JPS648920B2 - - Google Patents

Info

Publication number
JPS648920B2
JPS648920B2 JP57168544A JP16854482A JPS648920B2 JP S648920 B2 JPS648920 B2 JP S648920B2 JP 57168544 A JP57168544 A JP 57168544A JP 16854482 A JP16854482 A JP 16854482A JP S648920 B2 JPS648920 B2 JP S648920B2
Authority
JP
Japan
Prior art keywords
electrode
ions
ion
recovery device
energy recovery
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP57168544A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5960900A (ja
Inventor
Kyoshi Hashimoto
Tooru Sugawara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP57168544A priority Critical patent/JPS5960900A/ja
Publication of JPS5960900A publication Critical patent/JPS5960900A/ja
Publication of JPS648920B2 publication Critical patent/JPS648920B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Plasma Technology (AREA)
JP57168544A 1982-09-29 1982-09-29 イオン・エネルギ−回収装置 Granted JPS5960900A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57168544A JPS5960900A (ja) 1982-09-29 1982-09-29 イオン・エネルギ−回収装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57168544A JPS5960900A (ja) 1982-09-29 1982-09-29 イオン・エネルギ−回収装置

Publications (2)

Publication Number Publication Date
JPS5960900A JPS5960900A (ja) 1984-04-06
JPS648920B2 true JPS648920B2 (enrdf_load_stackoverflow) 1989-02-15

Family

ID=15869978

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57168544A Granted JPS5960900A (ja) 1982-09-29 1982-09-29 イオン・エネルギ−回収装置

Country Status (1)

Country Link
JP (1) JPS5960900A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS5960900A (ja) 1984-04-06

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