JPS649323A - Light waveform observing instrument - Google Patents
Light waveform observing instrumentInfo
- Publication number
- JPS649323A JPS649323A JP16353587A JP16353587A JPS649323A JP S649323 A JPS649323 A JP S649323A JP 16353587 A JP16353587 A JP 16353587A JP 16353587 A JP16353587 A JP 16353587A JP S649323 A JPS649323 A JP S649323A
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- electron beam
- opening
- plate
- sampled
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010894 electron beam technology Methods 0.000 abstract 4
- 238000005070 sampling Methods 0.000 abstract 3
- 230000035945 sensitivity Effects 0.000 abstract 1
- 230000002123 temporal effect Effects 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J11/00—Measuring the characteristics of individual optical pulses or of optical pulse trains
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
- Image-Pickup Tubes, Image-Amplification Tubes, And Storage Tubes (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16353587A JPS649323A (en) | 1987-06-30 | 1987-06-30 | Light waveform observing instrument |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16353587A JPS649323A (en) | 1987-06-30 | 1987-06-30 | Light waveform observing instrument |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS649323A true JPS649323A (en) | 1989-01-12 |
JPH056122B2 JPH056122B2 (enrdf_load_stackoverflow) | 1993-01-25 |
Family
ID=15775726
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP16353587A Granted JPS649323A (en) | 1987-06-30 | 1987-06-30 | Light waveform observing instrument |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS649323A (enrdf_load_stackoverflow) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100871876B1 (ko) * | 2006-09-26 | 2008-12-03 | 나노전광 주식회사 | 광검출기를 이용한 포토마스크 표면의 헤이즈 검출장치 및그 검출방법 |
-
1987
- 1987-06-30 JP JP16353587A patent/JPS649323A/ja active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100871876B1 (ko) * | 2006-09-26 | 2008-12-03 | 나노전광 주식회사 | 광검출기를 이용한 포토마스크 표면의 헤이즈 검출장치 및그 검출방법 |
Also Published As
Publication number | Publication date |
---|---|
JPH056122B2 (enrdf_load_stackoverflow) | 1993-01-25 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
S531 | Written request for registration of change of domicile |
Free format text: JAPANESE INTERMEDIATE CODE: R313532 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
EXPY | Cancellation because of completion of term | ||
FPAY | Renewal fee payment (prs date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20080125 Year of fee payment: 15 |