形成する半導体層の膜厚を規定することにより、前記チャネル領域を流れる駆動電流を低下させずに短チャネル効果を抑制した構造を有することを特徴とするものである。
101;p型ゲルマニウム基板
12、112;p型ウェル
2、21、22;シリコンゲルマニウム層
3、31、32、103;ゲルマニウム層
41、104;シリコン層
6、61、62、63、106;ゲート絶縁膜
7、71、73、107;ゲート電極
8、108;側壁絶縁膜
9、109;n型不純物拡散領域
13;シリサイド層
20;半導体領域
72;ダミーゲート電極
81;シリコン酸化膜
92;n型不純物領域
Claims (19)
- 誘電率が異なっている2以上の半導体層を含む半導体領域と、
前記半導体領域を被覆するゲート絶縁膜と、
前記ゲート絶縁膜上に形成されたゲート電極とを基板上に有し、
前記半導体領域のうちチャネル領域を形成する半導体層の膜厚を規定することにより、前記チャネル領域を流れる駆動電流を低下させずに短チャネル効果を抑制した構造を有することを特徴とする半導体装置。 - 前記半導体領域の半導体層のうち前記チャネル領域を形成する半導体層に対応して、高濃度不純物領域が形成されている請求項1に記載の半導体装置。
- 前記高濃度不純物領域が、前記チャネル領域以外の前記半導体領域内に形成されている請求項2に記載の半導体装置。
- 前記高濃度不純物領域が、前記半導体領域外にあって前記チャネル領域を形成する半導体層に接して形成されている請求項2に記載の半導体装置。
- 前記半導体領域と前記ゲート絶縁膜との間に、別の半導体層が形成されている請求項1に記載の半導体装置。
- 前記別の半導体層は、シリコンを主成分とする請求項5に記載の半導体装置。
- 前記ゲート絶縁膜及び前記ゲート電極は、ダマシンゲート構造を有する請求項1に記載の半導体装置。
- 前記基板がSOI基板である請求項1に記載の半導体装置。
- 前記高濃度不純物領域が、エピタキシャル成長により形成されている請求項2、3又は4のいずれか一項に記載の半導体装置。
- 前記高濃度不純物層が、シリコンゲルマニウムを主成分とする請求項9に記載の半導体装置。
- 前記高濃度不純物層が、シリコンカーバイドを主成分とする請求項9に記載の半導体装置。
- 前記チャネル領域を形成する半導体層の膜厚が、3乃至40nmの範囲に規定されている請求項1に記載の半導体装置。
- 前記半導体層は、3層に積層され、かつ前記基板側から順に大きくなるように誘電率が設定され、
前記チャネル領域を形成する半導体層の誘電率が最大値に設定されている請求項1に記載の半導体装置。 - 前記チャネル領域を形成する半導体層がゲート絶縁膜と接する請求項13に記載の半導体装置。
- 前記半導体層のうち、中間層に位置する半導体層は、膜厚が30nm以下であることを特徴とする請求項13に記載の半導体装置。
- 誘電率が最大の前記半導体層がゲルマニウムを主成分とし、中間層の前記半導体層がシリコンゲルマニウムを主成分とし、基板に一番近い前記半導体層がシリコンを主成分とする請求項13に記載の半導体装置。
- 誘電率が最大の前記半導体層がシリコンゲルマニウムを主成分とし、中間層の前記半導体層が前記シリコンゲルマニウムよりゲルマニウム濃度の低いシリコンゲルマニウムを主成分とし、基板に一番近い前記半導体層がシリコンを主成分とする請求項13に記載の半導体装置。
- シリコンゲルマニウムを主成分とする前記半導体層又はゲルマニウムを主成分とする前記半導体層は、エピタキシャル成長法により形成されている請求項16又は17に記載の半導体装置。
- 誘電率が最大の前記半導体層及び中間層の前記半導体層の少なくともいずれか一方は、炭素を含有する請求項13に記載の半導体装置。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009509160A JP5396268B2 (ja) | 2007-03-28 | 2008-03-27 | 半導体装置 |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007085992 | 2007-03-28 | ||
JP2007085992 | 2007-03-28 | ||
PCT/JP2008/055861 WO2008123352A1 (ja) | 2007-03-28 | 2008-03-27 | 半導体装置 |
JP2009509160A JP5396268B2 (ja) | 2007-03-28 | 2008-03-27 | 半導体装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2008123352A1 true JPWO2008123352A1 (ja) | 2010-07-15 |
JP5396268B2 JP5396268B2 (ja) | 2014-01-22 |
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Family Applications (1)
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JP2009509160A Expired - Fee Related JP5396268B2 (ja) | 2007-03-28 | 2008-03-27 | 半導体装置 |
Country Status (3)
Country | Link |
---|---|
US (1) | US8809939B2 (ja) |
JP (1) | JP5396268B2 (ja) |
WO (1) | WO2008123352A1 (ja) |
Families Citing this family (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2005106191A1 (en) | 2004-04-23 | 2005-11-10 | Shell International Research Maatschappij B.V. | Inhibiting reflux in a heated well of an in situ conversion system |
EP2010754A4 (en) | 2006-04-21 | 2016-02-24 | Shell Int Research | ADJUSTING ALLOY COMPOSITIONS FOR SELECTED CHARACTERISTICS IN TEMPERATURE-LIMITED HEATERS |
NZ581359A (en) | 2007-04-20 | 2012-08-31 | Shell Oil Co | System and method for the use of a subsurface heating device on underground Tar Sand formation |
US9129728B2 (en) * | 2008-10-13 | 2015-09-08 | Shell Oil Company | Systems and methods of forming subsurface wellbores |
US8851170B2 (en) | 2009-04-10 | 2014-10-07 | Shell Oil Company | Heater assisted fluid treatment of a subsurface formation |
US8623728B2 (en) * | 2009-07-28 | 2014-01-07 | Taiwan Semiconductor Manufacturing Company, Ltd. | Method for forming high germanium concentration SiGe stressor |
US8816203B2 (en) | 2009-10-09 | 2014-08-26 | Shell Oil Company | Compacted coupling joint for coupling insulated conductors |
US9466896B2 (en) | 2009-10-09 | 2016-10-11 | Shell Oil Company | Parallelogram coupling joint for coupling insulated conductors |
