JPS6445107A - Soft magnetic film for high frequency band and manufacture thereof - Google Patents
Soft magnetic film for high frequency band and manufacture thereofInfo
- Publication number
- JPS6445107A JPS6445107A JP20095087A JP20095087A JPS6445107A JP S6445107 A JPS6445107 A JP S6445107A JP 20095087 A JP20095087 A JP 20095087A JP 20095087 A JP20095087 A JP 20095087A JP S6445107 A JPS6445107 A JP S6445107A
- Authority
- JP
- Japan
- Prior art keywords
- soft magnetic
- less
- layers
- amorphous structure
- nonmagnetic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Thin Magnetic Films (AREA)
Abstract
PURPOSE:To improve magnetic characteristics, by alternately arranging soft magnetic layers having a specified amorphous structure and nonmagnetic layers having a crystalline structure. CONSTITUTION:A deposited film has an (x) at % halogen element (Q), which is formed by a reactive film forming method; a (y) at % added element (M) (where y=0 is included); and (100-x-y) at % ferromagnetic element (R). At this time, (x+y) is in the range of 10 at % or more and 50 at % or less. Then, solft magnetic layers and nonmagnetic layers are alternately arranged. The soft magnetic layer has an amorphous structure, wherein (x) is 25 at % or less, in the thickness direction of the deposited film. The nonmagnetic layer has a high resistance crystalline structure, wherein (x) is 55 at % or more and 80 at % or less. Therefore, sputtering with halogen gas and a deposition rate are improved. The yield of columnar crystals is less. Thus the amorphous structure including halogen gas is formed. Therefore, the high angle type soft magnetic material having low coercive force is obtained.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62200950A JP2571062B2 (en) | 1987-08-13 | 1987-08-13 | Soft magnetic film for high frequency band and method of manufacturing the same |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62200950A JP2571062B2 (en) | 1987-08-13 | 1987-08-13 | Soft magnetic film for high frequency band and method of manufacturing the same |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6445107A true JPS6445107A (en) | 1989-02-17 |
JP2571062B2 JP2571062B2 (en) | 1997-01-16 |
Family
ID=16433004
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62200950A Expired - Fee Related JP2571062B2 (en) | 1987-08-13 | 1987-08-13 | Soft magnetic film for high frequency band and method of manufacturing the same |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2571062B2 (en) |
-
1987
- 1987-08-13 JP JP62200950A patent/JP2571062B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JP2571062B2 (en) | 1997-01-16 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
LAPS | Cancellation because of no payment of annual fees |