JPS5960900A - イオン・エネルギ−回収装置 - Google Patents

イオン・エネルギ−回収装置

Info

Publication number
JPS5960900A
JPS5960900A JP57168544A JP16854482A JPS5960900A JP S5960900 A JPS5960900 A JP S5960900A JP 57168544 A JP57168544 A JP 57168544A JP 16854482 A JP16854482 A JP 16854482A JP S5960900 A JPS5960900 A JP S5960900A
Authority
JP
Japan
Prior art keywords
ions
electrode
energy
ion
ion energy
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57168544A
Other languages
English (en)
Japanese (ja)
Other versions
JPS648920B2 (enrdf_load_stackoverflow
Inventor
清 橋本
亨 菅原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP57168544A priority Critical patent/JPS5960900A/ja
Publication of JPS5960900A publication Critical patent/JPS5960900A/ja
Publication of JPS648920B2 publication Critical patent/JPS648920B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Plasma Technology (AREA)
JP57168544A 1982-09-29 1982-09-29 イオン・エネルギ−回収装置 Granted JPS5960900A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57168544A JPS5960900A (ja) 1982-09-29 1982-09-29 イオン・エネルギ−回収装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57168544A JPS5960900A (ja) 1982-09-29 1982-09-29 イオン・エネルギ−回収装置

Publications (2)

Publication Number Publication Date
JPS5960900A true JPS5960900A (ja) 1984-04-06
JPS648920B2 JPS648920B2 (enrdf_load_stackoverflow) 1989-02-15

Family

ID=15869978

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57168544A Granted JPS5960900A (ja) 1982-09-29 1982-09-29 イオン・エネルギ−回収装置

Country Status (1)

Country Link
JP (1) JPS5960900A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS648920B2 (enrdf_load_stackoverflow) 1989-02-15

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