JPS649323A - Light waveform observing instrument - Google Patents

Light waveform observing instrument

Info

Publication number
JPS649323A
JPS649323A JP16353587A JP16353587A JPS649323A JP S649323 A JPS649323 A JP S649323A JP 16353587 A JP16353587 A JP 16353587A JP 16353587 A JP16353587 A JP 16353587A JP S649323 A JPS649323 A JP S649323A
Authority
JP
Japan
Prior art keywords
electrode
electron beam
opening
plate
sampled
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16353587A
Other languages
English (en)
Japanese (ja)
Other versions
JPH056122B2 (enrdf_load_stackoverflow
Inventor
Yu Koishi
Yutaka Tsuchiya
Katsuyuki Kinoshita
Yoshinori Inagaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hamamatsu Photonics KK
Original Assignee
Hamamatsu Photonics KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hamamatsu Photonics KK filed Critical Hamamatsu Photonics KK
Priority to JP16353587A priority Critical patent/JPS649323A/ja
Publication of JPS649323A publication Critical patent/JPS649323A/ja
Publication of JPH056122B2 publication Critical patent/JPH056122B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J11/00—Measuring the characteristics of individual optical pulses or of optical pulse trains

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Image-Pickup Tubes, Image-Amplification Tubes, And Storage Tubes (AREA)
JP16353587A 1987-06-30 1987-06-30 Light waveform observing instrument Granted JPS649323A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16353587A JPS649323A (en) 1987-06-30 1987-06-30 Light waveform observing instrument

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16353587A JPS649323A (en) 1987-06-30 1987-06-30 Light waveform observing instrument

Publications (2)

Publication Number Publication Date
JPS649323A true JPS649323A (en) 1989-01-12
JPH056122B2 JPH056122B2 (enrdf_load_stackoverflow) 1993-01-25

Family

ID=15775726

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16353587A Granted JPS649323A (en) 1987-06-30 1987-06-30 Light waveform observing instrument

Country Status (1)

Country Link
JP (1) JPS649323A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100871876B1 (ko) * 2006-09-26 2008-12-03 나노전광 주식회사 광검출기를 이용한 포토마스크 표면의 헤이즈 검출장치 및그 검출방법

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100871876B1 (ko) * 2006-09-26 2008-12-03 나노전광 주식회사 광검출기를 이용한 포토마스크 표면의 헤이즈 검출장치 및그 검출방법

Also Published As

Publication number Publication date
JPH056122B2 (enrdf_load_stackoverflow) 1993-01-25

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