JPH0422000B2 - - Google Patents

Info

Publication number
JPH0422000B2
JPH0422000B2 JP58042345A JP4234583A JPH0422000B2 JP H0422000 B2 JPH0422000 B2 JP H0422000B2 JP 58042345 A JP58042345 A JP 58042345A JP 4234583 A JP4234583 A JP 4234583A JP H0422000 B2 JPH0422000 B2 JP H0422000B2
Authority
JP
Japan
Prior art keywords
temperature
recovery
electrode
refrigerant
energy
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58042345A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59169100A (ja
Inventor
Hideki Yoshida
Kyoshi Hashimoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP58042345A priority Critical patent/JPS59169100A/ja
Publication of JPS59169100A publication Critical patent/JPS59169100A/ja
Publication of JPH0422000B2 publication Critical patent/JPH0422000B2/ja
Granted legal-status Critical Current

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E30/00—Energy generation of nuclear origin
    • Y02E30/10—Nuclear fusion reactors
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

Landscapes

  • Plasma Technology (AREA)
  • Particle Accelerators (AREA)
  • Drying Of Semiconductors (AREA)
JP58042345A 1983-03-16 1983-03-16 イオン・エネルギ−回収装置 Granted JPS59169100A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58042345A JPS59169100A (ja) 1983-03-16 1983-03-16 イオン・エネルギ−回収装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58042345A JPS59169100A (ja) 1983-03-16 1983-03-16 イオン・エネルギ−回収装置

Publications (2)

Publication Number Publication Date
JPS59169100A JPS59169100A (ja) 1984-09-22
JPH0422000B2 true JPH0422000B2 (enrdf_load_stackoverflow) 1992-04-14

Family

ID=12633429

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58042345A Granted JPS59169100A (ja) 1983-03-16 1983-03-16 イオン・エネルギ−回収装置

Country Status (1)

Country Link
JP (1) JPS59169100A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4256031B2 (ja) 1999-07-27 2009-04-22 東京エレクトロン株式会社 処理装置およびその温度制御方法

Also Published As

Publication number Publication date
JPS59169100A (ja) 1984-09-22

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