US8939207B2 (en) | 2010-04-09 | 2015-01-27 | Shell Oil Company | Insulated conductor heaters with semiconductor layers |
JP2013524465A (ja) * | 2010-04-09 | 2013-06-17 | シエル・インターナシヨナル・リサーチ・マートスハツペイ・ベー・ヴエー | 絶縁ブロックおよび絶縁導体ヒータへの設置方法 |
US8967259B2 (en) | 2010-04-09 | 2015-03-03 | Shell Oil Company | Helical winding of insulated conductor heaters for installation |
US8857051B2 (en) | 2010-10-08 | 2014-10-14 | Shell Oil Company | System and method for coupling lead-in conductor to insulated conductor |
US8732946B2 (en) | 2010-10-08 | 2014-05-27 | Shell Oil Company | Mechanical compaction of insulator for insulated conductor splices |
US8943686B2 (en) | 2010-10-08 | 2015-02-03 | Shell Oil Company | Compaction of electrical insulation for joining insulated conductors |
CN103460518B (zh) | 2011-04-08 | 2016-10-26 | 国际壳牌研究有限公司 | 用于连接绝缘导体的适配接头 |
US9080917B2 (en) | 2011-10-07 | 2015-07-14 | Shell Oil Company | System and methods for using dielectric properties of an insulated conductor in a subsurface formation to assess properties of the insulated conductor |
JO3139B1 (ar) | 2011-10-07 | 2017-09-20 | Shell Int Research | تشكيل موصلات معزولة باستخدام خطوة اختزال أخيرة بعد المعالجة الحرارية. |
JO3141B1 (ar) | 2011-10-07 | 2017-09-20 | Shell Int Research | الوصلات المتكاملة للموصلات المعزولة |
US8791502B2 (en) * | 2011-10-09 | 2014-07-29 | The Institute of Microelectronics Chinese Academy of Science | Semiconductor device and method of manufacturing the same |
US10103226B2 (en) * | 2012-04-30 | 2018-10-16 | International Business Machines Corporation | Method of fabricating tunnel transistors with abrupt junctions |
CN103456633B (zh) * | 2012-05-30 | 2016-07-06 | 中芯国际集成电路制造(上海)有限公司 | Mos管及其形成方法 |
CN103456632B (zh) * | 2012-05-30 | 2016-04-20 | 中芯国际集成电路制造(上海)有限公司 | Mos管及其形成方法 |
US9647094B2 (en) * | 2013-08-02 | 2017-05-09 | University Of Kentucky Research Foundation | Method of manufacturing a semiconductor heteroepitaxy structure |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
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JPH04280682A (ja) | 1991-03-08 | 1992-10-06 | Toshiba Corp | 半導体装置及びその製造方法 |
JPH07321213A (ja) * | 1994-05-27 | 1995-12-08 | Hitachi Ltd | 半導体集積回路装置およびその製造方法 |
JP2000077658A (ja) * | 1998-08-28 | 2000-03-14 | Toshiba Corp | 半導体装置の製造方法 |
US6607948B1 (en) * | 1998-12-24 | 2003-08-19 | Kabushiki Kaisha Toshiba | Method of manufacturing a substrate using an SiGe layer |
US6844227B2 (en) * | 2000-12-26 | 2005-01-18 | Matsushita Electric Industrial Co., Ltd. | Semiconductor devices and method for manufacturing the same |
JP2002237590A (ja) * | 2001-02-09 | 2002-08-23 | Univ Tohoku | Mos型電界効果トランジスタ |
US7301180B2 (en) * | 2001-06-18 | 2007-11-27 | Massachusetts Institute Of Technology | Structure and method for a high-speed semiconductor device having a Ge channel layer |
DE10360874B4 (de) | 2003-12-23 | 2009-06-04 | Infineon Technologies Ag | Feldeffekttransistor mit Heteroschichtstruktur sowie zugehöriges Herstellungsverfahren |
US7166897B2 (en) * | 2004-08-24 | 2007-01-23 | Freescale Semiconductor, Inc. | Method and apparatus for performance enhancement in an asymmetrical semiconductor device |
JP2006165335A (ja) * | 2004-12-08 | 2006-06-22 | Toshiba Corp | 半導体装置 |
-
2008
- 2008-03-27 JP JP2009509160A patent/JP5396268B2/ja not_active Expired - Fee Related
- 2008-03-27 WO PCT/JP2008/055861 patent/WO2008123352A1/ja active Application Filing
- 2008-03-27 US US12/532,302 patent/US8809939B2/en active Active
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Publication number | Publication date |
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US8809939B2 (en) | 2014-08-19 |
WO2008123352A1 (ja) | 2008-10-16 |
US20100044781A1 (en) | 2010-02-25 |
JP5396268B2 (ja) | 2014-01-22 |
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