JPS6489255A - High-frequency inductive coupling plasma analyzer - Google Patents

High-frequency inductive coupling plasma analyzer

Info

Publication number
JPS6489255A
JPS6489255A JP62247305A JP24730587A JPS6489255A JP S6489255 A JPS6489255 A JP S6489255A JP 62247305 A JP62247305 A JP 62247305A JP 24730587 A JP24730587 A JP 24730587A JP S6489255 A JPS6489255 A JP S6489255A
Authority
JP
Japan
Prior art keywords
high frequency
power supply
output
frequency power
voltage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62247305A
Other languages
Japanese (ja)
Inventor
Yoshiaki Kakizaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp filed Critical Yokogawa Electric Corp
Priority to JP62247305A priority Critical patent/JPS6489255A/en
Publication of JPS6489255A publication Critical patent/JPS6489255A/en
Pending legal-status Critical Current

Links

Landscapes

  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Tubes For Measurement (AREA)

Abstract

PURPOSE:To hold the output of a high frequency power supply constant even with changing load on high frequency induction coupling plasma or the source voltage by sensing the output of the high frequency power supply divided into voltage and current, and by carrying out controls on the basis of the power output obtained from them. CONSTITUTION:Output power from a high frequency power supply 7 is directly supplied to a high frequency induction coil 6, and a high frequency magnetic field is formed around this coil 6. When under this condition electrons or ions are implanted in argon gas in the areas near the high frequency magnetic field, high frequency induction plasma 18 is generated momentarily through the action of the magnetic field. The output power of the high frequency power supply 7 is, on the other hand, sensed in the form of voltage E1 by a voltage sensing capacitor 23 and also in the form of current I1 by a current sensing coil 24 followed by detection with detector circuits 25, 26 and multiplication by a multiplier 27 to become a power output E1'', and on the basis of it the output power of the high frequency power supply 7 is controlled. This can keep the output power of the high frequency power supply at a constant value even with changing load on high frequency induction coupling plasma and with changing source voltage of high frequency power supply.
JP62247305A 1987-09-30 1987-09-30 High-frequency inductive coupling plasma analyzer Pending JPS6489255A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62247305A JPS6489255A (en) 1987-09-30 1987-09-30 High-frequency inductive coupling plasma analyzer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62247305A JPS6489255A (en) 1987-09-30 1987-09-30 High-frequency inductive coupling plasma analyzer

Publications (1)

Publication Number Publication Date
JPS6489255A true JPS6489255A (en) 1989-04-03

Family

ID=17161435

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62247305A Pending JPS6489255A (en) 1987-09-30 1987-09-30 High-frequency inductive coupling plasma analyzer

Country Status (1)

Country Link
JP (1) JPS6489255A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2020016A1 (en) * 2006-05-22 2009-02-04 Varian Australia Pty Ltd Power generator for spectrometry

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62184755A (en) * 1986-02-07 1987-08-13 Yokogawa Electric Corp High frequency induction-coupled plasma mass spectrometer

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62184755A (en) * 1986-02-07 1987-08-13 Yokogawa Electric Corp High frequency induction-coupled plasma mass spectrometer

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2020016A1 (en) * 2006-05-22 2009-02-04 Varian Australia Pty Ltd Power generator for spectrometry
EP2020016B1 (en) * 2006-05-22 2019-06-26 Agilent Technologies Australia (M) Pty Ltd Power generator for spectrometry

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