JPS6488910A - Manufacture of thin film magnetic head - Google Patents
Manufacture of thin film magnetic headInfo
- Publication number
- JPS6488910A JPS6488910A JP24517887A JP24517887A JPS6488910A JP S6488910 A JPS6488910 A JP S6488910A JP 24517887 A JP24517887 A JP 24517887A JP 24517887 A JP24517887 A JP 24517887A JP S6488910 A JPS6488910 A JP S6488910A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- magnetic layer
- annealing
- anisotropy
- magnetic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Magnetic Heads (AREA)
Abstract
PURPOSE:To obtain the head excellent in a high frequency characteristic by executing the annealing in a magnetic field at a higher temperature especially for a preceding group at the time of a manufacturing process when plural amorphous magnetic layer is divided as a group for a unit to execute the annealing. CONSTITUTION:A lower part magnetic layer 1 is formed by a CoTaZr type amorphous magnetic film due to the sputtering on a nonmagnetic substrate 6, and this is patterned to a prescribed shape after a film is formed and an annealing in the magnetic field is executed at 350 deg.C. On the upper layer, a gap layer 3 and a coil layer 4 are formed with ordinary thin film technics on the upper layer. Further, on it, an upper part magnetic layer 2 is formed by the same CoTaZr type amorphous magnetic film, the annealing in the magnetic field is executed at 150 deg.C and a prescribed patterning is executed. The anisotropy of the lower part magnetic layer 1 is added at a high temperature, the anisotropy of the upper part magnetic layer 2 is added at a low temperature, and therefore, for the lower part magnetic layer 1, the anisotropy is not disturbed even at the time of patterning of the upper part magnetic layer 2, and consequently, for both upper and lower magnetic layers 1 and 2, a suitable anisotropy can be kept.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24517887A JPS6488910A (en) | 1987-09-29 | 1987-09-29 | Manufacture of thin film magnetic head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24517887A JPS6488910A (en) | 1987-09-29 | 1987-09-29 | Manufacture of thin film magnetic head |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6488910A true JPS6488910A (en) | 1989-04-03 |
Family
ID=17129771
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP24517887A Pending JPS6488910A (en) | 1987-09-29 | 1987-09-29 | Manufacture of thin film magnetic head |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6488910A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04188417A (en) * | 1990-11-22 | 1992-07-07 | Nec Kansai Ltd | Thin-film magnetic head and manufacture thereof |
| US5214840A (en) * | 1989-07-10 | 1993-06-01 | Hitachi, Ltd. | Thin film magnetic head and the method of fabricating the same |
| EP0752700A2 (en) * | 1995-07-05 | 1997-01-08 | Sony Corporation | Complex type thin film magnetic head and production method thereof |
-
1987
- 1987-09-29 JP JP24517887A patent/JPS6488910A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5214840A (en) * | 1989-07-10 | 1993-06-01 | Hitachi, Ltd. | Thin film magnetic head and the method of fabricating the same |
| JPH04188417A (en) * | 1990-11-22 | 1992-07-07 | Nec Kansai Ltd | Thin-film magnetic head and manufacture thereof |
| EP0752700A2 (en) * | 1995-07-05 | 1997-01-08 | Sony Corporation | Complex type thin film magnetic head and production method thereof |
| EP0752700A3 (en) * | 1995-07-05 | 1998-01-14 | Sony Corporation | Complex type thin film magnetic head and production method thereof |
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